Abstract
The Taguchi method is used herein to optimize the time-modulated chemical vapor deposition (TMCVD) process. TMCVD can be used to deposit smooth, nanocrystalline diamond (NCD) coatings onto a range of substrate materials. The implementation of the Taguchi method to optimize the TMCVD process can save time, effort, and money. The Taguchi method significantly reduces the number of experiments required to optimize a fabrication process. In this study, the effect of five TMCVD process parameters is investigated with respect to five key factors of the as-grown samples. Each parameter was varied at four different values (experimental levels). The five key factors, taking into consideration the experimental levels, were optimized after performing only 16 experiments. The as-grown films were characterized for hardness, quality, surface roughness, and microstructure using scanning electron microscopy, Raman spectroscopy, surface profilometry, and Vickers hardness testing.
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References
P.W. May, Diamond Thin Films: A 21st Century Material, Philos. Trans. R. Soc. London, Ser. A, 2000, 358, p 473–495
M.N.R. Ashfold, P.W. May, C.A. Rego, and N.M. Everitt, Thin Film Deposition of Diamond, Chem. Soc. Rev., 1994, 23, p 21–30.
D.M. Gruen, L. Shengzhong, A.R. Krauss, J. Luo, and X. Pan, Fullerences as Precursors for Diamond Growth, Appl. Phys. Lett., 1994, 64, p 1502–1504.
D. Zhou, T.G. McCauley, L.C. Qin, A.R. Krauss, and D.M. Gruen, Synthesis of Nanocrystalline Diamond from Ar-CH4 Mixtures, J. Appl. Phys., 1998, 83(1), p 540–543
D.M. Gruen, Review of Methods of Depositing Thin Film Diamond to Substrates, Annu. Rev. Mater. Sci. 1999, 29, p 211–259
T.M. McCauley, D.M. Gruen, and A.R. Krauss, Synthesis of Diamond Thin Films from Ar-CH4 Mixtures, Appl. Phys. Lett., 1998, 73(12), p 1646–1648
D. Zhou, A.R. Krauss, L.C. Qin, T.G. McCauley, D.M. Gruen, T.D. Corrigan, R.P.H. Chang, and H. Gnaser, Synthesis and Electron Field Emission NCD Thin Films Grown from Ar-CH4 Precursors, J. Appl. Phys., 1997, 82(9), p 4546–4550
M.D. Fries and Y.K. Vohra, Characterization of Nanocrystalline Diamond Thin Films Grown from Plasma, Diamond Relat. Mater., 2005, in press
S.A. Catledge, P. Baker, J.T. Tarvin, and Y.K. Vohra, Multilayer NCD Films Studied by Laser Reflectance Spectroscopy, Diamond Relat. Mater., 2000, 9, p 1512–1517
Y.F. Zhang, F. Zhang, Q.J. Gao, X.F. Peng, and Z.D. Lin, Role of Ar Addition in the HFCVD System, Diamond Relat. Mater., 2001, 10, p 1523–1527
X.S. Sun, N. Wang, W.J. Zhang, H.K. Woo, X.D. Han, I. Bello, C.S. Lee, and S.T. Lee, Studies of Various Species Added to Microwave Plasma to Form Nanocrystalline Diamond, J. Mater. Res. 1999, 14(8), p 3204–3213.
D.M. Bhusari, J.R. Yang, T.Y. Wang, K.H. Chen, S.T. Lin, and L.C. Chen, Deposition of Diamond Films from Precursor Gases, Mater. Lett. 1998, 36, p 279–283
F.H. Sun, Z.M. Zhang, M. Chen, and H.S. Shen, Characterization and Deposition of Diamond Thin Films to Various Substrates, J. Mater. Process. Technol., 2002, 129, p 435–440
H. Yagi, T. Ide, H. Toyota, and Y. Mori, Effects of Additions of Gases on the Deposition of NCD Thin Films, J. Mater. Res., 1998, 13(6), p 1724–1730.
J. Lee, B. Hong, R. Messier, and R.W. Collins, Nucleation and Bulk Film Growth Kinetics of NCD, Appl. Phys. Lett., 1996, 69(12), p 1716–1718
T. Xu, S. Yang, J. Lu, Q. Xue, J. Li, W. Guo, and Y. Sun, Characterization of Nanocrystalline Thin Films Implanted with Nitrogen Ions, Diamond Relat. Mater., 2001, 10, p 1441–1447
S.P. McGinnis, M.A. Kelly, S.B. Hagstrom, and R.L. Alvis, Observations of Nanocrystalline Diamond Films Deposited Using Ion-Assisted Microwave Plasma, J. Appl. Phys., 1996, 79(1), p 170–174
H. Yoshikawa, C. Morel, and Y. Koga, Synthesis of NCD Films Using Microwave Plasma CVD, Diamond Relat. Mater., 2001, 10, p 1588–1591
L.C. Chen, P.D. Kichambare, K.H. Chen, J.-J. Wu, J.R. Yang, and S.T. Lin, Growth of NCD Films and Spectroscopic Study of Growth, J. Appl. Physics, 2001, 89(1), p 753–759
S. Mitura, A. Mitura, P. Niedzielski, and P. Couvrat, Simulated Growth of Diamond Crystals Using Fractals, Chaos Solitons Fractals, 1999, 10(12), p 2165–2176.
T. Sharda, M. Umeno, T. Soga, and T. Jimbo, Growth of NCD by Bias Enhanced Microwave CVD, Appl. Phys. Lett., 2000, 77(26), p 4304–4306
B.D. Beake, I.U. Hassan, C.A. Rego, and W. Ahmed, Friction Force Microscopy of Diamond Films Modified by Glow Discharge Treatment, Diamond Relat. Mater., 2000, 9, p 1421–1429
N. Ali, V.F. Neto, and J. Gracio, Deposition of Nanocrystalline Diamond to Pyrolytic Carbon Using Sol Gel Techniques, J. Mater. Res., 2003, 18(2), p 296–305
N. Ali, V.F. Neto, Y. Kousar, G. Cabral, and J. Gracio, Deposition of NCD and TiO2 Coatings on pyC Using CVD and Sol Gel Techniques, Mater. Sci. Technol., 2003, 19, p 1273–1278
Y. Kousar, N. Ali, and V. Neto, S. Mei, and J. Gracio, Surface Treatment of Pyrolytic Carbon Surfaces Using Diamond and Titania Thin Films, Diamond Relat. Mater., 2004, 13, p 638–642
G. Taguchi, System of Experimental Design, Vol. 1 and 2, Unipub-Kraus/ASI, Dearborn, MI, 1988
G. Taguchi, Introduction to Quality Engineering: Designing Quality into Products and Processes, Unipub-Kraus/ASI, Dearborn, MI, 1987
R. Unal and E.B. Dean, “Taguchi Approach to Design Optimization for Quality and Cost: An Overview,” 1991 Annual Conference of the International Society of Parametric Analysts, May 1991, p 132–141
M.W. Weiser and K.B. Fong, Characterization of NCD Thin Films on Various Ceramic Substrates, Am. Ceram. Soc. Bull., 1994, 73, p 83–86
V.F. Neto, “Investigation on the Film Properties of Advanced Diamond Coatings Deposited Using Time-Modulated CVD,” M.Sc. dissertation, University of Aveiro, Aveiro, Portugal, 2004
W. Kulisch, L. Ackermann, and B. Sobisch, Diamond Growth Kinetics and the Physics of Structure Formation When Deposited to Various Substrates, Phys. Status Solidi A, 1996, 154, p 155–165
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Ahmed, W., Ahmed, E., Maryan, C. et al. Time-modulated CVD process optimized using the taguchi method. J. of Materi Eng and Perform 15, 236–241 (2006). https://doi.org/10.1361/105994906X95940
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DOI: https://doi.org/10.1361/105994906X95940