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Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films

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Abstract

Transmission electron microscopy (TEM) was used to investigate the structural properties of sputter-deposited yttria-stabilized zirconia (YSZ) thin films. YSZ films were deposited over a range of temperatures and background oxygen levels. Additionally, a multilayered structure was produced by cyclic application of a substrate bias. Plan-view TEM showed that temperature and oxygen levels did not have a significant effect on grain size but did alter the phases present in the thin films. Cross-sectional TEM showed the development of texture in the multilayer film, both within the individual layers and in the entire film.

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References

  1. S. Ben Amor, B. Rogier, G. Baud, M. Jacquet, and M. Nardin, Mater. Sci. Eng. B. 57, 28 (1998).

    Article  Google Scholar 

  2. M.S.R. Rao, C.P. D’Souza, P.R. Apte, R. Pinto, L.C. Gupta, J. Appl. Phys. 79, 940 (1996).

    Article  CAS  Google Scholar 

  3. P. Scardi and L. Lutterotti, Surf. Coat. Technol. 61, 52 (1993).

    Article  CAS  Google Scholar 

  4. S. Ben Amor, B. Rogier, G. Baud, M. Jacquet, and M. Nardin, Mater. Sci. Eng. B. 57, 28 (1998).

    Article  Google Scholar 

  5. R.L. Jones and D. Mess, Surf. Coat. Technol. 87, 94 (1996).

    Article  Google Scholar 

  6. U. Schulz, K. Fritscher, and M. Peters, Surf. Coat. Technol. 82, 259 (1996).

    Article  CAS  Google Scholar 

  7. C.R. Aita, M.D. Wiggins, R. Whig, and C.M. Scanlan, J. Appl. Phys. 79, 1176 (1996).

    Article  CAS  Google Scholar 

  8. K.W. Chour, J. Chen, and R. Xu, Thin Solid Films. 304, 106 (1997).

    Article  CAS  Google Scholar 

  9. V. Betz, B. Holzapfel, and L. Schultz, Thin Solid Films. 301, 28 (1997).

    Article  CAS  Google Scholar 

  10. T. Jung and A. Wesphal, Mater. Sci. Eng. A. 140, 528 (1991).

    Article  Google Scholar 

  11. Z. Ji, J.A. Haynes, E. Voelkl, and J.M. Rigsbee, J. Am. Ceram. Soc. 84, 929 (2001).

    Article  CAS  Google Scholar 

  12. Z. Ji and J.M. Rigsbee, J. Am. Ceram. Soc. 84, 2841 (2001).

    Article  CAS  Google Scholar 

  13. I. Petrov, L. Hultman, J.E. Sundgren, and J.E. Greene, J. Vac. Sci. Technol. A. 10, 265 (1992).

    Article  CAS  Google Scholar 

  14. L. Hultman, W.D. Münz, J. Musil, S. Kadlec, I. Petrov, and J.E. Greene, J. Vac. Sci. Technol. A. 9, 434 (1991).

    Article  CAS  Google Scholar 

  15. P. Patsalas, C. Charitidis, and S. Logothetidis, Surf. Coat. Technol. 125, 335 (2000).

    Article  CAS  Google Scholar 

  16. H.C. Lee, J.Y. Lee, and H.J. Ahn, Thin Solid Films 251, 136 (1994).

    Article  CAS  Google Scholar 

  17. DE Ruddell, BR Stoner, JY Thompson, J. Vac. Sci. Technol. 20, 1744 (2002).

    Article  CAS  Google Scholar 

  18. D.E. Ruddell, Doctoral Dissertation, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina (2002).

  19. H. Zhang and N.K. Huang, Surf. Coat. Technol. 107, 168 (1998).

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Curriculum in Applied and Materials Sciences, University of North Carolina at Chapel Hill, 27599, Chapel Hill, North Carolina, USA

    David E. Ruddell & Jeffrey Y. Thompson

  2. Curriculum in Applied and Materials Sciences, University of North Carolina at Chapel Hill, 2759, Chapel Hill, North Carolina, USA

    Brian R. Stoner

  3. Materials and Electronic Technologies Division, MCNC, Research Triangle Park (RTP), 27709, North Carolina, USA

    Brian R. Stoner

  4. Department of Operative Dentistry, University of North Carolina at Chapel Hill, 27599, Chapel Hill, North Carolina, USA

    Jeffrey Y. Thompson

Authors
  1. David E. Ruddell
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  2. Brian R. Stoner
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  3. Jeffrey Y. Thompson
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Correspondence to Jeffrey Y. Thompson.

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Ruddell, D.E., Stoner, B.R. & Thompson, J.Y. Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films. Journal of Materials Research 18, 195–200 (2003). https://doi.org/10.1557/JMR.2003.0027

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  • DOI: https://doi.org/10.1557/JMR.2003.0027

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