Abstract
Undoped and lanthanide (La and Nd) doped Pb(ZrxTi1-x)03, i.e., PZT, ferroelectric thin films were prepared by metallorganic decomposition (MOD) and spin-coating. The precursors for making the undoped PZT films were derived from lead acetate, zirconium n-propoxide, and titanium isopropoxide. In addition, lanthanum acetylacetonate and neodymium acetate were introduced into the precursor solution to accomplish the doping of the corresponding elements. Both undoped and doped PZT films were coated onto Pt/Ti/Si02/Si and single-crystal sapphire substrates to various thicknesses and annealed at a range of temperatures and times. The effects of lanthanide dopants in PZT films were studied with regard to microstructure, Curie temperatures, crystal distortion, optical properties, and electrical properties. The results indicate that the addition of La and Nd dopants tends to enhance perovskite phase formation and improve the packing densities and electrical properties of PZT films.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
M. Oikawa and K. Toda, Appl. Phys. Lett. 29, 491 (1976).
R. Castellano, Ferroelectrics 28, 387 (1980).
C. Chiang, C. Cook, P. Schenck, P. Brody, and J. Benedetto, in Ferroelectric Thin Films, edited by E. R. Myers and A. I. Kingon (Mater. Res. Soc. Symp. Proc. 200, Pittsburgh, PA, 1990), p. 133.
J. K. Saenger, R. Roy, K. Etzold, and J. Cuomo, in Ferroelectric Thin Films, edited by E. R. Myers and A. I. Kingon (Mater. Res. Soc. Symp. Proc. 200, Pittsburgh, PA, 1990), p. 115.
C.H. Peng and S.B. Desu, Appl. Phys. Lett. 61, 1 (1992).
K. D. Budd, S. K. Dey, and D. A. Payne, Proc. Brit. Ceram. Soc. 36, 107 (1985).
J. Fukushima, K. Kodaira, and T. Marsushita, J. Mater. Sci. 19, 595 (1984).
G. Yi, A. Wu, and M. Sayer, J. Appl. Phys. 64, 2717 (1988).
Y. Wu, Ferroelectric Materials and Their Applications (North Holland, New York, 1991).
G.H. Haertling and C.E. Land, J. Am. Ceram. Soc. 54 (1), 1 (1971).
R.P. Tandon, V. Singh, and N.N. Swami, J. Mater. Soc. Lett. 11, 327 (1992).
K.D. Budd, Ph.D. Thesis, University of Illinois at Urbana-Champaign (1986).
C. H. Peng, Ph.D. Thesis, Virginia Polytechnic Institute and State University, Blacksburg, VA (1992).
C.K. Kwok, Ph.D. Thesis, Virigina Polytechnic Institute and State University, Blacksburg, VA (1992).
B. A. Tuttle, R. W. Schwartz, D. H. Doughty, and J. A. Voigt, in Ferroelectric Thin Films, edited by E. R. Myers and A. I. Kingon (Mater. Res. Soc. Symp. Proc. 200, Pittsburgh, PA, 1990), p. 159.
C.K. Kwok and S.B. Desu, in ASC Symposium Series 25, Ferroelectric Films, edited by A. Bhalla (1992), p. 85.
R. Schwartz, B. Bunker, D. Dimos, R. Assink, B. Tuttle, and I. Weinstock, Ferroelectrics (in press).
S.B. Desu, C. Peng, L. Kammerdiner, and P. Schuele, in Ferroelectric Thin Films, edited by E.R. Myers and A.I. Kingon (Mater. Res. Soc. Symp. Proc. 200, Pittsburgh, PA, 1990), p. 319.
J.F. Chang and S.B. Desu, in ASC Symposium Series 25, Ferroelectric Films, edited by A. Bhalla (1992), p. 155.
G. Spierings, M. Ulenaers, G. Kampschoer, H. van Jal, and P. Larsen, J. Appl. Phys. 70 (4), 2290 (1991).
C.K. Kwok and S.B. Desu, Appl. Phys. Lett. 60 (12), 1430 (1992).
T. Yamamoto, H. Igarashi, and K. Okazaki, J. Am. Ceram. Soc. 66 (5), 363 (1983).
Author information
Authors and Affiliations
Additional information
Author to whom all correspondence should be addressed.
Rights and permissions
About this article
Cite this article
Chang, JF., Desua, S.B. Effects of dopants in PZT films. Journal of Materials Research 9, 955–969 (1994). https://doi.org/10.1557/JMR.1994.0955
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1994.0955