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Dependence of the properties of laser deposited tin oxide films on process variables

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Abstract

In this paper we report the influence of process variables, viz., substrate temperature, oxygen partial pressure, and external electric field bias, on phase precipitation and microstructure of tin oxide films as revealed by small-angle x-ray diffraction and conversion electron Mössbauer spectroscopy.

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Authors and Affiliations

  1. Department of Physics, University of Poona, Pune, 411 007, India

    V. P. Godbole, R. D. Vispute, S. M. Chaudhari, S. M. Kanetkar & S. B. Ogale

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  1. V. P. Godbole
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  2. R. D. Vispute
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  3. S. M. Chaudhari
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  4. S. M. Kanetkar
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  5. S. B. Ogale
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Godbole, V.P., Vispute, R.D., Chaudhari, S.M. et al. Dependence of the properties of laser deposited tin oxide films on process variables. Journal of Materials Research 5, 372–377 (1990). https://doi.org/10.1557/JMR.1990.0372

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  • DOI: https://doi.org/10.1557/JMR.1990.0372

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