Abstract
The structure of sputtered Mo/Fe superlattices of periodicities 9 to 30 Å grown at a substrate temperature of 300 K at various pressures and levels of low-energy ion bombardment have been studied using x-ray diffraction. The samples show the growth of an amorphous phase below 17 Å periodicity and a crystalline phase above 21 Å, with mixed phases in between. Limited ion bombardment reduces the coherency in the growth direction in the crystalline phase, while heavy bombardment sufficient to promote significant mixing acts to improve the coherency, but not to the level observed in films with no bombardment. The relative intensities of the average lattice spacing reflection and its most intense satellite give the composition profile change due to the ion mixing. Some ion bombardment of the iron layer markedly improves the reflectance for x-rays at both low and high angles near the Bragg peak due to the average lattice spacing.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
I. K. Schuller and C. M. Falco, in Modulated Structures 1979, American Institute of Physics Conference Proceedings No. 53 (American Institute of Physics, New York, 1979), p. 417.
I. K. Schuller, Phys. Rev. Lett. 44, 4597 (1980).
E. M. Gyorgy, C. B. McWhan, J. F. Dillon, Jr., L. R. Walker, and J. V. Washzczak, Phys. Rev. B 25, 6739 (1982).
P. F. Garcia and A. Suna, J. Appl. Phys. 54, 2000 (1983).
P. F. Garcia, A. D. Meinhaldt, and A. Suna, Appl. Phys. Lett. 47, 178 (1985).
Y. Endoh, K. Kawaguchi, N. Hosoito, T. Shinjo, T. Takada, Y. Fujii, and T. Ohnishi, J. Phys. Soc. Jpn. 53, 3481 (1984).
N. K. Jaggi, L. H. Schwartz, H. K. Wong, and J. B. Ketterson, J. Magn. Magn. Mater. 49, 1 (1985).
M. Kahn, C. S. L. Chun, G. P. Felcher, M. Grimsditch, A. Kueny, C. M. Falco, and I. K. Schuller, Phys. Rev. B 27, 7186 (1987).
D. B. McWhan, M. Gurvitch, I. M. Rowell, and L. R. Walker, J. Appl. Phys. 54, 3886 (1983).
B. Window, J. Appl. Phys. 68, 1080 (1988).
T. Shinjo, K. Kawaguchi, R. Yamamoto, N. Hosoito, and T. Takada, Thin Solid Films 125, 273 (1985).
C. M. Falco, W. R. Bennett, and A. Boufelfel, Dynamical Phenomena at Surfaces, Interfaces and Superlattices (Springer, New York, 1984).
J. A. Thornton, Ann. Rev. Mater. Sci. 7, 239 (1977).
J. A. Thornton, J. Vac. Sci. Technol. A 4, 3059 (1986).
B. Window, F. Sharpies, and N. Savvides, J. Vac. Sci. Technol. A (to be published).
A. H. Eltoukhy and J. E. Greene, Appl. Phys. Lett. 33, 343 (1978).
A. H. Eltoukhy and J. E. Greene, J. Appl. Phys. 50, 505 (1979).
A. H. Eltoukhy and J. E. Greene, J. Appl. Phys. 51, 4444 (1980).
B. Window and N. Savvides, J. Vac. Sci. Technol. A 4, 196 (1987).
B. Window and F. Sharpies, J. Vac. Sci. Technol. A 3, 10 (1985).
S. Eicher and W. D. Westwood, presented at 34th Annual Symposium of the American Vacuum Society, October 1987 (to be published in J. Vac. Sci. Technol. A).
E. Chason, H. Kondo, T. Mizoguchi, R. C. Camarata, F. Spalpen, B. Window, J. Dunlop, and R. K. Day, Mater. Res. Symp. Proc. 58, 69 (1986).
T. Egami and Y. Waseda, J. Non-Cryst. Solids 64, 113 (1984).
S. H. Liou and C. L. Chien, Phys. Rev. B 35, 2443 (1987).
B. D. Cullity, Elements of X-ray Diffraction (Addison-Wesley, Reading, MA, 1978), 2nd ed.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Window, B., Sharples, F. Effect of ion bombardment during the low-mobility growth of metallic superlattices. Journal of Materials Research 3, 856–861 (1988). https://doi.org/10.1557/JMR.1988.0856
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1988.0856