Abstract
We report the direct deposition of epitaxial 215-nm-thick vanadium sesquioxide (V2O3) films on a- and c-plane sapphire substrates from powder-pressed V2O3 targets via pulsed-laser deposition (PLD) in an evacuated deposition chamber devoid of O2. The films were characterized using x-ray diffraction (XRD), x-ray photoemission spectroscopy (XPS), x-ray absorption fine structure (XAFS) spectroscopy, and atomic force microscopy (AFM). XPS measurements confirmed that the stoichiometry of the powder was conserved in the films. XRD patterns together with XAFS measurements proved that V2O3 was epitaxial on the a-sapphire substrate with epitaxial relation (110)film//(110)substrate, and the results are consistent with the epitaxy on the c-plane substrate as well. The room-temperature resistivities of V2O3 films on a- and c-plane substrates were 1.49 × 10−4 and 3.00 × 10−5 Ω m, respectively. The higher resistivities of the films compared to bulk V2O3 might be attributed to thermal stresses resulting from difference in thermal expansion coefficients (TECs) of the films and the substrates.
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M. Imada, A. Fujimori Y. Tokura: Metal–insulator transitions. Rev. Mod. Phys. 70, 1039 1998
D.B. McWhan J.P. Remeika: Metal–insulator transition in (V1−xCrx)2O3. Phys. Rev. B 2, 3734 1970
P.D. Dernier M. Marezio: Crystal structure of the low-temperature antiferromagnetic phase of V2O3. Phys. Rev. B 2, 3771 1970
I.S. Elfimov, T. Saha-Dasgupta M.A. Korotin: Role of c-axis pairs in V2O3 from the band-structure point of view. Phys. Rev. B 68, 113105 2003
G. Kotliar: Driving the electron over the edge. Science 302, 67 2003
J-H. Park, L.H. Tjeng, A. Tanaka, J.W. Allen, C.T. Chen, P. Metcalf, J.M. Honig, F.M.F. De Groot G.A. Sawatzky: Spin and orbital occupation and phase transitions in V2O3. Phys. Rev. B 61, 11506 2000
M. Yethiraj: Pure and doped vanadium sesquioxide: A brief experimental review. J. Solid State Chem. 88, 53 1990
P. Limelette, A. Georges, D. Jérome, P. Wzietek, P. Metcalf J.M. Honig: Universality and critical behavior at the Mott transition. Science 302, 89 2003
K.D. Rogers, J.A. Coath M.C. Lovell: Characterization of epitaxially grown films of vanadium oxides. J. Appl. Phys. 70, 1412 1991
H. Schuler, S. Klimm, G. Weissmann, C. Renner S. Horn: Influence of strain on the electronic properties of epitaxial V2O3 thin films. Thin Solid Films 299, 119 1997
J. Piao, S. Takahashi S. Kohiki: Preparation and characterization of V2O3 powder and film. Jpn. J. Appl. Phys., Part 1 37, 6519 1998
I. Yamaguchi, T. Manabe, T. Kumagai, W. Kondo S. Mizuta: Preparation of epitaxial V2O3 films on C-, A- and R-planes of α-Al2O3 substrates by coating-pyrolysis process. Thin Solid Films 366, 294 2000
Q. Luo, Q.L. Guo E.G. Wang: Thickness-dependent metal–insulator transition in V2O3 ultrathin films. Appl. Phys. Lett. 84, 2337 2004
B. Sass, C. Tusche, W. Felsch, N. Quaas, A. Weismann M. Wenderoth: Structural and electronic properties of epitaxial V2O3 thin films. J. Phys.: Condens. Matter 16, 77 2004
S. Yonezawa, Y. Muraoka, Y. Ueda Z. Hiroi: Epitaxial strain effects on the metal–insulator transition in V2O3 thin films. Solid State Commun. 129, 245 2004
S. Autier-Laurent, B. Mercey, D. Chippaux, P. Limelette C. Simon: Strain-induced pressure effect in pulsed laser deposited thin films of the strongly correlated oxide V2O3. Phys. Rev. B 74, 195109 2006
J. Piao, S. Takahashi S. Kohiki: Preparation of Cr-doped V2O3 films by sol-gel processing and their resistivity–temperature characteristics. J. Ceram. Soc. Jpn. 107, 375 1999
C.N.R. Rao B. Raveau: Transition Metal Oxides: Structure, Properties and Synthesis of Ceramic Oxides 2 ed. Wiley-VCH New York 1998
A.I. Frenkel, D.M. Pease, J.I. Budnick, P. Metcalf, E.A. Stern, P. Shanthakumar T. Huang: Strain-induced bond buckling and its role in insulating properties of Cr-doped V2O3. Phys. Rev. Lett. 97, 195502 2006
J.W. Matthews A.E. Blakeslee: Defects in epitaxial multilayers: I. Misfit dislocations. J. Cryst. Growth 27, 118 1974
I.B. Misirlioglu, A.L. Vasiliev, M. Aindow, S.P. Alpay R. Ramesh: Threading dislocation generation in epitaxial (Ba,Sr) TiO3 films grown on (001) LaAlO3 by pulsed laser deposition. Appl. Phys. Lett. 84, 1742 2004
N.K. Nag F.E. Massoth: ESCA and gravimetric reduction studies on V/Al2O3 and V/SiO2 catalysts. J. Catal. 124, 127 1990
A.F. Werfel A.O. Brummer: Corundum structure oxides studied by XPS. Phys. Scr. 28, 92 1983
R.J. Colton, A.M. Guzman J.W. Rabalais: Electrochromism in some thin-film transition-metal oxides characterized by x-ray electron spectroscopy. J. Appl. Phys. 49, 409 1978
S.P. Alpay, V. Nagarajan, L.A. Bendersky, M.D. Vaudin, S. Aggarwal, R. Ramesh A.L. Roytburd: Effect of the electrode layer on the polydomain structure of epitaxial PbZr0.2Ti0.8O3 thin films. J. Appl. Phys. 85, 3271 1999
L.J. Ekert R.C. Bradt: Thermal expansion coefficient of corundum structure Ti2O3 and V2O3. J. Appl. Phys. 44, 3470 1973
W.J. Campbell C. Grain: Thermal expansion of alpha alumina. U.S. Bureau of Mines Technical Report No. BM-RI-5757 (Bureau of Mines, College Park, MD, 1960 16
I.B. Misirlioglu, S.P. Alpay, F. He B.O. Wells: Stress induced monoclinic phase in epitaxial BaTiO3 on MgO. J. Appl. Phys. 99, 104103 2006
D.B. McWhan, J.P. Remeika, T.M. Rice, W.F. Brinkman, J.P. Maita A. Menth: Electronic specific heat of metallic Ti-doped V2O3. Phys. Rev. Lett. 27, 941 1971
A.I. Frenkel, E.A. Stern F.A. Chudnovsky: Metal–insulator transition and local structure of V2O3. J. Phys. IV, Colloque C2 7, 1061 1997
Acknowledgments
B. Allimi and S.P. Alpay gratefully acknowledge support by the United States Army Research Office (Grant W911NF-05-1-0528). We thank C. Xie, R. Nath, and R. Ristau for their help in the characterization of the samples and B.O. Wells for many useful discussions. The NSLS is supported by the Divisions of Materials and Chemical Sciences of the United States Department of Energy. We express our appreciation to the staff of the X-18 B line at the NSLS. T. Huang, D. Pease, and A. Frenkel acknowledge support by United States Department of Energy (Grant No. DE-FG02-05ER36184).
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Allimi, B.S., Alpay, S.P., Goberman, D. et al. Growth of V2O3 thin films on a-plane (110) and c-plane (001) sapphire via pulsed-laser deposition. Journal of Materials Research 22, 2825–2831 (2007). https://doi.org/10.1557/JMR.2007.0378
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DOI: https://doi.org/10.1557/JMR.2007.0378