Abstract
Cross-sectional scanning tunneling microscopy and spectroscopy have been used to characterize InAs/Ga1-x InxSb strained-layer superlattices grown by molecular-beam epitaxy. Atomic-resolution constant-current images of the epitaxial layers reveal monolayer roughness at the superlattice interfaces. An asymmetry in electronic structure between interfaces in which InAs has been grown on Ga1-x InxSb and those in which Ga1-x InxSb has been grown on InAs has also been observed in these images. Close inspection of the images reveals increased growthdirection lattice spacings in the Ga1-x InxSb layers compared to the InAs layers, as well as even larger lattice spacings at the InAs/Ga1-x InxSb interfaces. The latter is consistent with the formation of primarily InSb-like interfaces. Current-voltage spectra obtained while tunneling into the superlattice layers are found to be strongly influenced by extended superlattice electronic states.
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D. L. Smith and C. Mailhiot, J. Appl. Phys. 62, 2545 (1987).
D. H. Chow, R. H. Miles, J. R. Soderstrom, and T. C. McGill, Appl. Phys. Lett. 56, 1418 (1990).
R. H. Miles, D. H. Chow, and W. J. Hamilton, J. Appl. Phys. 71, 211 (1992).
D. H. Chow, R. H. Miles, and A. T. Hunter, J. Vac. Sci. Technol. B10, 888 (1992).
G. Tuttle, H. Kroemer, and J. H. English, J. Appl. Phys. 67, 3032 (1990).
S. Hosaka, S. Hosoki, K. Takata, K. Horiuchi, and N. Natsuaki, Appl. Phys. Lett. 53, 487 (1988).
S. Kordic, E. J. van Loenen, D. Dijkkamp, A. J. Hoeven, and H. K. Moraal, J. Vac. Sci. Technol. A 8, 549 (1990).
M. B. Johnson and J.-M. Halbout, J. Vac. Sci. Technol. B 10, 508 (1992).
E. T. Yu, M. B. Johnson, and J.-M. Halbout, Appl. Phys. Lett. 61, 201 (1992).
E. T. Yu, J.-M. Halbout, A. R. Powell, and S. S. Iyer, Appl. Phys. Lett. 61, 3166 (1992).
R. M. Feenstra, E. T. Yu, J. M. Woodall, P. D. Kirchner, C. L. Lin, and G. D. Pettit, Appl. Phys. Lett. 61, 795 (1992).
S. Gwo, A. R. Smith, C. K. Shih, K. Sadra, and B. G. Streetman, Appl. Phys. Lett. 61, 1104 (1992).
O. Albrektsen, D. J. Arent, H. P. Meier, and H. W. Salemink, Appl. Phys. Lett. 57, 31 (1990).
M. B. Johnson, U. Maier, H. P. Meier, and H. W. M. Salemink, Appl. Phys. Lett. 63, 1273 (1993).
S. Gwo, K. J. Chao, C. K. Shih, K. Sadra, and B. G. Streetman, Phys. Rev. Lett. 71, 1883 (1993).
R. H. Miles, J. N. Schulman, D. H. Chow, and T. C. McGill, Semicond. Sci. Technol. 8, S102 (1993).
R. M. Feenstra, J. A. Stroscio, J. Tersoff, and A. P. Fein, Phys. Rev. Lett. 58, 1192 (1987).
R. M. Feenstra, D. A. Collins, D. Z.-Y. Ting, M. W. Wang, and T. C. McGill, presented at the 21st Conference on the Physics and Chemistry of Semiconductor Interfaces, New Paltz, New York (1994).
R. H. Miles, J. N. Schulman, and E. T. Yu, unpublished.
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Lew, A.Y., Yu, E.T., Chow, D.H. et al. Cross-Sectional Scanning Tunneling Microscopy of III-V Heterostructures Grown by Molecular-Beam Epitaxy. MRS Online Proceedings Library 340, 241–246 (1994). https://doi.org/10.1557/PROC-340-241
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DOI: https://doi.org/10.1557/PROC-340-241