Abstract
We report the growth of titanium nitride microcolumns under multipulse Nd:yttrium aluminum garnet (λ = 1.064 μm, τ ∼ 300 ns, ν = 30 kHz) laser irradiation of titanium targets in nitrogen atmosphere. The laser intensity value was chosen below the single-pulse melting threshold of titanium. The evolution with the number of laser pulses of the target morphology, crystalline state, and chemical composition at the surface as well as in depth were investigated by scanning electron microscopy, x-ray diffractometry, Raman spectroscopy, and wavelength dispersive x-ray spectroscopy. Under the action of the laser pulses, during progressive surface nitridation, an initial rippled morphology developed, which evolved with further irradiation to TiN microcolumns. In-depth investigations showed a granular zone beneath the surface consisting of rutile and anatase phase TiO2, followed by a compact needlelike layer of titanium until the interface with the unaffected target material.
Similar content being viewed by others
References
Titanium in Medicine, edited by D.M. Brunette, P. Tengvall, M. Textor, and P. Thomsen (Springer-Verlag, Berlin, Germany, 2001).
A.M. Prokhorov, I. Ursu, I.N. Mihailescu, and V.I. Konov, Laser Heating of Metals (Adam Hilger, Bristol, U.K., 1990)
D. Bauerle, Laser Processing and Chemistry (Springer-Verlag, Berlin, Germany, 2000)
E. Gyorgy, A. Perez del Pino, P. Serra, and J.L. Morenza, Appl. Surf. Sci. 186, 130 (2002)
E. Gyorgy, A. Perez del Pino, P. Serra, and J.L. Morenza, Surf. Coat. Technol. 173, 265 (2003).
E. Gyorgy, I.N. Mihailescu, P. Serra, A. Perez del Pino, and J.L. Morenza, Surf. Coat. Technol. 154, 63 (2002).
E. Gyorgy, I.N. Mihailescu, P. Serra, A. Perez del Pino, and J.L. Morenza, Appl. Phys. A: Mater. Sci. Process. 74, 755 (2002).
E. Gyorgy, A. Perez del Pino, P. Serra, and J.L. Morenza, Appl. Phys. A: Mater. Sci. Process. (in press).
E. Gyorgy, A. Perez del Pino, P. Serra, and J.L. Morenza, Appl. Surf. Sci. 197–198, 851 (2002).
S.I. Dolgaev, S.V. Lavrishev, A.A. Lyalin, A.V. Simakin, V.V. Votonov, and G.A. Shafeev, Appl. Phys. A: Mater. Sci. Process. 73, 177 (2001).
F. Sanchez, J.L. Morenza, and V. Trtik, Appl. Phys. Lett. 75, 3303 (1999).
A.J. Pedraza, J.D. Fowlkes, and D.H. Lowndes, Appl. Phys. Lett. 74, 2322 (1999).
M. Mendes, V. Oliveira, R. Vilar, F. Beinhorn, J. Ihleman, and O. Conde, Appl. Surf. Sci. 154–155, 29 (2000).
M. Nakamoto and K. Fukuda, Appl. Surf. Sci. 202, 289 (2002).
Powder Diffraction File Nos. 38-1420, 44-1095, 05-0682 (JCPDS International Centre for Diffraction Data, Swarthmore, PA, 1988).
W. Spengler, R. Kaiser, A.N. Christensen, and G. Muller-Vogt, Phys. Rev. B 17, 1095 (1978).
Y.H. Cheng, B.K. Tay, S.P. Lau, H. Kupfer, and F. Richter, J. Appl. Phys. 92, 1845 (2002).
J.C. Parker and R.W. Siegel, Appl. Phys. Lett. 57, 943 (1990).
G. Thorwarth, S. Mandl, and B. Rauschenbach, Surf. Coat. Technol. 136, 236 (2001).
M.P. Moret, R. Zallen, D.P. Vijay, and S.B. Desu, Thin Solid Films 366, 8 (2000).
E.G. Gamaly, A.V. Rode, and B. Luther-Davies, J. Appl. Phys. 85, 4213 (1999).
R. Kelly and J. Rothenberg, Nucl. Instrum. Methods B 7/8, 755 (1985).
S. Tabuchi, H. Tabata, and T. Kawai, Jpn. J. Appl. Phys. 39, 1268 (2000).
A.I. Nwobu, R.D. Rawlings, and D.R.F. West, Acta Mater. 47, 631 (1999).
A.B. Kloosterman and J.Th.M. De Hosson, Scripta Metal. Mater. 33, 567 (1995).
A.B. Brailovsky, I.A. Dorofeev, A.B. Ezersky, V.A. Ermakov, V.I. Luchin, and V.E. Semenov, Sov. Phys. Tech. Phys. 36, 324 (1991).
W.W. Duley, UV Lasers: Effects and Applications in Materials Science (Cambridge University Press, Cambridge, U.K., 1996).
A.B. Brailovsky, S.V. Gaponov, and V.I. Luchin, Appl. Phys. A: Mater. Sci. Process. 61, 81 (1995).
P.R. Willmott and J.R. Huber, Rev. Mod. Phys. 72, 315 (2000).
S. Jesse, A.J. Pedraza, J.D. Fowlkes, and J.D. Budai, J. Mater. Res. 17, 1002 (2002).
T.V. Kononenko, S.V. Garnov, S.M. Pimenov, V.I. Konov, V. Romano, B. Borsos, and H.P. Weber, Appl. Phys. A: Mater. Sci. Process. 71, 627 (2000).
H. Xin, C. Hu, and T.N. Baker, J. Mater. Sci. 35, 3373 (2000).
V.S. Teodorescu, I.N. Mihailescu, E. Gyorgy, A. Luches, M. Martino, L.C. Nistor, J. Van Landuyt, and J. Hermann, J. Mod. Opt. 43, 1773 (1996).
I. Ursu, I.N. Mihailescu, I. Gutu, A. Hening, T. Julea, L.C. Nistor, M. Popescu, V.S. Teodorescu, A.M. Prokhorov, V.I. Konov, and V.G. Ralchenko, Appl. Opt. 25, 2720 (1986).
G.G. Maksimovich, V.N. Federko, and I.N. Pogrelyuk, in Soviet Materials Science, edited by V.V. Panasyuk (Plenum Press, New York, 1992), p. 135.
Handbook of Chemistry and Physics, edited by D.R. Lide (CRC Press, Boca Raton, FL, 2001).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
György, E., del Pino, A.P., Serra, P. et al. Microcolumn development on titanium by multipulse laser irradiation in nitrogen. Journal of Materials Research 18, 2228–2234 (2003). https://doi.org/10.1557/JMR.2003.0311
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.2003.0311