Abstract
A method is introduced to determine the depth distribution of the residual stresses in (Ti,Al)N films. The films were gradually stripped by chemical corrosion, an optical system was designed to test the curvature change of the specimens, and the depth distribution of the residual stresses was calculated. The results show that the residual stresses increase gradually from the interface of film/substrate and reach a maximum value at the middle region, then decrease until the surface.
Similar content being viewed by others
References
S. Paldey S.C. Deevi: Single layer and multilayer wear resistant coatings of (Ti,Al)N: A review. Mater. Sci. Eng., A 342, 58 2003
X.L. Peng T.W. Clyne: Mechanical stability of DLC films on metallic substrates: Part I—Film structure and residual stress levels. Thin Solid Films 312, 207 1998
E.L. Haase: The determination of lattice parameters and strains in stressed thin films using x-ray diffraction with Seeman–Bohlin focusing. Thin Solid Films 124, 283 1985
G.G. Stoney The tension of metallic films deposited by electrolysis. Proc. R. Soc. London Ser. A, 82, 172 (1909)
C.H. Ma, J.H. Huang H. Chen: Residual stress measurement in textured thin film by grazing-incidence x-ray diffraction. Thin Solid Films 418, 73 2002
C.M. Suh, B.W. Hwang K.R. Kim: Effect of ceramic coating thickness on residual stress and fatigue characteristic of 1Cr–1Mo–0.25V steel. Int. J. Mod. Phys. B 16(1–2), 181 2002
L.A. Donohue, D.B. Lewis, W.D. Munz, M.M. Stack, S.B. Lyon, H.W. Wang D. Rafaja: The influence of low concentrations of chromium and yttrium on the oxidation behaviour, residual stress and corrosion performance of TiAlN hard coatings on steel substrates. Vacuum 55(2), 109 1999
E. Zoestbergen, N.J.M. Carvalho J.T.M. De Hosson: Stress state or TiN/TiAlN PVD multilayers. Surf. Eng. 17(1), 29 2001
M.R. Terner, P. Hedstrom, J. Almer, J. Ilavsky M. Oden: Residual stress evolution during decomposition of Ti(1−x)Al(x)N coatings using high-energy x-rays. Mater. Sci. Forum (Residual Stresses VII) 524–525, 619 2006
H. Windischmann K.J. Gray: Stress measurement of CVD diamond films. Diamond Relat. Mater. 4, 837 1995
G.J. Leusink, T.G.M. Oosterlaken, G.C.A.M. Janssen S. Radelaar: In situ sensitive measurement of stress in thin films. Rev. Sci. Instrum. 63, 3143 1992
S.G. Malhotra, Z.U. Rek, S.M. Yalisove J.C. Bilello: Analysis of thin film stress measurement techniques. Thin Solid Films 301, 45 1997
Ch. Genzel W. Reimers: A study of x-ray residual stress gradient analysis in thin layers with strong fibre texture. Phys. Status Solidi A 166, 751 1998
W.H. Xu, D. Lu T.Y. Zhang: Determination of residual stresses in Pb(Zr0.53Ti0.47)O3 thin films with Raman spectroscopy. Appl. Phys. Lett. 79, 4112 2002
D.S. Rickerby, A.M. Jones B.A. Bellamy: Internal stress in titanium nitride coatings: Modelling of complex stress systems. Surf. Coat. Technol. 36, 661 1988
R.Y. Fillit A.J. Perry: Residual stress and x-ray elastic constants in highly textured physically vapor deposited coatings. Surf. Coat. Technol. 36, 647 1988
P. Danesh, B. Pantchev, D. Grambole B. Schmidt: Depth distributions of hydrogen and intrinsic stress in a-Si:H films prepared from hydrogen-diluted silane. J. Appl. Phys. 90, 3065 2001
S. Jeelani, S. Biswas R. Natarajan: Effect of cutting speed and tool rake angle on residual stress distribution in machining 2024-T351 aluminium alloy—Unlubricated conditions. J. Mater. Sci. 21, 2705 1986
A.C. Vlasveld, S.G. Harris, E.D. Doyle, D.B. Lewis W.D. Munz: Characterisation and performance of partially filtered arc TiAlN coatings. Surf. Coat. Technol. 149, 217 2002
F. Hollstein, R. Wiedemann J. Scholz: Characteristics of PVD-coatings on AZ31hp magnesium alloys. Surf. Coat. Technol. 162, 261 2003
Acknowledgment
This work was supported by the National Natural Science Foundation of China (Grant No. 50471072).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Zhao, SS., Du, H., Hua, WG. et al. The depth distribution of residual stresses in (Ti,Al)N films: Measurement and analysis. Journal of Materials Research 22, 2659–2662 (2007). https://doi.org/10.1557/JMR.2007.0363
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.2007.0363