Electrical Properties of Hard Carbon Films

MRS Online Proceedings Library volume 131, Article number: 605 (1988) Cite this article

Abstract

The electrical resistivity, optical band gap and activation energy for electrical conduction have been determined as a function of preparation conditions. The operating conditions for the glow discharge reactor have been interpreted in terms of ion energy and reactive species production. The change in the electrical properties could not be explained as a percentage of [SP3] versus [SP2] bonding ratio. Rather, these two species are embedded in an amorphous medium which determines the materials electrical properties.

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Affiliations

  1. Dept. of Electrical Eng., University of Vermont, 05405, Burlington, VT, USA

    Walter Varhue

  2. Cominco Ltd., Trail, P.O. Box 3000, 455, British Columbia, VIR, Canada

    Kiril Pandelisev

  3. Intel Corporation, Chandler, AZ, USA

    Brian Shinseki

Authors
  1. Walter Varhue
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  2. Kiril Pandelisev
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  3. Brian Shinseki
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Correspondence to Walter Varhue.

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Varhue, W., Pandelisev, K. & Shinseki, B. Electrical Properties of Hard Carbon Films. MRS Online Proceedings Library 131, 605 (1988). https://doi.org/10.1557/PROC-131-605

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