Abstract
The efficiency of far-IR germanium photoconductive detectors can be markedly improved by antireflective coatings. Recently, there has been an effort to develop several micrometer thick, low stress, amorphous carbon films for this purpose. To date, films of no more than 1 to 2 μm have been reported in the literature. In this paper we report the deposition of low stress carbon films which are over 5 μm thick and are effective antireflective coatings at wavelengths of up to Λ = 43 μm. Minimal stress, a requirement for good adhesion, was achieved with a chemical vapor deposition process (CVD) by controlling the hydrocarbon partial pressure (2.2 mTorr) and by doping the carbon film with nitrogen.
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References
R. S. Yalamanchi and G. K. M. Thutupalli, Thin Solid Films 164, 103 (1988).
H. Tsai and D. B. Bogy, J. Vac. Sci. Technol. A 5 (6), 3287 (1987).
A. Bubenzer, B. Dischler, G. Brant, and P. Koidl, J. Appl. Phys. 54 (8), 4590 (1983).
G. H. Rieke, M. W. Werner, R. I. Thompson, E. E. Becklin, W. F. Hoffman, J. R. Houck, F. J. Low, W. A. Stein, and F. C. Witteborn, Science 231, 807 (1986).
R. E. Hummel, Electronic Properties of Materials (Springer-Verlag, New York, 1985), p. 131.
K. Enke, Third Topical Meeting on Optical Interference Coatings, Monterey, CA (1984).
A. Bubenzer, B. Dischler, G. Brant, and P. Koidl, Opt. Eng. 23 (2), 153 (1984).
B. Dischler, A. Bubenzer, P. Koidl, and R. E. Sah, Third Optical Meeting on Optical Interference Coatings, Monterey, CA (1984).
K. Enke, Thin Solid Films 80, 227 (1981).
J. C. Angus and C. C. Heyman, Science 241, 913 (1988).
J. H. Kaufman, S. Metin, and D. D. Saperstein, Phys. Rev. B 39 (18), 13053 (1989).
W. L. Hansen and E. E. Haller, in Nuclear Radiation Detector Materials, edited by E. E. Haller, H. W. Kraner, and W. A. Higinbotham (Mater. Res. Soc. Symp. Proc. 16, Elsevier Science Publishing, New York, 1983), p. 1.
E. D. Palik, Handbook of Optical Constants of Solids (Academic Press, New York, 1985).
F. Tuinstra and J. L. Koening, J. Chem. Phys. 53, 1126 (1970).
D. Nir, Thin Solid Films 146, 27 (1987).
R. Memming, H. J. Tolle, and P. E. Wierenga, Thin Solid Films 143, 31 (1986).
H-X. Han and B. J. Feldman, Solid State Commun. 65, 921 (1988).
S. M. Ojha, H. Norstrom, and D. McCulluch, Thin Solid Films 60, 213 (1979).
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Metin, S., Kaufman, J.H., Saperstein, D.D. et al. Amorphous carbon antireflective coatings in the 10 to 50 μm region of the far-IR. Journal of Materials Research 9, 396–400 (1994). https://doi.org/10.1557/JMR.1994.0396
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DOI: https://doi.org/10.1557/JMR.1994.0396