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Microcharacterization of liquid delivery metalorganic chemical vapor deposition processed thin film materials exhibiting giant magnetoresistance

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Abstract

Thin films of La0.6Ca0.4MnO3 (LCMO) have been produced on (001) oriented LaAlO3 (LAO) and yttrium-stabilized zirconia (YSZ) substrates by liquid-delivery metalorganic chemical vapor deposition (LD-MOCVD). X-ray diffraction (XRD) analyses showed that the films were epitaxially grown on LAO substrates and were monocrystalline at a thickness of less than 500 Å. At a thickness of greater than 500 Å, the films became polycrystalline but maintained their high texture (preferred crystalline orientation). Films grown on YSZ were always polycrystalline but were also highly oriented. Regardless of the substrate, the 1500 Å thick polycrystalline films exhibited substantially significant magnetoresistance ratios even above room temperature.

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Weaver, M.L., Brandao, L.P.M., Garmestani, H. et al. Microcharacterization of liquid delivery metalorganic chemical vapor deposition processed thin film materials exhibiting giant magnetoresistance. Journal of Materials Research 14, 2007–2011 (1999). https://doi.org/10.1557/JMR.1999.0271

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  • DOI: https://doi.org/10.1557/JMR.1999.0271

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