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Microprobe Raman spectroscopy of TiN coatings oxidized by solar beam heat treatment

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Abstract

Physical vapor deposited TiN coatings oxidized by solar beam heat treatment in air were examined by microprobe Raman spectroscopy. The Raman spectra of TiN treated at 400 °C indicated incipient oxidation by the presence of anatase TiO2 and additionally showed a broadband feature around the forbidden TiN vibrational mode. Inhomogeneous mixtures of rutile TiO2 and small amounts of anatase polymorph (< 10%) were detected for the treatments at 600 °C only during the initial stage of oxidation. Prolonged treatment at 600 °C resulted in a complete anatase-to-rutile conversion. Rutile was identified as the single product of oxidation of the TiN samples treated at 800 °C. Peak analysis of the rutile spectra revealed no substantial spectral shifts, demonstrating an oxide growth of nearly stoichiometric rutile with an estimated composition in the range of TiO2±0.02. The Raman scattered light intensity could be correlated with the rutile layer thickness.

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Authors and Affiliations

  1. Department of Metallurgy and Materials Engineering, Katholieke Universiteit Leuven, B-3001, Leuven, Belgium

    M. Franck, J-P Celis & J. R. Roos

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  1. M. Franck
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  2. J-P Celis
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  3. J. R. Roos
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Franck, M., Celis, JP. & Roos, J.R. Microprobe Raman spectroscopy of TiN coatings oxidized by solar beam heat treatment. Journal of Materials Research 10, 119–125 (1995). https://doi.org/10.1557/JMR.1995.0119

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  • DOI: https://doi.org/10.1557/JMR.1995.0119

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