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Research progresses of SOI optical waveguide devices and integrated optical switch matrix

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Abstract

SOI (silicon-on-insulator) is a new material with a lot of important performances such as large index difference, low transmission loss. Fabrication processes for SOI based optoelectronic devices are compatible with conventional IC processes. Having the potential of OEIC monolithic integration, SOI based optoelectronic devices have shown many good characteristics and become more and more attractive recently. In this paper, the recent progresses of SOI waveguide devices in our research group are presented. By highly effective numerical simulation, the single mode conditions for SOI rib waveguides with rectangular and trapezoidal cross-section were accurately investigated. Using both chemical anisotropic wet etching and plasma dry etching techniques, SOI single mode rib waveguide, MMI coupler, VOA (variable optical attenuator), 2 × 2 thermal-optical switch were successfully designed and fabricated. Based on these, 4 × 4 and 8 × 8 SOI optical waveguide integrated switch matrixes are demonstrated for the first time.

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Authors and Affiliations

  1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, 100083, Beijing, China

    Yu Jinzhong, Chen Shaowu, Xia Jinsong, Wang Zhangtao, Fan Zhongchao, Li Yanping, Liu Jingwei, Yang Di & Chen Yuanyuan

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  1. Yu Jinzhong
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  2. Chen Shaowu
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  3. Xia Jinsong
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  4. Wang Zhangtao
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  5. Fan Zhongchao
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  6. Li Yanping
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  7. Liu Jingwei
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  8. Yang Di
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  9. Chen Yuanyuan
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Correspondence to Yu Jinzhong.

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Yu, J., Chen, S., Xia, J. et al. Research progresses of SOI optical waveguide devices and integrated optical switch matrix. Sci China Ser F 48, 234–246 (2005). https://doi.org/10.1360/04yf0311

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  • DOI: https://doi.org/10.1360/04yf0311

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