Abstract
Planarization of diamond thin films has been carried out using a remote electron cyclotron resonance (ECR) oxygen plasma under a negative bias. Diamond thin films were synthesized by hot filament chemical vapor deposition (HFCVD). The surface roughness (RJ of the diamond films could be considerably reduced from 0.2 μm to 0.05 μm using the ECR oxygen plasma. Low planarization and a high etching rate of diamond films were observed for an incident angle of the ion beam to the film surface normal below 45 degrees. High applied bias above -600 V caused secondary discharge effects, resulting in inhomogeneous etching. With an increase in incident angle, needlelike morphology was observed in the diamond film.
Similar content being viewed by others
References
T. Zhao, D. F. Grogan, B. G. Bovard, and H. A. Macleod, Appl. Opt. 31, 1483 (1992).
A. Hirata, H. Tokura, and M. Yoshikawa, Thin Solid Films 212, 43 (1992).
H. Tokura, C. -F. Yang, and M. Yoshikawa, Thin Solid Films 212, 49 (1992).
S. Tezuka and M. Yosikawa, J. Jpn. Soc. Precision Eng. 56, 2255 (1990).
A. Blatter, U. Bögli, L. L. Bouilov, N. I. Chapliev, V. I. Konov, S. M. Pimenov, A. A. Smolin, and I. V. Spitsyn, J. Eletrochem. Soc. 91, 357 (1991).
U. Bögli, A. Blatter, S. M. Pimenov, A. A. Smolin, and V. I. Konov, Diamond & Rel. Mater. 1, 782 (1992).
S. M. Pimenov, A. A. Smolin, V. G. Ralchenko, S. V. Likhanski, I. A. Veselovski, G. A. Sokolina, S. V. Bantsekov, and B. V. Spitsyn, Diamond & Rel. Mater. 2, 291 (1993).
D. Lee, S. D. Harkness, and R. K. Singh, in Diamond, SiC, and Nitride Wide Bandgap Semiconductors, edited by C. H. Carter Jr., G. Gildenblat, S. Nakamura, and R. J. Nemanich (Mater. Res. Soc. Proc. 339, San Francisco, CA, 1994) p.127.
R K. Singh, D. Gilbert, R. Tellshow, P. H. Holloway, R. Ochoa, H. Simmons, and R. Koba, Appl. Phys. Lett. 61, 2863 (1992).
C. P. Beetz Jr., B. A. Lincoln, B. Y. Lin, and S. H. Tan, in New Diamond Science and Technology, edited by R. Messier, J. T. Glass, J. E. Butler, and R. Roy (MRS, Pittsburgh, PA, 1991)p.833.
T. R. Thomas, in Rough Surfaces (Longman Publishers, 1982), Chapt. 4.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Lee, DG., Singh, R.K. Ion-Beam Polishing of Diamond Thin Films. MRS Online Proceedings Library 354, 699–703 (1994). https://doi.org/10.1557/PROC-354-699
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-354-699