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Dielectric Tunability Properties and Thermal Stability of (Ba,Sr,Ca)TiO3 Thin Films Prepared by the Sol-Gel Method

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Abstract

A new family of (Ba1-x-ySrxCay)TiO3 (BSCT) thin films was prepared on Pt(111)/TiO2/SiO2/Si substrates by using sol-gel techniques. BSCT thin films with Ba/Sr/Ca ratio of 15/55/30, 20/45/35 and 25/35/40 were investigated, which were selected at the cubic region in the vicinity of the cubic-tetragonal phase boundary according to the ternary phase diagram of BaTiO3-SrTiO3-CaTiO3. X-ray diffraction analysis indicates that BSCT thin films are of the cubic perovskite structure. No hysteresis window can be observed from the capacitance-voltage curves, reflecting that BSCT thin films are in the paraelectric phase. The dielectric constant and tunability of BSCT thin films were investigated in the temperature range of 200–370 K. The Curie temperature Tc increases with increasing Ba concentration.

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Qin, W., Chen, W., Wu, W. et al. Dielectric Tunability Properties and Thermal Stability of (Ba,Sr,Ca)TiO3 Thin Films Prepared by the Sol-Gel Method. MRS Online Proceedings Library 966, 1014 (2006). https://doi.org/10.1557/PROC-0966-T10-14

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  • DOI: https://doi.org/10.1557/PROC-0966-T10-14

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