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3D Photonic Structures by Sol-Gel Imprint Lithography

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Abstract

We present a new and relatively simple process to manufacture three-dimensional sub-micron structures over square centimeter areas using a soft stamp imprinting process. The room-temperature replication process shows excellent quality in transferring features directly into inorganic silica material with pattern distortion smaller than 0.03% over an area of 15×15mm2. Using a self assembly planarization method the imprinting process can be repeated to form three-dimensional structures. As a demonstration, a multilayer stack of four crossed gratings is shown.

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References

  1. Natalia Malkovaa, C. Z. Ning, Phys. Rev. Lett. 87, 161113 (2005).

    Google Scholar 

  2. Ken-ichi Umemori, Yoshiaki Kanamori, Kazuhiro Hanea, Appl. Phys. Lett. 89, 021102 (2006).

    Article  Google Scholar 

  3. Sang Hoon Kim, Ki-Dong Lee, Ja-Yeon Kim, Min-Ki Kwon, Seong-Ju Park, Nanotechnology 18, 055306 (2007)

    Article  Google Scholar 

  4. Sharee J. McNab, Nikolaj Moll, Yurii A. Vlasov, Optics Expr. 11, 2927 (2003)

    Article  Google Scholar 

  5. Boris Gralak, Michiel de Dood, Gérard Tayeb, Stefan Enoch, Daniel Maystre, Phys. Revf. B 67, 066601 (2003)

    Article  Google Scholar 

  6. Teri W. Odom, J. Christopher Love, Daniel B. Wolfe, Kateri E. Paul, George M. Whitesides, Langmuir 18, 5314 (2002)

    Article  CAS  Google Scholar 

  7. Christian Marzolin, Stephen P. Smith, Mara Prentiss, George M. Whitesides, Adv. Mater. 10, No. 8, 571 (1998)

    Article  CAS  Google Scholar 

  8. Olivier J. A. Schueller, George M. Whitesides, John A. Rogers, Martin Meier, Ananth Dodabalapur, Appl. Optics, 38, 5799 (1999)

    Article  CAS  Google Scholar 

  9. J. G. Fleming, Shawn-Yu Lin, Optics Lett. 24, 49 (1999)

    Article  CAS  Google Scholar 

  10. S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, Jim Bur, Nature 394, 251 (1998)

    Article  CAS  Google Scholar 

  11. R. Xie, A. Karim, J. F. Douglas, C. C. Han, R. A. Weiss, Phys. Rev. Lett. 81, 1251 (1998)

    Article  CAS  Google Scholar 

  12. Youn San Kim, Hong h. Lee, Adv. Mater. 15, 332 (2003)

    Article  CAS  Google Scholar 

Download references

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Authors and Affiliations

  1. Philips Research, High Tech Campus 4 (mailstop 12), 5656 AE, Eindhoven, Netherlands

    Marc Verschuuren & Hans Van Sprang

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  1. Marc Verschuuren
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  2. Hans Van Sprang
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Verschuuren, M., Van Sprang, H. 3D Photonic Structures by Sol-Gel Imprint Lithography. MRS Online Proceedings Library 1002, 305 (2007). https://doi.org/10.1557/PROC-1002-N03-05

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  • DOI: https://doi.org/10.1557/PROC-1002-N03-05

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