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The effect of Pb stiochiometry on switching behavior of Pt/lead zirconate titanate/Pt ferroelectric capacitors

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Abstract

A promising approach to control Pb stoichiometry during crystallization of sol-gel-derived lead zirconate titanate (PZT) layers is presented. Pyrolyzed layers were encapsulated in a quartz ampoule containing PbZrO3 powder and crystallized in a lamp furnace. For moderate heating rates, the PbO ambient created by the powder resulted in a pronounced sharpening of the preferential (111) texture, while the remanent polarisation Pr increased by 50% compared to nonencapsulated samples. A significant reduction of the coercive field was seen for layers crystallized under PbO ambient, reflected in a lowering of the switching voltage by 0.5 V compared to standard hotplate crystallized films. The results highlighted the key role of Pb stoichiometry control for further lowering the switching voltage of PZT films.

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Authors and Affiliations

  1. Interuniversity Microelectronics Center (IMEC), Kapeldreef 75, B3001, Leuven, Belgium

    G. J. Norga, Laura Fè & D. Wouters

  2. Department of Metallurgy and Materials Engineering, KU Leuven, De Croylaan 2, Leuven, B3001, Belgium

    J. Maes, E. Coppye & O. Van der Biest

Authors
  1. G. J. Norga
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  2. J. Maes
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  3. E. Coppye
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  4. Laura Fè
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  5. D. Wouters
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  6. O. Van der Biest
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Corresponding author

Correspondence to G. J. Norga.

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Norga, G.J., Maes, J., Coppye, E. et al. The effect of Pb stiochiometry on switching behavior of Pt/lead zirconate titanate/Pt ferroelectric capacitors. Journal of Materials Research 15, 2309–2313 (2000). https://doi.org/10.1557/JMR.2000.0332

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  • DOI: https://doi.org/10.1557/JMR.2000.0332

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