Abstract
AlOx thin films were grown on ZnO-deposited glass substrates under different conditions using magnetron sputtering. The influence of processing parameters (mainly direct-current power and oxidizing atmosphere) on the structure and optical properties were investigated. The AlOx films for all samples in this study showed the coexistence of amorphous and polycrystalline structures. The kinetics of crystal growth could influence the dominant crystal orientation. Fast-growing planes were not the most thermodynamically stable, but were kinetically controlled under the film growth condition. Oxidizing the sample in O2 atmosphere made the AlOx film grow in random directions. The excess oxygen was chemisorbed at the interface between AlOx and ZnO. Therefore, the neighboring oxygen–oxygen distance of AlOx and that of ZnO on their closest-packed planes seriously mismatched. At high power, the particles arrived at the substrate with high kinetic energy and high rate, which led to low density due to porous structure. The transmission decreased with an increase of the pores and surface roughness of AlOxfilm on ZnO-deposited glass. However, the diffusion of oxygen into the grains improved transmission when the sample was oxidized in O2 atmosphere.
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E. Dörre and H. Hiibner, Alumina: Processing, Properties and Applications (Springer-Verlag, Berlin, 1984), p. 9.
S.M. Edlou, A. Smajkiewicz, and G.A Al-Jumaily, Appl. Optics 32, 5601 (1993).
K. Koski, J. Hölsä, and Pierre Juliet, Thin Solid Films 339, 240 (1999).
F. Fietzke, K. Goedicke, and W. Hempel, Surf. Coat. Technol. 86-87, 657 (1996).
J.M. Schneider, W.D. Sproul, R.W.J. Chia, M-S. Wong, and A. Matthews, Surf. Coat. Technol. 96, 262 (1997).
B. Gornachev, V. Orlinov, and V. Popova, Thin Solid Films 33, 173 (1976).
S. Schiller, K. Goedicke, J. Reschke, V. Kirchhoff, S. Schneider, and F. Milde, Surf. Coat. Technol. 61, 331 (1993).
P.J. Clarke, J. Vac. Sci. Technol. A 12, 594 (1994).
R. Cueff, B. Baud, J.P. Besse, and M. Jaquette, Thin Solid Films 266, 198 (1995).
S.S. Lin and J.L. Huang, J. Mater. Res. 18, 965 (2003).
Powder Diffraction File No. 88-0107 (International Center for Diffraction Date, Newton Square, PA, 1999).
C.V. Thompson, in Evolution of Surface and Thin-Film Microstructure, edited by H.A. Atwater, E.H. Chason, M.K. Grabow, and M.G. Lagally (Mater. Res. Soc. Symp. Proc. 280, Pittsburgh, PA, 1992), p. 307.
C.V. Thompson, in Grain Growth in Polycrystalline Thin Films (Mater. Res. Soc. Symp. Proc. 343, Pittsburgh, PA, 1994).
S.V. Prasad, S.D. Walck, and J.S. Zabinski, Thin Solid Films 360, 107 (2000).
A. van der Drift, Philips Res. Rep. 22, 267 (1967).
G. Knuyt, C. Quaeyhaegens, J. D’Haen, and L.M. Stals, Thin Solid Films 258, 159 (1995).
G. Knuyt, C. Quaeyhaegens, J. D’Haen, and L.M. Stals, Phys. Status Solidi B 195, 179 (1996).
P.B. Barna and M. Adamik, Thin Solid Films 317, 27 (1998).
D.H. Zhang, J. Phys. D, Appl. Phys. 28, 1273 (1995).
W.D. Sproul, M.E. Graham, M.S. Wong, S. Lopez, and D. Li, J. Vac. Sci. Technol. A 13, 1188 (1995).
M. Bender, W. Seelig, C. Daube, H. Frankenberger, B. Ocker, and J. Stollenwerk, Thin Solid Films 326, 72 (1998).
K.H. Yoon, J.W. Choi, and D.H. Lee, Thin Solid Films 302, 116 (1997).
L. Sagalowicz and G.R. Fox, J. Mater. Res. 14, 1876 (1999).
X.W. Sun, L.D. Wang, and H.S. Kwok, Thin Solid Films 360, 75 (2000).
G. Sanon, R. Rup, and A. Mansingh, Thin Solid Films 190, 287 (1990).
CD. Wagner, W.M. Riggs, L.E. Davis, J.F. Moulder, and G.E. Muilenberg, Handbook of X-ray Photoelectron Spectroscopy, (Perkin-Elmer Corporation, Eden Prarie, MN, 1979), pp. 50–51.
Y. Natsume and H. Sakata, Thin Solid Films 372, 30 (2000).
M.N. Islam, T.B. Ghosh, K.L. Chopra, and H.N. Acharya, Thin Solid Films 280, 20 (1996).
D.F. Paraguay, L.W. Estrada, N.D.R. Acosta, E. Andrade, and M. Miki-Yoshida, Thin Solis Films 350, 192 (1999).
D. Wang, U. Geyer, S. Schneider, and G.V. Minnigerode, Thin Solid Films 292, 184 (1997).
L.J. Meng and M.P. dos Santos, Thin Solid Films 322, 56 (1998).
J. Yu, X. Zhao, and Q. Zhao, Thin Solid Films 379, 2 (2000).
S.A. Studenikin, N. Golego, and M. Cocivera, J. Appl. Phys. 87, 2413 (2000).
S. Ghosh, A. Sarkar, S. Bhattacharya, S. Chaudhuri, and A.K. Pal, J. Cryst. Growth 108, 534 (1991).
D.V. Morgan, Y.H. Aliyu, R.W. Bunce, and A. Salehi, Thin Solid Films 312, 268 (1998).
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Lin, SS., Huang, JL. Microstructure and optical properties of AlOx thin films grown on ZnO-deposited glass. Journal of Materials Research 18, 1943–1949 (2003). https://doi.org/10.1557/JMR.2003.0270
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DOI: https://doi.org/10.1557/JMR.2003.0270