Abstract
The synthesis of lithium tantalate films by a chemical solution deposition method was studied. A precursor solution was prepared by dissolving lithium ethoxide and tantalum pentaethoxide in ethanol. The addition of formic acid to this precursor solution was very effective in the preparation of homogeneous and transparent precursor films on substrates by spin coating. Lithium tantalate films crystallized on sapphire (001) substrates with a highly preferred orientation along the c axis with heat-treating at temperatures above 450 °C. The refractive index of the film prepared at 550 °C was 2.049, which is close to the value for single crystals of lithium tantalate (2.176).
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
J.A. Agostinelli, G.H. Braunstein, and T.N. Blanton, Appl. Phys. Lett. 63, 123 (1993).
H. Xie and R. Raj, Appl. Phys. Lett. 63, 3146 (1993).
H. Xie, W-Y. Hsu, and R. Raj, J. Appl. Phys. 77, 3420 (1995).
A.A. Wernberg, G. Braunstein, G. Paz-Pujalt, H.J. Gysling, and T.N. Blanton, Appl. Phys. Lett. 63, 331 (1993).
A.A. Wernberg, G.H. Braunstein, and H.J. Gysling, Appl. Phys. Lett. 63, 2649 (1993).
Y. Saito and T. Shiosaki, Jpn. J. Appl. Phys. 30, 2204 (1991).
S. Hirano and K. Kato, Bull. Chem. Soc. Jpn. 62, 429 (1989).
J-H. Jean, J. Mater. Sci. 25, 859 (1990).
T.A. Deis and P.P. Phule, J. Mater. Sci. Lett. 11, 1353 (1992).
A. Tsuzuki, K. Kani, K. Watari, and Y. Torii, J. Mater. Sci. Lett. 11, 1157 (1992).
P.P. Phulé, J. Mater. Res. 8, 334 (1993).
K. Nashimoto, in Ferroelectric Thin Films III, edited by B.A. Tuttle, E.R. Myers, S.B. Desu, and P.K. Larsen (Mater. Res. Soc. Symp. Proc. 310, Pittsburgh, PA, 1993), p. 293.
C. Ye, P. Baude, and D.L. Polla, in Crystallization and Related Phenomena in Amorphous Materials, edited by M. Libera, T.E. Haynes, P. Cebe, and J.E. Dickinson, Jr. (Mater. Res. Soc. Symp. Proc. 321, Pittsburgh, PA, 1994), p. 603.
P.J. Retuert, P.G. Kneuer, O. Wittke, R.E. Avila, and G.J. Piderit, J. Mater. Res. 10, 2797 (1995).
S.D. Cheng, Y. Zhou, C.H. Kam, X.Q. Han, W.X. Que, Y.L. Lam, Y.C. Chan, J.T. Oh, and W.S. Gan, Mater. Lett. 44, 125 (2000).
S. Ono and S. Hirano, J. Mater. Res. 16, 1155 (2001).
S. Ono and S. Hirano, J. Am. Ceram. Soc. 80, 2533 (1997).
S. Ono and S. Hirano, J. Am. Ceram. Soc. 80, 2869 (1997).
S. Ono, O. Böse, W. Unger, Y. Takeichi, and S. Hirano, J. Am. Ceram. Soc. 81, 1749 (1998).
K. Kato, Doctoral Dissertation, Nagoya University, Nagoya, Japan (1989), p. 81.
N. Ikeo, Y. Iijima, N. Niimura, M. Sigematsu, T. Tazawa, S. Matsumoto, K. Kojima, and Y. Nagasawa, Handbook of X-ray Photoelectron Spectroscopy (JEOL, Tokyo, Japan, 1991), pp. 158, 159, 202, 203, 205.
J.A. Dean, Lange’s Handbook of Chemistry, 15th ed. (McGraw-Hill, New York, 1998), pp. 7.45, 7.49.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Ono, S., Hirano, Si. Processing of highly oriented lithium tantalate films by chemical solution deposition. Journal of Materials Research 17, 2532–2539 (2002). https://doi.org/10.1557/JMR.2002.0368
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.2002.0368