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Analysis of the Reservoir Length and its Effect on Electromigration Lifetime

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Abstract

This report studies the electromigration performance of W-plug via structures under the reservoir effect. The lifetime improvement factor M was observed to be a weak function of the stressing current and approximately equal to 2. A Simple model is included in the report to explain this observation. The model also predicts the most effective reservoir length for electromigration lifetime improvement.

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Authors and Affiliations

  1. Materials Science and Engineering Department, The University of Texas at Arlington, P.O. Box 19016, 76006, Arlington, Texas, USA

    H. A. Le & C-U. Kim

  2. Dallas Reliability –413, 5200 NE Elam Young Parkway, 97124-6497, Hillsboro, Oregon, USA

    Larry Ting

  3. Intel Corporation, M.S. RA2-413, 5200 NE Elam Young Parkway, 97124-6497, Hillsboro, Oregon, USA

    N. C. Tso

Authors
  1. H. A. Le
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  2. Larry Ting
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  3. N. C. Tso
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  4. C-U. Kim
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Correspondence to H. A. Le.

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Le, H.A., Ting, L., Tso, N.C. et al. Analysis of the Reservoir Length and its Effect on Electromigration Lifetime. Journal of Materials Research 17, 167–171 (2002). https://doi.org/10.1557/JMR.2002.0025

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  • DOI: https://doi.org/10.1557/JMR.2002.0025

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