Abstract
The design, fabrication and characterization of the X-ray supermirrors are discussed in this paper. Using the local optimization method of simplex algorithm and the global one of simulated annealing algorithm with different initial multilayer structures, we designed the broad angular band supermirrors with different grazing incidence angle intervals at the energy of 8.0 keV (the Kα line of Cu) and the broad energetic band supermirrors with different energy intervals at fixed grazing incidence angles. The fabricating techniques for depositing non-periodic multilayers are also studed. The W/C and W/Si supermirrors are deposited on silicon substrates and characterized by a high resolution X-ray D1 diffractometer from Bede Company, UK. Choosing the interface roughness and the densities of the materials as independent variables, some measured reflectivity curves are fitted using the Debye-Waller factor with interface roughness. The experimental results show that the optical performances of the fabricated supermirrors are in agreement with the designed ones.
Similar content being viewed by others
References
Joensen, K. D., Chrstensen, F. E., Schnopper, H. W. et al., Medium-sized grazing incidence high-energy X-ray telescopes employing continuously graded multilayers, SPIE, 1992, 1736: 239–241.
Tawara, Y., Yamashita, K., Ogasaka, Y. et al., InFOCμS balloon-borne hard X-ray experiment with multilayer supermirror X-ray telescope, SPIE, 2002, 4496: 109–114.
Craig, W. W., Christensen, F. E., Decker, T. et al., Hard X-ray optics for the HEFT balloon borne payload: Prototype design & status, SPIE, 1998, 3445: 112–119.
Joensen, K. D., Hoghoj, P., Christensen, F. et al., Multilayerred supermirror structures for hard X-ray synchrotron and astrophysics instrumentation, Proc. SPIE, 1993, 2011: 360–372.
Windt, D. L., donguy, S., Hailey, C. J. et al., W/SiC X-ray multilayer optimized for use above 100 keV, Appl. Opt., 2003, 42: 2415–2244.
White, N. E., Tananbaum, H. D., The constellation X-ray mission, Nucl. Instrum. Methods in Physics Research A 1999, 436: 201–204.
Citterio, O., Ghigo, M. F., Mazzoleni, R. et al., Development of soft and hard X-ray optics for astronomy: progress report II and considerations on material properties for large-diameter segmented optics of future missions, Proc. SPIE, 2002, 4496: 23–40.
Morawe, C., Ziegler, E., Peffen, J. C. et al., Design and fabrication of depth-graded X-ray multilayers, Nucl. Instrum. Methods in Physics Research A, 2002, A493: 189–198.
Erko, A., Veldkamp, M., Gudat, W. et al., Graded X-ray optics for synchrotron radiation applications, Journal of Synchrotron Radiation, 1998, 5: 239–245.
Mao, P. H., Harrison, F. E., Windt, D. L. et al., Optimization of graded multilayer designs for astronomical X-ray telescopes, Appl. Opt., 1999, 38: 4766–4775.
Wang, Z. S., Cao, J. L., Michette, A. G., Depth-graded multilayer X-ray optics with broad angular response, Optics communications, 2000, 177: 25–32.
Yamashita, K., Serlemitsos, P. I., Jueller, J. et al., Supermirror hard X-ray telescope, Appl. Opt., 1998, 37: 8067–8073.
Yamashita, K., Kunieda, H., Tamura, Y. et al., New design concept of multilayer supermirrors for optics, Proc SPIE, 1999, 3766: 327–335.
Kozhevnikov, I. V., Bukreeva, I. N., Ziegler, E., design of X-ray supermirrors, Nucl. Instrum. Methods in Physics Research A, 2001, A460: 424–443.
Zhang, Z., Wang, Z. S., Wang, F. L. et al., Design of grazing incidence broad-band multilayers for hard X-ray reflectors, Chin. Phys. Lett., 2004, 21: 2372–2375.
Spiller, E., Reflective multilayer coatings for the far UV region, Appl. Opt., 1976, 15: 2333–2338.
Yamamoto, M., Namioka, T., Layer-by-layer design method for soft-X-ray multilayers, Appl. Opt., 1992, 31: 1622–1626.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Wang, Z., Wang, F., Zhang, Z. et al. Design, fabrication and characterization of the X-ray supermirrors. Sci China Ser G: Phy & Ast 48, 559–574 (2005). https://doi.org/10.1360/142005-55
Received:
Issue Date:
DOI: https://doi.org/10.1360/142005-55