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Investigation of optical anisotropy of refractive-index-profiled porous silicon employing generalized ellipsometry

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Abstract

Porosity depth profiles in porous silicon were realized by time modulation of the applied current density during electrochemical etching of crystalline silicon. The samples were investigated by variable angle spectroscopic ellipsometry. Using a basic optical model based on isotropy assumptions and the Bruggeman effective medium approximation, deviations from an ideal profile in terms of an interface roughness between the silicon substrate and the porous silicon layer and a compositional gradient normal to the surface were revealed. Furthermore, optical anisotropy of the sample was investigated by generalized ellipsometry. The anisotropy was found to be uniaxial with the optic axis tilted from surface normal by about 25°. The material was also found to exhibit positive birefringence.

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References

  1. L.T. Canham, Appl. Phys. Lett. 57, 1046 (1990).

    Article  CAS  Google Scholar 

  2. A. Halimaoui, C. Oules, G. Bomchil, A. Bsiesy, F. Gaspard, R. Herino, M. Ligeon, and F. Muller, Appl. Phys. Lett. 59, 304 (1991).

    Article  CAS  Google Scholar 

  3. R.L. Smith and S.D. Collins, J. Appl. Phys. 71, R1 (1992).

    Article  CAS  Google Scholar 

  4. S. Zangooie, R. Jansson, and H. Arwin, J. Vac. Sci. Technol. A 16, 2901 (1998).

    Article  CAS  Google Scholar 

  5. S. Setzu, G. Lérondel, and R. Romestain, J. Appl. Phys. 84, 3129 (1998).

    Article  CAS  Google Scholar 

  6. M.G. Berger, R. Arens-Fischer, S.T. Frohnhoff, C. Dieker, K. Winz, H. Münder, H. Lüth, M. Arntzen, and W. Theiss, in Microcrystalline and Neurocrystalline Semiconductors, edited by L. Brus, M. Itirose, R.W. Collins, F. Koch, and C.C. Tsai (Mater. Res. Soc. Symp. Proc. 358, Pittsburgh, PA, 1995) p. 327.

  7. V. Pellegrini, A. Tredicucci, C. Mazzoleni, and L. Pavesia, Phys. Rev. B 52, 328 (1995).

    Google Scholar 

  8. M. Thönissen, M.G. Berger, M. Krüger, S. Billat, R. Arens-Fischer, O. Glück, H. Lüth, S. Hilbrich, W. Theiss, and P. Grosse, in Microporous and Macroporous Materials, edited by R.F. Lobo, J.S. Beck, S.L. Suib, D.R. Corbin, M.E. Davis, L.E. Iton, and S.I. Zones. (Mater. Res. Soc. Symp. Proc. 431, Pittsburgh, PA, 1996) p. 373.

  9. S. Zangooie, R. Jansson, and H. Arwin, J. Appl. Phys. 86, 850 (1999).

    Article  CAS  Google Scholar 

  10. L. Pavesi and P. Dubos, Semicond. Sci. Technol. 12, 570 (1997).

    Article  CAS  Google Scholar 

  11. C. Mazzoleni and L. Pavesi, Appl. Phys. Lett. 67, 2983 (1995).

    Article  CAS  Google Scholar 

  12. M.G. Berger, M. Thönissen, R. Arens-Fischer, H. Münder, H. Lüth, M. Arntzen, and W. Theiß, Thin Solid Films 255, 313 (1995).

    Article  CAS  Google Scholar 

  13. S. Fronhoff and M.G. Berger, Adv. Mater. 12, 963 (1994).

    Article  Google Scholar 

  14. A. Loni, L.T. Canham, M.G. Berger, R. Arens-Fischer, H. Münder, H. Lüth, H.F. Arnand, and T.M. Benson, Thin Solid Films 276, 143 (1996).

    Article  CAS  Google Scholar 

  15. S. Zangooie, R. Bjorklund, and H. Arwin, Sens. Actuators, B 43, 168 (1997).

    Article  CAS  Google Scholar 

  16. T. Laurell, J. Drott, L. Rosengren, and K. Lindström, Sens. Actuators, B 31, 161 (1996).

    Article  CAS  Google Scholar 

  17. A. Janshoff, K.S. Dancil, C. Steinem, D.P. Greiner, V.S-Y. Lin, C. Gurtner, K. Motesharei, M.J. Sailor, and M.R. Ghadiri, J. Am. Chem. Soc. 120, 12108 (1998).

    Article  CAS  Google Scholar 

  18. S. Zangooie, R. Jansson, and H. Arwin, Appl. Surf. Sci. 136, 123 (1998).

    Article  CAS  Google Scholar 

  19. S. Zangooie, R. Bjorklund, and H. Arwin, Thin Solid Films 313–314, 827 (1998).

    Google Scholar 

  20. S. Zangooie, R. Bjorklund, and H. Arwin, J. Electrochem. Soc. 144, 4027 (1997).

    Article  CAS  Google Scholar 

  21. R.M.A. Azzam and N.M. Bashara, J. Opt. Soc. Am. 64, 128 (1974).

    Article  CAS  Google Scholar 

  22. M. Schubert, Phys. Rev. B 53, 4265 (1996).

    Article  CAS  Google Scholar 

  23. M. Schubert, B. Rheinländer, J.A. Woollam, B. Johs, and C.M. Herzinger, J. Opt. Soc. Am. A 13, 875 (1996).

    Article  CAS  Google Scholar 

  24. M. Schubert, B. Rheinländer, C. Cramer, H. Schmiedel, J.A. Woollam, C.M. Herzinger, and B. Johs, J. Opt. Soc. Am. A 13, 1930 (1996).

    Article  CAS  Google Scholar 

  25. M. Schubert, Thin Solid Films 313–314, 323 (1998).

    Article  Google Scholar 

  26. S. Zangooie, R. Jansson, and H. Arwin, in Amorphous and Heterogeneous Silicon Thin Films: Fundamentals to Devices—1999, edited by H.M. Branz, R.W. Collins, H. Okamoto, S. Guha, and R. Schropp (Mater. Res. Soc. Symp. Proc. 557, Warrendale, PA, in press).

  27. R.M.A. Azzam and N.M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1997).

    Google Scholar 

  28. R. Herino, G. Bomchil, K. Barla, C. Bertrand, and J.L. Ginoux, J. Electrochem. Soc. 134, 1994 (1987).

    Article  CAS  Google Scholar 

  29. W. Lang, P. Steiner, and H. Sandmaier, Sens. Actuators, A 51, 31 (1995).

    Article  CAS  Google Scholar 

  30. H. Unno, K. Imai, and S. Muramoto, J. Electrochem. Soc. 134, 645 (1987).

    Article  CAS  Google Scholar 

  31. D. Buttard, D. Bellet, and T. Baumbach, Thin Solid Films 276, 69 (1996).

    Article  CAS  Google Scholar 

  32. M.G. Berger, C. Dieker, M. Thönissen, L. Vescant, H. Lüth, H. Münder, W. Theiß, M. Wernke, and P. Grosse, J. Phys. D: Appl. Phys. 27, 1333 (1994).

    Article  CAS  Google Scholar 

  33. M.G. Berger, R. Arens-Fischer, M. Thonissen, M. Krüger, S. Billat, H. Lüth, S. Hilbrich, W. Theiß, and P. Grosse, Thin Solid Films 297, 237 (1997).

    Article  CAS  Google Scholar 

  34. S. Billat, M. Thonissen, R. Arens-Fischer, M.G. Berger, M. Krüger, and H. Lüth, Thin Solid Films 297, 22 (1997).

    Article  CAS  Google Scholar 

  35. M. Thonissen, M.G. Berger, S. Billat, R. Arens-Fischer, M. Krüger, H. Lüth, W. Theiß, S. Hillbrich, P. Grosse, G. Lorendel, and U. Frotscher, Thin Solid Films 297, 92 (1997).

    Article  Google Scholar 

  36. A.G. Cullis and L.T. Canham, Nature 353, 335 (1991).

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Laboratory of Applied Optics, Department of Physics and Measurement Technology, Linköping University, SE-581 83, Linköping, Sweden

    S. Zangooie, R. Jansson & H. Arwin

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  1. S. Zangooie
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  2. R. Jansson
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  3. H. Arwin
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Correspondence to S. Zangooie.

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Zangooie, S., Jansson, R. & Arwin, H. Investigation of optical anisotropy of refractive-index-profiled porous silicon employing generalized ellipsometry. Journal of Materials Research 14, 4167–4175 (1999). https://doi.org/10.1557/JMR.1999.0564

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  • DOI: https://doi.org/10.1557/JMR.1999.0564

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