Abstract
Dense and smooth BaTiO3 thin films were prepared on SrTiO3 (100) substrates by the dipping-pyrolysis process using a mixed precursor solution of barium and titanium naphthenates. Combination effects of prefiring [at 150–450 °C in air or low oxygen partial pressure, p(O2)[ and final heat treatment [at 850 °C in air or low p(O2)[ on preparation of BaTiO3 thin films were examined. An epitaxial BaTiO3 thin film with a dense and smooth surface consisting of nanosized grains about 70 nm was prepared by prefiring under low p(O2) at 250 °C and final heat treatment under low p (O2) at 850 °C.
Similar content being viewed by others
References
D. Dimos, Annu. Rev. Mater. Sci. 25, 273 (1995).
A. M. Glass, Science 235, 1003 (1987).
L.A. Wills, B. W. Wessels, D.S. Richeson, and T. J. Marks, Appl. Phys. Lett. 60, 41 (1992).
D. L. Kaiser, M. D. Vaudin, L. D. Lotter, Z.L. Wang, J. P. Cline, C. S. Hwang, R. B. Marinenko, and J. G. Gillen, Appl. Phys. Lett. 66, 2801 (1995).
H. Terauchi, Y. Watanabe, H. Kasatani, K. Kamigaki, T. Terashima, and Y. Bando, J. Phys. Soc. Jpn. 61, 2194 (1992).
Y. Yano, K. Iijima, Y. Daitoh, T. Terashima, Y. Bando, Y. Watanabe, H. Kasatani, and H. Terauchi, J. Appl. Phys. 76, 7833 (1994).
T. Nose, H-T. Kim, and H. Uwe, J. Appl. Phys. 76, 5259 (1994).
V. Srikant, E. J. Tarsa, D. R. Clarke, and J. S. Speck, J. Appl. Phys. 77, 1517 (1995).
S. Kim, S. Hishita, Y. M. Kang, and S. Baik, J. Appl. Phys. 78, 5604 (1995).
K. Fujimoto, Y. Kobayashi, and K. Kubota, Thin Solid Films 169, 249 (1989).
D. H. Kim and H. S. Kwok, Appl. Phys. Lett. 67, 1803 (1995).
S. Kim, T. Manabe, I. Yamaguchi, T. Kumagai, and S. Mizuta, J. Mater. Res. 12, 1141 (1997).
T. Manabe, I. Yamaguchi, S. Nakamura, W. Kondo, T. Kumagai, and S. Mizuta, J. Mater. Res. 10, 1635 (1995).
S. Kim, T. Manabe, I. Yamaguchi, T. Kumagai, and S. Mizuta, Trans. Mater. Res. Soc. Jpn. 20, 636 (1996).
S. Kim, T. Manabe, I. Yamaguchi, T. Kumagai, and S. Mizuta, Thin Solid Films 310, 199 (1997).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Kim, S., Fujimoto, T., Manabe, T. et al. Dense and smooth epitaxial BaTiO3 thin films by the dipping-pyrolysis process. Journal of Materials Research 14, 592–596 (1999). https://doi.org/10.1557/JMR.1999.0084
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1999.0084