Abstract
The pyrochlore to perovskite transition in sputtered PZT thin films has been studied using SEM and XRD. The films were annealed in the temperature range between 350 °C and 750 °C, and the transition temperature for pyrochlore to perovskite transition was found to be around 525 °C. Isothermal annealing was used to study the nucleation and growth kinetics of the perovskite phase. The results showed a linear growth rate for the perovskite phase, thereby indicating an interface controlled process. Also, the growth was found to be isotropic in two dimensions parallel to the plane of the substrate. The nucleation of the perovskite phase was found to be random. The effective activation energy of the perovskite transition was found to be 494 kJ/mol using Avrami’s approach.
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References
M. Okuyama, Y. Matsui, H. Nakano, T. Nakagawa, and Y. Hama-kawa, Jpn. J. Appl. Phys. 18 (8), 1633–1634 (1979).
Y. Matsui, M. Okuyama, N. Fujita, and Y. Hamakawa, J. Appl. Phys. 52 (8), 5107–5111 (1981).
K. Iijima, Y. Tomita, R. Takayama, and I. Ueda, J. Appl. Phys. 60 (1), 361–367 (1986).
R. Takayama and Y. Tomita, J. Appl. Phys. 65 (4), 1666–1670 (1989).
R. Castellano, Ferroelectrics 28, 387–389 (1980).
S. Krupanidhi, N. Maffei, M. Sayer, and K. El-Assal, J. Appl. Phys. 54 (11), 6601–6609 (1983).
A. Okada, J. Appl. Phys. 48 (7), 2905–2909 (1977).
K. Sreenivas, M. Sayer, and P. Garrett, Thin Solid Films 172, 251–267 (1989).
M. Adachi, T. Matsuzaki, T. Yamada, T. Shiosaki, and A. Kawabata, Jpn. J. Appl. Phys. 26 (4), 550–553 (1987).
T. Nakagawa, J. Yamaguchi, M. Okuyama, and Y. Hamakawa, Jpn. J. Appl. Phys. 21 (10), L655-L656 (1982).
G. Dormans, M. de Keeijser, and P. van Veldhoven, in Ferroelectric Thin Films II, edited by A. I. Kingon, E. R. Myers, and B. Tuttle (Mater. Res. Soc. Symp. Proc. 243, Pittsburgh, PA, 1992).
S. Dey and R. Zuleeg, Ferroelectrics 108, 37–46 (1990).
J. Carrano, C. Sudhama, J. Lee, A. Tasch, and W. Miller, IEDM 89, 255–258.
J. Fukushima, K. Kodaira, and T. Marsushita, J. Mater. Sci. 19, 595–598 (1984).
K. Saenger, R. Roy, K. Etzold, and J. Cuomo, in Ferroelectric Thin Films, edited by E. R. Myers and A. I. Kingon (Mater. Res. Soc. Symp. Proc. 200, Pittsburgh, PA, 1990), pp. 115–120.
K. Baba-Kishi and C. Randall, Ferroelectrics 93, 329–333 (1989).
R. Roy, K. Etzold, and J. Cuomo, in Ferroelectric Thin Films, edited by E. R. Myers and A. I. Kingon (Mater. Res. Soc. Symp. Proc. 200, Pittsburgh, PA, 1990), pp. 141–152.
A. Okada, J. Appl. Phys. 49 (8), 4495–4499 (1978).
C. Randall, D. Barber, and R. Whatmore, J. Mater. Sci. 22, 925–931 (1987).
K. Chen and J. Mackenzie, in Better Ceramics Through Chemistry IV, edited by B. J. J. Zelinski, C. J. Brinker, D. E. Clark, and D. R. Ulrich (Mater. Res. Soc. Symp. Proc. 180, Pittsburgh, PA, 1990), pp. 663–668.
B. Cullity, Elements of X-ray Diffraction (Addison-Wesley Co., Reading, MA, 1956), p. 261.
C. Kwok, S. Desu, and L. Kammerdiner, in Ferroelectric Thin Films, edited by E. R. Myers and A. I. Kingon (Mater. Res. Soc. Symp. Proc. 200, Pittsburgh, PA, 1990), pp. 83–89.
J. Burke and D. Turnbull, The Kinetics of Phase Transformations in Metals (Pergamon Press, Oxford, 1965).
J. Christian, The Theory of Transformations in Metals and Alloys, 2nd ed. (Pergamon Press, Oxford, 1975).
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Kwok, C.K., Desu, S.B. Formation kinetics of PbZrxTi1−xO3 thin films. Journal of Materials Research 9, 1728–1733 (1994). https://doi.org/10.1557/JMR.1994.1728
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DOI: https://doi.org/10.1557/JMR.1994.1728