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Effect of oxygen partial pressure on texture development in lead zirconate titanate thin films processed from metalorganic precursors

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Abstract

Metalorganic liquid precursors were used to examine the effects of processing atmosphere on texture development in oriented Pb(Zr0.60Ti0.40)O3 thin films. After removal of organic ligands via pyrolysis, the films were heated at 25 °C/min in a 5% H2/Ar atmosphere until a switching temperature, after which the atmosphere was switched to pure oxygen. The films were heated to a maximum temperature of 650 °C with switching temperatures ranging from 450 to 600 °C. The degree of (111) orientation in the lead zirconate titanate (PZT) films increased with increasing switching temperature, resulting in highly textured (111) PZT films. These results suggest that atmosphere control plays a significant role in texture development during rapid thermal processing.

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Authors and Affiliations

  1. School of Materials Engineering, Purdue University, West Lafayette, Indiana, 47907-1289, USA

    Jarrod L. Norton, Gerald L. Liedl & Elliott B. Slamovich

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  1. Jarrod L. Norton
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  2. Gerald L. Liedl
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  3. Elliott B. Slamovich
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Norton, J.L., Liedl, G.L. & Slamovich, E.B. Effect of oxygen partial pressure on texture development in lead zirconate titanate thin films processed from metalorganic precursors. Journal of Materials Research 14, 4615–4620 (1999). https://doi.org/10.1557/JMR.1999.0624

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  • DOI: https://doi.org/10.1557/JMR.1999.0624

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