Skip to main content
SpringerLink
Log in

Sputtered Nb- and Ta-doped TiO2 transparent conducting oxide films on glass

  • Published:
Journal of Materials Research Aims and scope Submit manuscript

Abstract

Radio frequency (rf) magnetron sputtering is used to deposit Ti0.85Nb0.15O2 and Ti0.8Ta0.2O2 films on glass substrates at substrate temperatures (TS) ranging from ∼250 to 400 °C. The most conducting Nb-doped TiO2 films were deposited at TS = 370 °C, with conductivities of ∼60 S/cm, carrier concentrations of 1.5 × 1021 cm−3 and mobilities <1 cm2/V·s. The conductivity of the films was limited by the mobility, which was more than 10 times lower than the mobility for films deposited epitaxially on SrTiO3. The difference in properties is likely caused by the randomly oriented crystal structure of the films deposited on glass compared with biaxially textured films deposited on SrTiO3. The anatase phase could not be stabilized in the Ta-doped TiO2 films, likely because of the high dopant concentration.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

FIG. 1
FIG. 2
FIG. 3
FIG. 4
FIG. 5
FIG. 6

Similar content being viewed by others

References

  1. D.S. Ginley C. Bright: Transparent conducting oxides. MRS Bull. 25, 15 2000

    Article  CAS  Google Scholar 

  2. R.G. Gordon: Criteria for choosing transparent conductors. MRS Bull. 25, 52 2000

    Article  CAS  Google Scholar 

  3. G. Haacke: Transparent conducting coatings. Ann. Rev. Mater. Sci. 7, 73 1977

    Article  CAS  Google Scholar 

  4. H. Hosono, H. Ohta, M. Orita, K. Ueda M. Hirano: Frontier of transparent conductive oxide thin films. Vacuum 66, 419 2002

    Article  CAS  Google Scholar 

  5. H. Kawazoe, H. Yanagi, K. Ueda H. Hosono: Transparent p-type conducting oxides: design and fabrication of p-n heterojunctions. MRS Bull. 25, 28 2000

    Article  CAS  Google Scholar 

  6. B.G. Lewis D.C. Paine: Applications and processing of transparent conducting oxides. MRS Bull. 25, 22 2000

    Article  CAS  Google Scholar 

  7. O.N. Mryasov A.J. Freeman: Electronic band structure of indium tin oxide and criteria for transparent conducting behavior. Phys. Rev. B 64, 233111 2001

    Article  Google Scholar 

  8. R.B.H. Tahar, T. Ban, Y. Ohya Y. Takahashi: Tin doped indium oxide thin films: Electrical properties. J. Appl. Phys. 83, 2631 1998

    Article  Google Scholar 

  9. C.M. Dai, C.S. Su D.S. Chuu: Growth of highly oriented tin oxide thin films by laser evaporation deposition. Appl. Phys. Lett. 57, 1879 1990

    Article  CAS  Google Scholar 

  10. T. Minami: New n-type transparent conducting oxides. MRS Bull. 25, 38 2000

    Article  CAS  Google Scholar 

  11. Y. Furubayashi, T. Hitosugi, Y. Yamamoto, Y. Hirose, G. Kinoda, K. Inaba, T. Shimada T. Hasegawa: Novel transparent conducting oxide: Anatase Ti1−xNbxO2. Thin Solid Films 496, 157 2006

    Article  CAS  Google Scholar 

  12. Y. Furubayashi, T. Hitosugi, Y. Yamamoto, K. Inaba, G. Kinoda, Y. Hirose, T. Shimada T. Hasegawa: A transparent metal: Nb-doped anatase TiO2. Appl. Phys. Lett. 86, 252101 2005

    Article  Google Scholar 

  13. T. Hitosugi, Y. Furubayashi, A. Ueda, K. Itabashi, K. Inaba, Y. Hirose, G. Kinoda, Y. Yamamoto, T. Shimada T. Hasegawa: Ta-doped anatase TiO2 epitaxial film as transparent conducting oxide. Jpn. J. Appl. Phys. 44, L1063 2005

    Article  CAS  Google Scholar 

  14. F. Lagnel, B. Poumellec, J.P. Thomas, A. Ziani M. Gasgnier: Preparation of amorphous thin films of (Ti,V)O2 and (Ti,Nb)O2 by R.F. sputtering. Thin Solid Films 176, 111 1989

    Article  CAS  Google Scholar 

  15. M.A. Gillispie, M. van Hest, M.S. Dabney, J.D. Perkins D.S. Ginley: rf magnetron sputter deposition of transparent conducting Nb-doped TiO2 films on SrTiO3. J. Appl. Phys. 101, 033125 2007

    Article  Google Scholar 

  16. H. Tang, K. Prasad, R. Sanjinès, P.E. Schmid F. Lévy: Electrical and optical properties of TiO2 anatase thin films. J. Appl. Phys. 75, 2042 1994

    Article  CAS  Google Scholar 

  17. J.D. Perkins, C.W. Teplin, M. van Hest, J.L. Alleman, X. Li, M.S. Dabney, B.M. Keyes, L.M. Gedvilas, D.S. Ginley, Y. Lin Y. Lu: Optical analysis of thin film combinatorial libraries. Appl. Surf. Sci. 223, 124 2004

    Article  CAS  Google Scholar 

  18. K. Okada, N. Yamamoto, Y. Kameshima, A. Yasumori K.J.D. MacKenzie: Effect of silica additive on the anatase-to-rutile phase transition. J. Am. Ceram. Soc. 84, 1591 2001

    Article  CAS  Google Scholar 

  19. R.D. Shannon J.A. Pask: Kinetics of anatase-rutile transformation. J. Am. Ceram. Soc. 48, 391 1965

    Article  CAS  Google Scholar 

  20. H. Tang, R. Prasad, R. Sanjinès F. Lévy: TiO2 anatase thin films as gas sensors. Sens. Actuators, B: Chem. 26–27, 71 1995

    Article  Google Scholar 

  21. D. Wicaksana, A. Kobayashi A. Kinbara: Process effects on structural properties of TiO2 thin films by reactive sputtering. J. Vac. Sci. Technol., A 10, 1479 1992

    Article  CAS  Google Scholar 

  22. J-Y. Tewg, Y. Kuo J. Lu: Suppression of crystallization of tantalum oxide thin film by doping with zirconium. Electrochem. Solid-State Lett. 8, G27 2005

    Article  CAS  Google Scholar 

  23. H. Hosono, N. Kikuchi, N. Ueda H. Kawazoe: Working hypothesis to explore novel wide band gap electrically conducting amorphous oxides and examples. J. Non-Cryst. Solids 200, 165 1996

    Article  Google Scholar 

Download references

Acknowledgment

This work was supported by the Laboratory Directed Research and Development program at the National Renewable Energy Laboratory.

Author information

Authors and Affiliations

  1. National Renewable Energy Laboratory, Golden, Colorado, 80401, USA

    Meagen A. Gillispie, Maikel F. A. M. van Hest, Matthew S. Dabney, John D. Perkins & David S. Ginley

  2. Iowa State University, Ames, Iowa, 50011, USA

    Meagen A. Gillispie

Authors
  1. Meagen A. Gillispie
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Maikel F. A. M. van Hest
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Matthew S. Dabney
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. John D. Perkins
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. David S. Ginley
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to John D. Perkins.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Gillispie, M.A., van Hest, M.F.A.M., Dabney, M.S. et al. Sputtered Nb- and Ta-doped TiO2 transparent conducting oxide films on glass. Journal of Materials Research 22, 2832–2837 (2007). https://doi.org/10.1557/JMR.2007.0353

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/JMR.2007.0353

Search

Navigation