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Sol-gel processing of strontium-barium niobate ferroelectric thin film

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Abstract

Ferroelectric thin film of strontium-barium niobate was successfully fabricated by the sol-gel technique. The films were made on several types of substrate, including quartz, single crystal silicon wafer, and glass slides. The processing temperature was as low as 700 °C. The film obtained with thickness of 3000 Å was dense, transparent, and showed excellent ferroelectricity.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, University of California, Los Angeles, 90024, California, USA

    Ren Xu, Yuhuan Xu, Ching Jih Chen & John D. Mackenzie

Authors
  1. Ren Xu
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  2. Yuhuan Xu
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  3. Ching Jih Chen
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  4. John D. Mackenzie
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Xu, R., Xu, Y., Chen, C.J. et al. Sol-gel processing of strontium-barium niobate ferroelectric thin film. Journal of Materials Research 5, 916–918 (1990). https://doi.org/10.1557/JMR.1990.0916

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  • DOI: https://doi.org/10.1557/JMR.1990.0916

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