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CVD of Amorphous GeTe Thin Films

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References

  1. J. I. Lee, H. Park, S. L. Cho, Y. L. Park, B. J. Bae, J. H. Park, J. S. Park, H. G. An, J. S. Bae, D. H. Ahn, Y. T. Kim, H. Horii, S. A. Song, J. C. Shin, S. O. Park, H. S. Kim, U-In. Chung, J. T. Moon, and B. I. Ryu, 2007 Symposium of VLSI Technology Digest of Technical Papers, 6B–4.

  2. M. Breitwisch, T. Nirschl, C.F. Chen, Y. Zhu, M.H. Lee, M. Lamorey, G.W. Burr, E. Joseph, A. Schrott, J.B. Philipp, R. Cheek, T.D. Happ, S.H. Chen, S. Zaidi, P. Flaitz, J. Bruley, R. Dasaka, B. Rajendran, S. Rossnagel, M. Yang, Y.C. Chen, R. Bergmann, H.L. Lung, and C. Lam, 2007 Symposium of VLSI Technology Digest of Technical Papers, 6B–3.

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  1. ATMI, Danbury, 06810, CT, USA

    Philip S. Chen, William J. Hunks, Matthias Stender, Tianniu Chen, Gregory T. Stauf, Chongying Xu & Jeffrey F. Roeder

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  1. Philip S. Chen
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  2. William J. Hunks
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  3. Matthias Stender
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  4. Tianniu Chen
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  5. Gregory T. Stauf
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  6. Chongying Xu
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  7. Jeffrey F. Roeder
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Chen, P.S., Hunks, W.J., Stender, M. et al. CVD of Amorphous GeTe Thin Films. MRS Online Proceedings Library 1071, 10710910 (2007). https://doi.org/10.1557/PROC-1071-F09-10

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  • DOI: https://doi.org/10.1557/PROC-1071-F09-10

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