Abstract
A layer of amorphous Mo–Al alloy is formed by ion-assisted solid-state interdiffusion reaction of a Mo/Al bilayer. Xe ion irradiation at 200 °C enhances the long-range diffusion of the dominant moving species while the formation of equilibrium compounds remains inhibited. The idea of using the temperature-dependent ion mixing at intermediate temperatures to promote a solid-state amorphization reaction opens the possibility of growing an amorphous phase in a system where both compound formation and interdiffusion are difficult
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References
R. B. Schwarz and W. L. Johnson, Phys. Rev. Lett. 51, 415 (1983).
W.L. Johnson, Prog. Mater. Sci. 30, 81 (1986).
E. Ma, W. J. Meng, W. L. Johnson, M-A. Nicolet, and M. Nathan, Appl. Phys. Lett. 53, 2033 (1988).
see K. Tao, C.A. Hewett, S.S. Lau, Ch. Buchal, and D.B. Poker, Appl. Phys. Lett. 50, 1343 (1987), and references therein.
J.W. Mayer, B.Y. Tsaur, S.S. Lau, and L.S. Hung, Nucl. Instrum. Methods 182/183, 1 (1981).
W. L. Johnson, Y-T. Cheng, M. Van Rossum, and M-A. Nicolet, Nucl. Instrum. Meth. Phys. Res. B 7/8, 657 (1985); B.X. Liu, E. Ma, L.J. Huang, and J. Li, Nucl. Instrum. Meth. Phys. Res. B 19/20, 682 (1987).
R. N. Singh, D. M. Brown, M. J. Kim, and G. A. Smith, J. Appl. Phys. 58, 12 (1985), and references therein; and also E. G. Colgan, Ph.D. Thesis, Cornell University, 1987.
E. Ma, A. J. Brunner, T. W. Workman, C. W. Nieh, X-A. Zhao, and M-A. Nicolet, Mater. Res. Soc. Symp. Proc. 100, 75 (1988).
E. G. Colgan and J. W. Mayer, J. Mater. Res. 1, 786 (1986).
L. S. Hung, E. G. Colgan, and J. W. Mayer, Nucl. Instrum. Meth. Phys. Res. B 19/20, 654 (1987).
B. Y. Tsaur, J. W. Mayer, M-A. Nicolet, and K. N. Tu, in Ion Beam Metallurgy, edited by CM. Preece and J.K. Hirvonen (Materials Research Society, Pittsburgh, PA, 1980), p. 142.
Y-T. Cheng, X-A. Zhao, T. Banwell, T. W. Workman, M-A. Nicolet, and W. L. Johnson, J. Appl. Phys. 60, 2515 (1986).
L. S. Hung, J. W. Mayer, C. S. Pai, and S. S. Lau, J. Appl. Phys. 58, 1527 (1985); L. S. Hung, W. Xia, D. B. Poker, M. Fernandes, K. Tao, S. S. Lau, and J. W. Mayer, J. Appl. Phys. 64, 2354 (1988).
K. Affolter, X-A. Zhao, and M-A. Nicolet, J. Appl. Phys. 58, 3087 (1985).
M. O. Aboelfotoh, A. Alessandrini, and F. M. d’Heurle, Appl. Phys. Lett. 49, 1242 (1986); and M. O. Aboelfotoh, H. M. Tawancy, and F. M. d’Heurle, Appl. Phys. Lett. 50, 1453 (1987).
L. S. Hung and J. W. Mayer, Thin Solid Films 123, 135 (1985).
K. Maex, R. F. De Keersmaecker, M. Van Rossum, and W. F. van der Weg, Mater. Res. Soc. Symp. Proc. 100, 63 (1988).
M-A. Nicolet and S. S. Lau, in VLSI Microstructure Science, edited by N. G. Einspruch (Academic Press, New York, 1983), Vol. 6, Chap. 6.
K. Kohlof, S. Mantl, and B. Stritzker, Mater. Res. Soc. Symp. Proc. 74, 443 (1987).
K. Maex, R. F. De Keersmaecker, M. Van Rossum, W. F. van der Weg, and G. Krooshof, Nucl. Instrum. Meth. Phys. Res. B 19/20, 731 (1987).
K. Holloway and R. Sinclair, J. Appl. Phys. 61, 1359 (1987); I. J. M. M. Raaijmakeres, A. H. Reader, and P. H. Oosting, J. Appl. Phys. 63, 2790 (1988).
A. H. Van Ommen, M. F. C. Willemsen, P. R. Boudewun, and A. H. Reader, Mater. Res. Soc. Symp. Proc. 54, 221 (1986).
M. Y. Tsai, C. S. Peterson, F. M. d’Heurle, and V. Maniscalco, Appl. Phys. Lett. 37, 295 (1980).
T. Inada, K. Kishi, S. Miyagi, and H. Kahinuma, Nucl. Instrum. Methods 218, 567 (1983).
K. Pampus, J. Bøttiger, B. Torp, and K. Samwer, Mater. Sci. Eng. 97, 97 (1988).
R. S. Averback, H. Hahn, and F-R. Ding, J. Less-Comm. Metals 140, 267 (1988); Fu-rong Ding, R. S. Averback, and H. Hahn, J. Appl. Phys. 64, 1785 (1988).
R. S. Averback and H. Hahn, Phys. Rev. B 37, 10383 (1988).
K-T. Ho, D. M. Scott, and M-A. Nicolet, Thin Solid Films 127, 171 (1985).
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Ma, E., Nieh, C.W., Nicdlet, MA. et al. Solid-state amorphization reaction by temperature-dependent ion mixing. Journal of Materials Research 4, 1299–1302 (1989). https://doi.org/10.1557/JMR.1989.1299
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DOI: https://doi.org/10.1557/JMR.1989.1299