Abstract
The optical band gap, density, and hydrogen content of diamond-like carbon films have been controllably varied by rf biasing the substrate in an ECR discharge of pure methane. The optical band gap varied from 2.7 to 1.2 eV, the density from 1.4 to 2.2 g/cm3, and the atomic fraction of hydrogen from 50 to 5%. The range of measured values is in agreement with those predicted by both the random covalent network and defected graphite models.
Similar content being viewed by others
References
J. Angus, P. Koidl, and S. Domitz, in Plasma Deposited Thin Films, edited by J. Mort and F. Jansen (CRC Press, Inc., Boca Raton, FL, 1986).
R. C. DeVries, in Annual Review Materials Science, edited by R. A. Huggins, J. A. Giordmaine, and J. B. Wachtman, Jr. (Annual Reviews Inc., 1987), pp. 161–187.
C. Deshpanev and R. J. Bunshah, Vac. Sci. Technol. A 7 (3), 2294 (1989).
R. Messier, A. R. Badzian, T. Badzian, K. E. Spear, P. Bachmann, and R. Roy, Thin Solid Films 153, 1 (1987).
B. Spitsyn, L. Bouilov, and B. Derjaguin, in Progress in Crystal Growth and Characterization, edited by J. Mullin (Pergamon Press, Oxford, 1988), p. 79.
G. Amaratunga, A. Putnis, K. Clay, and W. Milne, Appl. Phys. Lett. 55 (7), 634 (1989).
Y. Liou, A. Inspektor, R. Weimer, and R. Messier, Appl. Phys. Lett. 55 (7), 631 (1989).
W.L. Hsu, D.M. Tung, E.A. Fuchs, and K.F. McCarty, Appl. Phys. Lett. 55 (26), 2739 (1989).
L. Holland and S. M. Ojha, Thin Solid Films 38, L17–L19 (1976).
A. Bubenzer, B. Dischler, G. Brandt, and P. Koidl, J. Appl. Phys. 54, 4590 (1983).
M. A. Tamor, J. A. Haire, C. H. Wu, and K. C. Hass, Appl. Phys. Lett. 54 (2), 123 (1989).
S.R. Kasi, H. Kang, and J.W. Rabalais, J. Chem. Phys. 88 (9), 5914 (1988).
A. H. Deutchman and R. J. Partyka, Industrial Heating, July 12 (1988).
M. Matsuoka and K. Ono, Appl. Phys. Lett. 50 (26), 1864 (1987).
S. Matsuo and M. Kiuchi, Jpn. J. Appl. Phys. 22 (4), L210 (1983).
J. Bredas and G. J. Street, Phys. C. 18, L651 (1985).
J. Robertson and E. O’Reilly, Phys. Rev. B 35 (6), 2946 (1987).
M. A. Tamor and C. H. Wu, J. Appl. Phys. 67 (2), 1007 (1990). 19J. Angus and F. J. Jansen, Vac. Sci. Technol. A 6 (3), 1778 (1988).
R. Messier (private communication).
R. Livi (private communication).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Varhue, W., Pastel, P. Diamond-like carbon films prepared by rf substrate biasing in an ECR discharge. Journal of Materials Research 5, 2441–2444 (1990). https://doi.org/10.1557/JMR.1990.2441
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1990.2441