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Identification of hydrocarbon precursors to diamond in chemical vapor deposition using carbon monoxide reagent

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Abstract

Diamond films were grown by microwave plasma-assisted chemical vapor deposition using mixtures of 13CH4 and CO. Mass spectrometry was used to identify CO, CH4, and C2H2 as the stable gaseous products in the reactor exhaust gas. By comparing gaseous 13C compositions with that of the diamond films, the efficiency of diamond growth from methane (possibly via the methyl radical) is found to be about two orders of magnitude higher than that for carbon monoxide. Most of the diamond that is formed from the CO reagent results from the conversion of CO to hydrocarbons. The conversion of CO to hydrocarbons is attributed to activation of CO by high-energy electrons in the plasma.

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Authors and Affiliations

  1. Chemistry Division, Research Department, Naval Air Warfare Center, Weapons Division, California, 93555–6001, China Lake, USA

    Curtis E. Johnson & Wayne A. Weimer

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  1. Curtis E. Johnson
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  2. Wayne A. Weimer
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Johnson, C.E., Weimer, W.A. Identification of hydrocarbon precursors to diamond in chemical vapor deposition using carbon monoxide reagent. Journal of Materials Research 8, 2245–2249 (1993). https://doi.org/10.1557/JMR.1993.2245

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  • DOI: https://doi.org/10.1557/JMR.1993.2245

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