Abstract
The nanostructure, stoichiometry and sensing performance of SnO2 films grown by pulsed laser deposition (PLD) have been shown to be highly sensitive to the deposition conditions. In particular, PLD deposition under vacuum is known to produce films that are composed of both a polycrystalline SnO2 phase and an amorphous SnO phase, for deposition temperatures in the 20–600 °C range. The presence of such an amorphous SnO phase in the films greatly limits their practical use as gas-sensing devices.
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Z. Chen, J.K.L. Lai, C.H. Shek, and H. Chen, Synthesis and structural characterization of rutile SnO2 nanocrystals, J. Mater. Res. 18, 1289 (2003).
M.A. El Khakani, R. Dolbec, A.M. Serventi, M.C. Horrillo, M. Trudeau, R.G. Saint-Jacques, D.G. Rickerby, and I. Sayago, Pulsed laser deposition of nanostructured tin oxide films for gas sensing applications, Sens. Actuators B. 77, 383 (2001).
R. Dolbec, M.A. El Khakani, A.M. Serventi, M. Trudeau, and R.G. Saint-Jacques, Microstructure and physical properties of nanostructured tin oxide thin films grown by means of pulsed laser deposition, Thin Solid Films. 419, 230 (2002).
R. Dolbec, M.A. El Khakani, A.M. Serventi, and R.G. Saint-Jacques, Influence of the nanostructural characteristics on the gas sensing properties of pulsed laser deposited tin oxide thin films, Sens. Actuators B. 93, 566 (2003).
A.M. Serventi, R. Dolbec, M.A. El Khakani, R.G. Saint-Jacques, and D.G. Rickerby, High-resolution transmission electron microscopy investigation of the nanostructure of undoped and Pt-doped nanocrystalline pulsed laser deposited SnO2 thin films, J. Phys. Chem. Solids. 64, 2097 (2003).
R.D. Vispute, V.P. Godbole, S.M. Chaudhari, S.M. Kanetkar, and S.B. Ogale, Deposition of tin oxide films by pulsed laser evaporation, J. Mater. Res. 3, 1180 (1988).
V.P. Godbole, R.D. Vispute, S.M. Chaudhari, S.M. Kanetkar, and S.B. Ogale, Dependence of properties of laser deposited tin oxide films on process variables, J. Mater. Res. 5, 372 (1990).
H.M. Phillips, Y. Li, Z. Bi, and B. Zhang, Reactive pulsed laser deposition and laser induced crystallization of SnO2 transparent conducting thin films, Appl. Phys. A 63, 347 (1996).
M.W.J. Prins, K.O. Grosse-Holz, J.F.M. Cillessen, and L.F. Feiner, Grain-boundary-limited transport in semiconducting SnO2 thin films: Model and experiments, J. Appl. Phys. 83, 888 (1998).
R. Lal, R. Grover, R.D. Vispute, R. Viswanathan, V.P. Godbole, and S.B. Ogale, Sensor activity in pulsed laser deposited and ion implanted tin oxide thin films, Thin Solid Films 206, 88 (1991).
W.S. Hu, Z.G. Liu, Z.C. Wu, and D. Feng, Comparative study of laser ablation techniques for fabricating nanocrystalline SnO2 thin films for sensors, Mater. Lett. 28, 369 (1996).
W.S. Hu, Z.G. Liu, J.G. Zheng, X.B. Hu, X.L. Guo, and W. Göpel, Preparation of nanocrystalline SnO2 thin films used in chemisorption sensors by pulsed laser reactive ablation, J. Mater. Sci. Mater. Elec. 8, 155 (1997).
G. Williams and G.S.V. Coles, Gas sensing properties of nanocrystalline metal oxide powders produced by a laser evaporation technique, J. Mater. Chem. 8, 1657 (1998).
V. Marotta, S. Orlando, G.P. Parisi, and A. Giardini, Indium and tin oxide polycrystalline thin films as NO gas sensors produced by reactive pulsed laser ablation and deposition, Appl. Phys. A 69, S675 (1999).
G. Williams and G.S.V. Coles, The gas-sensing potential of nanocrystalline tin dioxide produced by a laser ablation technique, MRS Bull. 24, 25 (1999).
S. Nicoletti, L. Dori, F. Corticelli, M. Leoni, and P. Scardi, Tin oxide thin-film sensors for aromatic hydrocarbons detection: Effect of aging time on film microstructure, J. Am. Ceram. Soc. 82, 1201 (1999).
V. Marotta, S. Orlando, G.P. Parisi, A. Giardini, G. Perna, A.M. Santoro, and V. Capozzi, Electrical and optical characterization of multilayered thin film based on pulsed laser deposition of metal oxides, Appl. Surf. Sci. 168, 141 (2000).
JCPDS Data Card No. 72-1147, International Center of Diffraction Data, Swarthmore, PA, 1995.
JCPDS Data Card, 72-1012, International Center of Diffraction Data, Swarthmore, PA, 1995.
Simulation performed using the AbsorbDX, (v1.1.2) software, provided with the Bruker-AXS D8 ADVANCE X-ray diffractometer.
A.M. Serventi, D.G. Rickerby, M.C. Horrillo, R.G. Saint-Jacques, and J. Gutiérrez, Transmission electron microscopy investigation of SnO2 thin film for sensor devices, Nanostruct. Mater. 11, 813 (1999).
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Dolbec, R., El Khakani, M.A., Serventi, A.M. et al. Comments on “Synthesis and structural characterization of rutile SnO2 nanocrystals” by Z. Chen, J.K.L. Lai, C.H. Shek, and H. Chen [J. Mater. Res. 18, 1289 (2003)]. Journal of Materials Research 19, 1290–1292 (2004). https://doi.org/10.1557/JMR.2004.0167
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DOI: https://doi.org/10.1557/JMR.2004.0167