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Optical propagation loss reduction in ZnO thin films under CO2 laser treatment

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Abstract

The reduction of propagation losses in ZnO thin film waveguides for integrated optics after CO2 laser treatment is studied. RHEED patterns show that the measured decrease of optical losses is accompanied by an increase of ordering after the laser treatment. The reordering depends on the initial film state and the laser irradiation conditions.

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Authors and Affiliations

  1. Dipartimento di Energetica, Univeersità Roma I, Via A. Scarpa 16, 00161, Roma, Italy

    M. Bertolotti, M. V. Laschena & M. Rossi

  2. GNEQP, GNSM, CNEQP, Italy

    M. Bertolotti, M. V. Laschena & M. Rossi

  3. Dipartimento di Elettronica, Università Roma I, Italy

    A. Ferrari

  4. GNEQP, GNSM, CNEQP, Italy

    A. Ferrari

  5. Changchun Institute of Optics and Fine Mechanics, Academia Sinica, People’s Republic of China

    L. S. Qian

  6. Dipartimento di Fisica, Università Bari, Via Amendola 163, Bari, Italy

    F. Quaranta & A. Valcntini

Authors
  1. M. Bertolotti
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  2. M. V. Laschena
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  3. M. Rossi
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  4. A. Ferrari
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  5. L. S. Qian
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  6. F. Quaranta
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  7. A. Valcntini
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Bertolotti, M., Laschena, M.V., Rossi, M. et al. Optical propagation loss reduction in ZnO thin films under CO2 laser treatment. Journal of Materials Research 5, 1929–1932 (1990). https://doi.org/10.1557/JMR.1990.1929

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  • DOI: https://doi.org/10.1557/JMR.1990.1929

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