Abstract
The grazing x-ray reflectrometry technique was used as a way to study modifications in metallic multilayers induced by ion-beam irradiation. Due to the high sensitivity of the technique, short-range atomic displacements of an atom A in a layer B can be detected so that the first stages of ion-beam mixing can be investigated. The rate of mixing is measured and the compound A1−xBx formed at the layers’ interfaces is characterized.
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References
L. L. Chang, A. Segmüller, and L. Esaki, Appl. Phys. Lett. 28, 39 (1976).
M. Pomerantz and A. Segmüller, Thin Solid Films 68, 33 (1980).
L. Névot, B. Pardo, and J. Corno, Rev. Phys. Appl. 23(10) (in press).
A. Wagendristel, Z. Naturforsch. 30a, 1648 (1975).
B. Park, F. Spaepen, J. M. Poate, and D. C. Jacobson, Mater. Res. Soc. Symp. Proc. 74, 493 (1987).
A. Traverse, M. G. Le Boité, L. Névot, B. Pardo, and J. Corno, Appl. Phys. Lett 51, 1907 (1987).
R. S. Averback, J. L. Thompson, and L. E. Rehn, Mater. Res. Soc. Symp. Proc. 27, 25 (1984).
J. Chaumont, F. Lalu, M. Salomé, A. M. Lamoise, and H. Bernas, Nucl. Instrum. Methods 189, 193 (1980).
M. Born and E. Wolf, Principle of Optics (Pergamon, New York, 1965), 3rd revised ed., p. 51.
L. Névot and P. Croce, Rev. Phys. Appl. 15, 761 (1980).
B. Pardo and J. M. André, Rev. Phys. Appl. 23(10) (in press).
Synthetic Modulated Structures, edited by L. L. Chang and B. C. Giessen (Academic, New York, 1985); Metallic Superlattices. Artificially Structured Materials, edited by T. Shinjo and T. Takada (Elsevier, New York, 1987).
M. P. Bruijn, P. Chakralorty, H. van Hessen, J. Verhoeven, M. J. van der Wiel, and W. J. Bartels, SPIE 563, 182 (1985).
H. H. Andersen and H. L. Bay, in Topics in Applied Physics (Springer, New York, 1981), p. 145.
M. G. Le Boité, A. Traverse, H. Bernas, C. Janot, and J. Chevrier, Mater. Lett. 6, 173 (1988).
A. Traverse, M. G. Le Boité, and G. Martin, Europhys. Lett. (submitted for publication).
M. G. Le Boité, A. Traverse, L. Névot, B. Pardo, and J. Corno, Nucl. Instrum. Methods B 29, 653 (1988).
B. Y. Tsaur, S. S. Lau, L. S. Hung, and J. W. Mayer, Nucl. Instrum. Methods 183/184, 67 (1981).
M. Hansen, Constitution of Binary Alloys (McGraw-Hill, New York, 1958).
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Le Boité, M.G., Traverse, A., Névot, L. et al. Characterization of ion-beam mixed multilayers via grazing x-ray reflectometry. Journal of Materials Research 3, 1089–1096 (1988). https://doi.org/10.1557/JMR.1988.1089
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DOI: https://doi.org/10.1557/JMR.1988.1089