Skip to main content
Log in

Cross-Sectional Scanning Tunneling Microscopy of III-V Heterostructures Grown by Molecular-Beam Epitaxy

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Cross-sectional scanning tunneling microscopy and spectroscopy have been used to characterize InAs/Ga1-x InxSb strained-layer superlattices grown by molecular-beam epitaxy. Atomic-resolution constant-current images of the epitaxial layers reveal monolayer roughness at the superlattice interfaces. An asymmetry in electronic structure between interfaces in which InAs has been grown on Ga1-x InxSb and those in which Ga1-x InxSb has been grown on InAs has also been observed in these images. Close inspection of the images reveals increased growthdirection lattice spacings in the Ga1-x InxSb layers compared to the InAs layers, as well as even larger lattice spacings at the InAs/Ga1-x InxSb interfaces. The latter is consistent with the formation of primarily InSb-like interfaces. Current-voltage spectra obtained while tunneling into the superlattice layers are found to be strongly influenced by extended superlattice electronic states.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. D. L. Smith and C. Mailhiot, J. Appl. Phys. 62, 2545 (1987).

    Article  CAS  Google Scholar 

  2. D. H. Chow, R. H. Miles, J. R. Soderstrom, and T. C. McGill, Appl. Phys. Lett. 56, 1418 (1990).

    Article  CAS  Google Scholar 

  3. R. H. Miles, D. H. Chow, and W. J. Hamilton, J. Appl. Phys. 71, 211 (1992).

    Article  CAS  Google Scholar 

  4. D. H. Chow, R. H. Miles, and A. T. Hunter, J. Vac. Sci. Technol. B10, 888 (1992).

    Article  Google Scholar 

  5. G. Tuttle, H. Kroemer, and J. H. English, J. Appl. Phys. 67, 3032 (1990).

    Article  CAS  Google Scholar 

  6. S. Hosaka, S. Hosoki, K. Takata, K. Horiuchi, and N. Natsuaki, Appl. Phys. Lett. 53, 487 (1988).

    Article  CAS  Google Scholar 

  7. S. Kordic, E. J. van Loenen, D. Dijkkamp, A. J. Hoeven, and H. K. Moraal, J. Vac. Sci. Technol. A 8, 549 (1990).

    Article  CAS  Google Scholar 

  8. M. B. Johnson and J.-M. Halbout, J. Vac. Sci. Technol. B 10, 508 (1992).

    Article  CAS  Google Scholar 

  9. E. T. Yu, M. B. Johnson, and J.-M. Halbout, Appl. Phys. Lett. 61, 201 (1992).

    Article  CAS  Google Scholar 

  10. E. T. Yu, J.-M. Halbout, A. R. Powell, and S. S. Iyer, Appl. Phys. Lett. 61, 3166 (1992).

    Article  CAS  Google Scholar 

  11. R. M. Feenstra, E. T. Yu, J. M. Woodall, P. D. Kirchner, C. L. Lin, and G. D. Pettit, Appl. Phys. Lett. 61, 795 (1992).

    Article  CAS  Google Scholar 

  12. S. Gwo, A. R. Smith, C. K. Shih, K. Sadra, and B. G. Streetman, Appl. Phys. Lett. 61, 1104 (1992).

    Article  CAS  Google Scholar 

  13. O. Albrektsen, D. J. Arent, H. P. Meier, and H. W. Salemink, Appl. Phys. Lett. 57, 31 (1990).

    Article  CAS  Google Scholar 

  14. M. B. Johnson, U. Maier, H. P. Meier, and H. W. M. Salemink, Appl. Phys. Lett. 63, 1273 (1993).

    Article  CAS  Google Scholar 

  15. S. Gwo, K. J. Chao, C. K. Shih, K. Sadra, and B. G. Streetman, Phys. Rev. Lett. 71, 1883 (1993).

    Article  CAS  Google Scholar 

  16. R. H. Miles, J. N. Schulman, D. H. Chow, and T. C. McGill, Semicond. Sci. Technol. 8, S102 (1993).

    Article  CAS  Google Scholar 

  17. R. M. Feenstra, J. A. Stroscio, J. Tersoff, and A. P. Fein, Phys. Rev. Lett. 58, 1192 (1987).

    Article  CAS  Google Scholar 

  18. R. M. Feenstra, D. A. Collins, D. Z.-Y. Ting, M. W. Wang, and T. C. McGill, presented at the 21st Conference on the Physics and Chemistry of Semiconductor Interfaces, New Paltz, New York (1994).

    Google Scholar 

  19. R. H. Miles, J. N. Schulman, and E. T. Yu, unpublished.

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lew, A.Y., Yu, E.T., Chow, D.H. et al. Cross-Sectional Scanning Tunneling Microscopy of III-V Heterostructures Grown by Molecular-Beam Epitaxy. MRS Online Proceedings Library 340, 241–246 (1994). https://doi.org/10.1557/PROC-340-241

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-340-241

Navigation