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Microstructural evolution during pyrolysis of triol-based sol-gel single-layer Pb(Zr0.53Ti0.47)O3 thin films

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Abstract

Advanced analytical transmission electron microscopy has been used to investigate microstructural evolution during pyrolysis in triol-based sol-gel thin films. At pyrolysis temperatures up to 300 °C, the films remained amorphous; however, nanometer-sized precipitates were observed in films heat-treated up to 400 °C for 10 min. Analytical transmission electron microscopy indicated that the precipitates were Pb-rich, as well as deficient in O, Ti, and Zr. Films pyrolyzed up to 500 °C for 10 min were composed of a nanocrystalline pyrochlore phase; however, pores could be observed, situated in the same position as the nanometer-sized precipitates at 400 °C. Face-centered cubic Pb-rich crystallites were also present on the surface of pyrolyzed films but absent in the fully crystallized films annealed at 650 °C. A tentative mechanism is proposed to explain these observations.

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References

  1. A.I. Kingon and S.K. Streiffer, Curr. Opin. Solid State Mater. Sci. 4, 39 (1999).

    Article  CAS  Google Scholar 

  2. L.E. Cross, in Ferroelectric Ceramics Tutorial Reviews, Theory, processing, and applications, edited by N. Setter and E.L. Colla (Birkäuser, Basel, Switzerland, 1993), pp. 1–86.

    Google Scholar 

  3. R. Roy, Science 238, 1664 (1987).

    Article  CAS  Google Scholar 

  4. S.A. Impey, Z. Huang, A. Patel, R. Beanland, N.M. Shorrocks, R. Watton, and R. Whatmore, J. Appl. Phy. 83, 2202 (1998).

    Article  CAS  Google Scholar 

  5. C.D.E. Lakeman and D.A. Payne, J. Am. Ceram. Soc. 75, 3091 (1992).

    Article  CAS  Google Scholar 

  6. R. Merkle and H. Bertagnolli, J. Mater. Sci. 33, 4341 (1998).

    Article  CAS  Google Scholar 

  7. N. Sriprang, D. Kaewchinda, J.D. Kennedy, and S.J. Milne, J. Am. Ceram. Soc. 83, 1914 (2000).

    Article  CAS  Google Scholar 

  8. A.D. Polli and F.E. Lange, J. Am. Ceram. Soc. 78, 3401 (1995).

    Article  CAS  Google Scholar 

  9. S. Li, R.A. Condrate, and R.M. Spriggs, J. Can. Ceram. Soc. 57, 61 (1988).

    CAS  Google Scholar 

  10. S. Arscott, R.E. Miles, and S.J. Milne, Ferroelectrics, 228, 61 (1999).

    Article  CAS  Google Scholar 

  11. Z. Zhou, I.M. Reaney, D. Hind, J. Khemprist, and S.J. Milne, J. Am. Ceram. Soc (submitted for publication).

  12. I.M. Reaney, Microelectron. Eng. 29, 277 (1995).

    Article  CAS  Google Scholar 

  13. I.M. Reaney, K.G. Brooks, R. Klissturska, C. Pawlaczyk, and N. Setter, J. Am. Ceram. Soc. 77, 1209 (1994).

    Article  CAS  Google Scholar 

  14. Z. Huang, Q. Zhang, and R.W. Whatmore, J. Mater. Sci. Lett. 17, 1157 (1998).

    Article  CAS  Google Scholar 

  15. Z. Huang, Q. Zhang, and R.W. Whatmore, J. Appl. Phy. 86, 1662 (1999).

    Article  CAS  Google Scholar 

  16. K.G. Brooks, I.M. Reaney, R. Klissurska, Y. Huang, L. Bursill, and N. Setter, J. Mater. Res. 9, 2540 (1995).

    Article  Google Scholar 

  17. S-Y. Chen and I-W. Chen, J. Am. Ceram. Soc. 81, 97 (1998).

    Article  CAS  Google Scholar 

  18. R. Brydson, Electron Energy Loss Spectroscopy (Bios, Oxford, United Kingdom, 2001).

    Google Scholar 

  19. R.F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope, 2nd ed. (Plenum Press, New York, 1996).

    Book  Google Scholar 

  20. T. Honda, T. Tonita, T. Kaneyama, and Y. Ishida, Ultramicroscopy 54, 132 (1994).

    Article  CAS  Google Scholar 

  21. M. Hoffman, J.P. Goral, M.M. Aljassim, and C. Echer, J. Vac. Sci. Technol., A 10, 1518 (1992).

    Article  Google Scholar 

  22. A. Wu, P.H. Vilarinho, I.M. Miranda Salvado, J.L. Baptista, C.M. De Jesus, and M.F. Da Silva, J. Eur. Ceram. Soc. 19, 1403 (1999).

    Article  CAS  Google Scholar 

  23. D. Kaewchinda, T. Chairaungsri, M. Naksata, S.J. Milne, and R. Brydson, J. Eur. Ceram. Soc. 20, 1277 (2000).

    Article  CAS  Google Scholar 

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Zhou, Z., Reaney, I.M., Hind, D. et al. Microstructural evolution during pyrolysis of triol-based sol-gel single-layer Pb(Zr0.53Ti0.47)O3 thin films. Journal of Materials Research 17, 2066–2074 (2002). https://doi.org/10.1557/JMR.2002.0306

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  • DOI: https://doi.org/10.1557/JMR.2002.0306

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