Abstract
Mixed-phase diamond/β-SiC composite films with compositional gradient were prepared by microwave plasma-assisted chemical vapor deposition using a gas mixture of hydrogen, methane and tetramethylsilane (TMS). Single-crystalline silicon wafers, pretreated with diamond nanoparticles before deposition, were used as substrates. The film characterization by scanning electron microscopy, electron probe microanalysis, and energy-dispersive x-ray analysis shows that the contents of diamond and silicon carbide in the films vary with TMS flow rate. Diamond/β-SiC composite films with compositional gradients are achievable by varying the TMS flow rate during the film growth process.
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Shi, Y., Tan, M. & Jiang, X. Deposition of diamond/β-SiC gradient composite films by microwave plasma-assisted chemical vapor deposition. Journal of Materials Research 17, 1241–1243 (2002). https://doi.org/10.1557/JMR.2002.0184
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DOI: https://doi.org/10.1557/JMR.2002.0184