Skip to main content
Log in

Compositional distributions in nanoscale metallic multilayers studied using x-ray mapping

  • Articles
  • Published:
Journal of Materials Research Aims and scope Submit manuscript

Abstract

At very small layer spacings (< ∼2 nm) in Cu-Nb and Cu-Cr multilayers the Cu forms a metastable body-centered-cubic (bcc) structure and the films exhibit interesting mechanical properties. No information about the miscibility of bcc Cu in Nb or Cr is available and it is not known whether the films remain compositionally discrete. X-ray mapping in the analytical electron microscope has been used to study the compositional distributions in these films and show that they do remain discrete down to a layer spacing of 1.8 nm. A simple model for the experimentally measured distribution has been used to show that the expected analytical resolution has been achieved and that it should be possible to map layers with a spacing of 0.8 nm.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. H. Kung and T. Foecke, MRS Bull. 24, 14 (1999).

    Google Scholar 

  2. A. Misra, M. Verdier, Y.C. Lu, H. Kung, T.E. Mitchell, M. Nastasi, and J.D. Embury, Scripta Mat. 39, 555 (1998).

    Article  CAS  Google Scholar 

  3. T.E. Mitchell, Y-C. Lu, A.J. Griffin, M. Nastasi, and H. Kung, J. Am. Ceram. Soc. 80, 1676 (1997).

    Google Scholar 

  4. H. Kung, Y-C. Liu, A.J. Griffin, M. Nastasi, T.E. Mitchell, and J.D. Embury, Appl. Phys. Lett. 71, 2103 (1997).

    Article  CAS  Google Scholar 

  5. A.T. Paxton, M. Methfessel, and H.M. Polatoglou, Phys. Rev. B: Condens. Matter 41, 8127 (1990).

    Article  CAS  Google Scholar 

  6. M.H. Kang, R.C. Tatar, E.J. Mele, and P. Soven, Phys. Rev. B: Condens. Matter 35, 5457 (1987).

    Article  CAS  Google Scholar 

  7. S. Pizzini, K.J. Roberts, W.J. Phythian, C.A. English, and G.N. Greaves, Philos. Mag. Lett. 2, 223 (1990).

    Article  Google Scholar 

  8. C. Schmidt, F. Ernst, M.W. Finnis, and V. Vitek, Phys. Rev. Lett. 75, 2160 (1995).

    Article  CAS  Google Scholar 

  9. D.J. Larson, A.K. Petford-Long, A. Cerezo, and G.D.W. Smith, Acta Mat. 47, 4019 (1999).

    Article  CAS  Google Scholar 

  10. V.J. Keast, P.A. Midgley, S.J. Lloyd, P.J. Thomas, M. Weyland, C.B. Boothroyd, and C.J. Humphreys, in Electron Microscopy and Microanalysis, edited by C.J. Kiely (Inst. Phys. Conf. Ser. No. 161, Institute of Physics, Bristol, 1999), p. 35.

  11. V.J. Keast, A. Misra, H. Kung, T.E. Mitchell, and C.J. Humphreys, in Electron Microscopy and Microanalysis, edited by C.J. Kiely (Inst. Phys. Conf. Ser. No. 161, Institute of Physics, Bristol, 1999), p. 211.

  12. V.J. Keast and D.B. Williams, Acta mater. 47, 3999 (1999).

    Article  CAS  Google Scholar 

  13. J.R. Michael and D.B. Williams, J. Microsc. 147, 289 (1987).

    Article  Google Scholar 

  14. C.E. Lyman, J.I. Goldstein, D.B. Williams, D.W. Ackland, S. von Harrach, A.W. Nicholls, and P.J. Statham, J. Microsc. 176, 85 (1994).

    Article  CAS  Google Scholar 

  15. D.B. Williams, M. Watanabe, D.T. Carpenter, and K. Barmak, Mikrochim. Acta S15, 49 (1998).

    Google Scholar 

  16. J.I. Goldstein and D.B. Williams, in Principles of Analytical Electron Microscopy, edited by D.C. Joy, A.D. Romig, and J.I. Goldstein (Plenum Press, New York, 1986), p. 183.

  17. V.J. Keast and D.B. Williams, J. Microsc 199, 45 (2000).

    Article  Google Scholar 

  18. P. Doig and P.E.J. Flewitt, Met. Trans. A 13, 1397 (1982).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Keast, V.J., Misra, A., Kung, H. et al. Compositional distributions in nanoscale metallic multilayers studied using x-ray mapping. Journal of Materials Research 16, 2032–2038 (2001). https://doi.org/10.1557/JMR.2001.0278

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/JMR.2001.0278

Navigation