Composition and Structure of Spark Eroded Porous Silicon


Porous silicon which has been prepared by a “dry” technique, that is, by spark erosion, yields similar photoluminescence spectra as anodically etched porous silicon which has been prepared in aqueous solutions. Fourier transform infrared spectra reveal that the dominant features in spark eroded silicon are the Si-O-Si stretching mode and the Si-O-Si bending mode. No infrared vibrational modes characteristic for siloxene have been found in spark eroded Si. Results from X-ray and electron diffraction studies suggest that spark eroded Si involves minute polycrystalline silicon particles which are imbedded in an amorphous matrix.

This is a preview of subscription content, access via your institution.


  1. [1]

    R.E. Hummel and S.-S. Chang, Appl. Phys. Lett. 61, 1965 (1992).

    CAS  Article  Google Scholar 

  2. [2]

    H.D. Fuchs, M.S. Brandt, M. Stutzmann, and J. Weber, Mat. Res. Soc. Symp. Proc. 256, 159 (1992).

    CAS  Article  Google Scholar 

  3. [3]

    M.S. Brandt, H.D. Fuchs, M. Stutzmann, J. Weber, and M. Cardona, Solid State Comm. 81, 307 (1992).

    CAS  Article  Google Scholar 

  4. [4]

    H. Ubara, T. Imura, A. Hiraki, I. Hirabayashi, and K. Morigaki, J. Non-Cryst. Solids 59/60, 641 (1983).

    Article  Google Scholar 

  5. [5]

    M. Cardona, Phys. Stat. Sol. (B) 118, 463 (1983).

    CAS  Article  Google Scholar 

  6. [6]

    G. Lucovsky and W.B. Pollard, in Hydrogenated Amorphous Silicon II, edited by J.D. Joannopoulos and G. Lucovsky (Springer, Berlin, 1984), p. 301.

  7. [7]

    Y.H. Xie, W.L. Wilson, F.M. Ross, J.A. Mucha, E.A. Fitzgerald, J.M. Maccauly, and T.D. Harris, J. Appl. Phys. 71, 2403 (1992).

    CAS  Article  Google Scholar 

  8. [8]

    A.G. Cullis, L.T. Canham, and O.D. Dosser, JEOL News, 30E, 4 (1992).

    Google Scholar 

Download references

Author information



Rights and permissions

Reprints and Permissions

About this article

Cite this article

Hummel, R.E., Chang, SS., Ludwig, M. et al. Composition and Structure of Spark Eroded Porous Silicon. MRS Online Proceedings Library 283, 45–50 (1992).

Download citation