Skip to main content
SpringerLink
Log in

Novel in situ production of smooth diamond films

  • Articles
  • Published:
Journal of Materials Research Aims and scope Submit manuscript

Abstract

We have developed a unique method to produce smooth diamond films using a modified microwave plasma process system. This method consists of sequential in situ deposition and planarization in an electron cyclotron resonance plasma system. Diamond films were deposited to a thickness of 3.0 μm in this system at a pressure of 1.000 Torr from gas mixtures of methanol and hydrogen. Deposition was followed by planarization using a two-grid ion beam extraction process with a pure oxygen plasma at 10 mTorr. The average roughness of the diamond films so produced was as low as 30 nm, which was a factor of two lower than that of the as-deposited diamond films.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. C. Tokura, F. Yang, and M. Yoshikawa, Thin Solid Films 212, 49 (1992).

    Article  CAS  Google Scholar 

  2. T. Zhao, D. F. Grogan, B. G. Bovard, and H. A. Macleod, Appl. Opt. 31, 1483 (1992).

    Article  Google Scholar 

  3. A. Hirata, H. Tokura, and M. Yoshikawa, Thin Solid Films 212, 43 (1992).

    Article  CAS  Google Scholar 

  4. D. G. Lee and R. K. Singh, in Beam-Solid Interactions for Materials Synthesis and Characterization, edited by D. E. Luzzi, T. F. Heinz, M. Iwaki, and D. C. Jacobson (Mater. Res. Soc. Symp. Proc. 354, Pittsburgh, PA, 1995), p. 699.

  5. D. G. Lee, D. R. Gilbert, and R. K. Singh, J. Electron. Mater. (1997).

  6. H. Maeda, K. Ohtsubo, M. Irie, N. Ohya, K. Kusakabe, and S. Morooka, J. Mater. Res. 10, 3115 (1995).

    Article  CAS  Google Scholar 

  7. H. Makita, K. Nishimura, N. Jiang, A. Hatta, T. Ito, and A. Hiraki, Thin Solid Films 281, 279 (1996).

    Article  Google Scholar 

  8. H. Kawarada, K. S. Mar, and A. Hiraki, Jpn. J. Appl. Phys. 26, L1032 (1987).

    Article  CAS  Google Scholar 

  9. B. Lax, W. P. Allis, and S. C. Brown, J. Appl. Phys. 21, 1297 (1950).

    Article  CAS  Google Scholar 

  10. R. K. Singh, D. R. Gilbert, and J. Laveigne, Appl. Phys. Lett. 69, 371 (1996).

    Article  Google Scholar 

  11. R. K. Singh, D. R. Gilbert, J. Fitz-Gerald, S. Harkness, and D. G. Lee, Science 272, 396 (1996).

    Article  CAS  Google Scholar 

  12. R. K. Singh, D. Gilbert, R. Tellshow, P. H. Holloway, R. Ochoa, J. H. Simmons, and R. Koba, Appl. Phys. Lett. 61, 2863 (1992).

    Article  Google Scholar 

  13. D. R. Gilbert, R. Singh, R. Clarke, and S. Murugkar, Appl. Phys. Lett. 70, 1974 (1997).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Materials Science and Engineering, University of Florida, Gainesville, 32611, Florida, USA

    Donald R. Gilbert, Dong-Gu Lee & Rajiv K. Singh

Authors
  1. Donald R. Gilbert
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Dong-Gu Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Rajiv K. Singh
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Gilbert, D.R., Lee, DG. & Singh, R.K. Novel in situ production of smooth diamond films. Journal of Materials Research 13, 1735–1737 (1998). https://doi.org/10.1557/JMR.1998.0240

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/JMR.1998.0240

Search

Navigation