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Epitaxial growth of sol-gel PLZT thin films

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Abstract

Epitaxial lead lanthanum zirconate titanate [PLZT(9/50/50)] thin films were fabricated on various single crystal substrates using the spin coating of metallo-organic solutions. The films were heat-treated at 700 °C for 1 h using the direct insertion method. The films were epitaxially grown with (100), (100), and (110) being parallel to the SrTiO3(100), the MgO(100), and the sapphire (0112) substrates, respectively. The epitaxy of the films was investigated using x-ray diffraction, pole figures, rocking curves, and scanning electron microscopy.

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Authors and Affiliations

  1. Department of Ceramic Science and Engineering, Korea Advanced Institute of Science and Technology, Kusong Dong 373-1, Yusung Gu, Taejon, Korea

    Dae Sung Yoon, Chang Jung Kim, Joon Sung Lee & Kwangsoo No

  2. Department of Electronic Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Kusong Dong 373-1, Yusung Gu, Taejon, Korea

    Won Jong Lee

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  1. Dae Sung Yoon
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  2. Chang Jung Kim
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  3. Joon Sung Lee
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  4. Won Jong Lee
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  5. Kwangsoo No
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Yoon, D.S., Kim, C.J., Lee, J.S. et al. Epitaxial growth of sol-gel PLZT thin films. Journal of Materials Research 9, 420–425 (1994). https://doi.org/10.1557/JMR.1994.0420

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  • DOI: https://doi.org/10.1557/JMR.1994.0420

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