Abstract
As an alternative to the magnetoimpedance (MI) devices made from amorphous ribbon or wire, this study proposed a thin film type MI device composed with Ag conductive core and soft ferromagnetic NiFeMo sandwich layers. Obtained optimum sandwich structure was Ta 5 nm/ NiFeMo 300 nm/ Ta 5 nm/ Ag 900 nm/ Ta 5 nm/ NiFeMo 300 nm/ Ta 5 nm, and the width of Ag as 20 µm and the width of NiFeMo as 100 µm. It was patterned by using photolithography and lift-off process. The sandwich structure showed the maximum MI ratio about 40% at the 15 MHz. The impedance change was linear and nearly reversible at the external magnetic field region below the anisotropy field.
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References
L.V. Panina, D.P. Makhnovskiy, and K. Mohri: Magnetoimpedance in amorphous wires and multifunctional applications: From sensors to tunable artificial microwave materials. J. Magn .Magn. Mater., 272, 1452 (2004).
L.V. Panina, K. Mohri, and D.P. Makhnovskiy: Mechanism of asymmetrical magnetoimpedance in amorphous wires. J. Appl. Phys., 85, 5444 (1999).
D.X. Chen, J.L. Munoz, A. Hernando, and M. Vazquez: Magnetoimpedance of metallic ferromagnetic wires. Physical Review B, 57, 10699 (1998).
G.V. Kurlyandskaya, M. Vazquez, J.L. Munoz, D. Garcia, and J. McCord: Effect of induced magnetic anisotropy and domain structure features on magnetoimpedance in stress annealed Co-rich amorphous ribbons. J. Magn. Magn. Mater., 196, 259 (1999).
N.A. Buznikov, C.G. Kim, C.O. Kim, and S.S. Yoon: Analysis of field and frequency dependences of asymmetric giant magnetoimpedance in field-annealed amorphous ribbons. Physics of Metals and Metallography, 99, S69 (2005).
B.D. Cullity, “Introduction to Magnetic Materials” (Addison-Wesley Publishing Company Inc., 1972) pp.529.
T. Morikawa, Y. Nishibe, H. Yamadera, Y. Nonomura, M. Takeuchi, and Y. Taga: Giant magneto-impedance effect in layered thin film, IEEE Trans. Magn., 33, 4367 (1997).
L.V. Panina and K. Mohri: Magneto-impedance in multilayer films, Sensors and Actuators, A: Physical, 81, 106 (2000).
M. Carara, M.N. Baibich, and R.L. Sommer: Magnetization dynamics as derived from magneto impedance measurements, J. Appl. Phys., 88, 331 (2000).
D. Menard, D. Frankland, P. Ciureanu, A. Yelon, M. Rouabhi, R.W. Cochrane, H. Chiriac and T.A. Ovari: Modeling of domain structure and anisotropy in glass-covered amorphous wires, J. Appl. Phys., 83, 6566 (1998).
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Lee, D., Jeong, G.H., Kim, J.H. et al. Micro-patterned NiFeMo Magnetoimpedance Multilayer for Magnetic Sensor Application. MRS Online Proceedings Library 906, 109 (2005). https://doi.org/10.1557/PROC-0906-HH01-09
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DOI: https://doi.org/10.1557/PROC-0906-HH01-09