Abstract
The exposure response of high resolution oxide resist materials has been examined under high intensity irradiation conditions (∼1 ⊠ 105 A/cm2) to determine the relationships among film characteristics, exposure requirements, and ultimate resolution, and to explore further the processes responsible for ablative exposure. Amorphous films of Al2O3, Y2O3, Sc2O3, 3Al2O3·2SiO2, and MgO·Al2O3 were deposited by rf sputtering onto substrates cooled to –196°C and found to require an exposure dose of approximately 5 ⊠ 103 C/cm2 to complete exposure. Amorphous film structure was found to be necessary to achieve rapid removal of material during exposure. Material properties also found to influence irradiation response and help guide the selection of new materials included ionic character, heat of formation, and melting point. Film thickness was found to influence strongly both exposure requirements and resolution, an optimum thickness occurring at approximately 90 nm in amorphous Al2O3. The dose requirement in 90 nm thick amorphous Al2O3 was determined to be 2.5 ⊠ 103 C/cm2, which is two to three orders of magnitude lower than that of oxide films produced by other techniques. Resolution of the rf sputtered oxide films allowed the production of 5.0 nm holes on 8.1 nm centers. A dedicated STEM was used for exposure studies as well as imaging, microdiffraction analysis, and monitoring of the transmitted beam current, and allowed a qualitative model of the exposure process in rf sputtered oxide resists to be developed.
Similar content being viewed by others
References
M. E. Mochel, C. J. Humphreys, J. A. Eades, J. M. Mochel, and A. M. Petford, Appl. Phys. Lett. 42 (4), 392–394 (1983).
M. E. Mochel, J. A. Eades, M. Metzger, J. I. Meyer, and J. M. Mochel, Appl. Phys. Lett. 44 (5), 502–504 (1984).
J. L. Hollenbeck and R. C. Buchanan (Proc. Mater. Res. Soc. Symp.) (Materials Research Society, Pittsburgh, PA, 1986), Vol. 72, pp. 289–294.
A. N. Broers, in ACS Symposium Series 266, Materials for Microlithography, edited by L. F. Thompson, C. G. Willson, and J. M. J. Frechet, 11–38 (1984).
D. C. Joy, Microelectron. Eng. 1, 103–119 (1983).
D. F. Kyser, J. Vac. Sci. Technol. B1 (4), 1391–1397 (1983).
N. Samoto, R. Shimizu, H. Hashimoto, I. Adesida, E. Wolf, and S. Namba, J. Vac. Sci. Technol. B1 (4), 1367–1371 (1983).
M. S. Isaacson and A. J. Muray, Proceedings of the IEEE, edited by E. D. Wolf, 71 (5), 591 (1983).
E. Kratschmer and M. Isaacson, J. Vac. Sci. Technol. B4 (1), 361–364 (1986).
R. E. Howard, W. J. Skocpol, and L. D. Jackel, Ann. Rev. Mater. Sci. 16, 441–466 (1986).
S. Pope, M. S. Thesis, University of Illinois, 1984.
S. D. Berger, D. McMullan, J. M. Macaulay, and L. M. Brown, Inst. Phys. Conf. Ser. No. 90: Chap. 4, 93–96 (1987).
M. E. Mochel, C. J. Humphreys, J. M. Mochel, and J. A. Eades, Proc. of the 41st Annual Meeting of the Electron Microscopy Society of America, 100–101 (1983).
S. D. Berger, I. G. Salisbury, R. H. Milne, D. Imeson, and C. J. Humphreys, Phil. Mag. B 55 (3), 341–358 (1987).
I. G. Salisbury, R. S. Timsit, S. D. Berger, and C. J. Humphreys, Appl. Phys. Lett. 45 (12), 1289–1291 (1984).
J. L. Hollenbeck and R. C. Buchanan, Proc. of the 45th Annual Meeting of the Electron Microscopy Society of America, 396–397 (1987).
J. L. Hollenbeck and R. C. Buchanan, “Oxide Thin Films for Nanometer Scale Electron Beam Lithography,” to be published in ACS Symposium Proceedings, Ceramic Thin and Thick Films (1989).
S. D. Berger, J. M. Macaulay, and L. M. Brown, Phil. Mag. Lett. 56 (5), 179–185 (1987).
M. L. Knotek and P. J. Feibelman, Phys. Rev. Lett. 40 (14), 964–967 (1978).
M. L. Knotek and P. J. Feibelman, Surf. Sci. 90, 78–90 (1979).
J. Cazaux, J. Appl. Phys. 59 (5), 1418–1430 (1986).
A. N. Broers, J. Cuomo, J. Harper, W. Molzen, R. Laibowitz, and M. Pomerants, Congress on Electron Microscopy, III, 343–354 (1978).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Hollenbeck, J.L., Buchanan, R.C. Oxide thin films for nanometer scale electron beam lithography. Journal of Materials Research 5, 1058–1072 (1990). https://doi.org/10.1557/JMR.1990.1058
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1990.1058