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Microstructure and mechanical properties of Ti–Si–N coatings

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Abstract

A series of Ti–Si–N coatings with 0 < Si < 20 at.% were synthesized by inductively coupled plasma assisted vapor deposition. Coating composition, structure, atomic short-range order, and mechanical response were characterized by Rutherford backscattering spectrometry, transmission electron microscopy, x-ray absorption near-edge structure spectroscopy, and instrumented nanoindentation. These experiments show that the present series of Ti–Si–N coatings consists of a mixture of nanocrystalline titanium nitride (TiN) and amorphous silicon nitride (a-Si:N); i.e., they are TiN/a-Si:N ceramic/ceramic nanocomposites. The hardness of the present series of coatings was found to be less than 32 GPa and to vary smoothly with the Si composition.

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Authors and Affiliations

  1. Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana, 70803, USA

    W. J. Meng, X. D. Zhang & B. Shi

  2. Center for Advanced Microstructures and Devices, Louisiana State University, Baton Rouge, Louisiana, 70803, USA

    R. C. Tittsworth

  3. Materials Science Division, Argonne National Laboratory, Argonne, Illinois, 60439, USA

    L. E. Rehn & P. M. Baldo

Authors
  1. W. J. Meng
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  2. X. D. Zhang
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  3. B. Shi
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  4. R. C. Tittsworth
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  5. L. E. Rehn
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  6. P. M. Baldo
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Meng, W.J., Zhang, X.D., Shi, B. et al. Microstructure and mechanical properties of Ti–Si–N coatings. Journal of Materials Research 17, 2628–2632 (2002). https://doi.org/10.1557/JMR.2002.0381

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  • DOI: https://doi.org/10.1557/JMR.2002.0381

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