Abstract
A method has been devised for preparing lateral Ni–GaAs diffusion couples for transmission electron microscopy investigations. By annealing diffusion couples in situ in a hot stage, the growth of a ternary phase has been observed in the microscope, and shows parabolic time dependence of the growth. In the temperature range of 200–300 °C, Ni is the predominant diffusing species in the ternary phase while Ga and As are essentially immobile. The experimental results are compared with previous investigations of the reactions of Ni thin films with bulk GaAs.
Similar content being viewed by others
References
C. J. Palmstrøm and D. V. Morgan, in Gallium Arsenide Materials, Devices and Circuits, edited by M. J. Howes and D. V. Morgan (Wiley–Interscience, New York, 1985), Chap. 6.
I. H. Scobey, C. A. Wallace, and R. C. C. Ward, J. Appl. Cryst. 6, 425 (1973).
M. Ogawa, Thin Solid Films 70, 181 (1980).
T. G. Finstad and J. S. Johannessen, presented at the 10th Nordic Semiconductor Meeting, Elsinore, Denmark, June 1982.
L. J. Chen and Y. F. Hsieh, in Proceedings of the 41st Annual Meeting of EMSA, edited by G. W. Bailey (San Francisco Press, San Francisco, 1983), p. 156.
L. J. Chen and Y. F. Hsieh, Mater. Res. Soc. Symp. Proc. 31, 165 (1984).
A. Lahav and M. Eizenberg, Appl. Phys. Lett. 45, 256 (1984).
A. Lahav and M. Eizenberg, Appl. Phys. Lett. 46, 430 (1985).
A. Lahav, M. Eizenberg, and Y. Komen, Mater. Res. Soc. Symp. Proc. 37, 641 (1985).
T. Sands, V. G. Keramidas, J. Washburn, and R. Gronsky, Appl. Phys. Lett. 48, 402 (1986).
A. Lahav, M. Eizenberg, and Y. Komen, J. Appl. Phys. 60, 991 (1986).
S. H. Chen, L. R. Zheng, J. C. Barbour, E. C. Zingu, L. S. Hung, C. B. Carter, and J. W. Mayer, Mater. Lett. 2, 469 (1984).
S. H. Chen, L. R. Zheng, C. B. Carter, and J. W. Mayer, J. Appl. Phys. 57, 258(1985).
S. H. Chen, J. C. Barbour, L. R. Zheng, C. B. Carter, and J. W. Mayer, Mater. Res. Soc. Symp. Proc. 37, 635 (1985).
S. H. Chen, Z. Elgat, J. C. Barbour, L. R. Zheng, J. W. Mayer, and C. B. Carter, Ultramicroscopy 18, 297 (1985).
S. H. Chen, C. B. Carter, C. J. Palmström, and T. Ohashi, Appl. Phys. Lett. 48, 803 (1986).
S. H. Chen, C. B. Carter, C. J. Palmström, and T. Ohashi, Mater. Res. Soc. Symp. Proc. 54, 361 (1986).
J. I. Goldstein, in Introduction to Analytical Electron Microscopy, edited by J. J. Hren, J. I. Goldstein, and D. C. Joy (Plenum, New York, 1979), Chap. 3.
E. S. Dana and E. F. William, Dana’s Manual of Mineralogy, revised by C. S. Hurlburt, Jr. (Wiley, New York, 1953), 16th ed., p. 213.
S. H. Chen, Ph. D. thesis, Cornell University, Ithaca, New York (1985).
M. S. Weathers, C. A. Goodrich, J. M. Bird, and J. A. Hunt, Am. Mineral. (to be published).
Y. Kouh Simpson, private communication (1984).
G. Wirmark, T. Thorvaldsson, and H. Norden, Inst. Phys. Conf. Ser. No. 68, 71 (1984).
J. C. Barbour, K. Sickafus, and M. Nastasi, J. Vac. Sci. Technol. A 5, 1895 (1985).
J. J. Hren, in Ref. 18, Chap. 18.
E. C. Zingu, Ph.D. thesis, University of Western Cape, Bellville, South Africa (1985).
G. V. Kidson, J. Nucl. Mater. 3, 21 (1961).
H. Schmalzried, Solid State Reactions (Verlag Chemie, Berlin, 1981), Chap. 5, p. 89.
J. I. Goldstein, D. E. Newbury, P. Echlin, D. C. Joy, C. Fiori, and E. Lifshin, Scanning Electron Microscopy and X-ray Microanalysis (Plenum, New York, 1981), Chap. 14.
ASTM data card #31-900.
ASTM data card #7-150.
H. Hansen and K. Anderko, Constitution of Binary Alloys (McGraw-Hill, New York, 1958), pp. 1039–1042.
R. P. Elliott, Constitution of Binary Alloys, First Supplement (McGraw–Hill, New York, 1965), p. 674.
F. A. Shunk, Constitution of Binary Alloys, Second Supplement (McGraw-Hill, New York, 1969), p. 555.
W. B. Pearson, A Handbook of Lattice Spacings and Structures Metals and Alloys (Pergamon, London, 1964), Vol. 1.
W. B. Pearson, A Handbook of Lattice Spacings and Structures Metals and Alloys (Pergamon, London, 1967), Vol. 2.
Structure Reports, Vol. 10 (1945).
E. S. Makaro, Izv. Akad. Nauk SSSR, Otd. Khim. Nauk. 6, 569 (1945).
A. G. Guy and H. Oikawa, Trans. TMS AIME 245, 2293 (1969).
L. R. Zheng, L. S. Hung, and J. W. Mayer, Mater. Res. Soc. Symp. Proc. 37, 579 (1985).
U. Gösele and K. N. Tu, J. Appl. Phys. 53, 3252 (1982).
L. R. Zheng, Ph. D. thesis, Cornell University, Ithaca, New York (1985).
H. Schmalzried, Ref. 28, Chap. 5, p. 62.
P. G. Shewmom, Diffusion in Solid (McGraw-Hill, New York, 1963), p. 119.
C. P. Palmstrøm, unpublished data (1985).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Chen, S.H., Carter, C.B. & PalmstrΦm, C.J. Lateral diffusion in Ni–GaAs couples investigated by transmission electron microscopy. Journal of Materials Research 3, 1385–1396 (1988). https://doi.org/10.1557/JMR.1988.1385
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1988.1385