Nanofabrication of High-Resolution Periodic Structures with a Gap Size Below 100 nm by Two-Photon Polymerization
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In this paper, approaches for the realization of high-resolution periodic structures with gap sizes at sub-100 nm scale by two-photon polymerization (2PP) are presented. The impact of laser intensity on the feature sizes and surface quality is investigated. The influence of different photosensitive materials on the structure formation is compared. Based on the elliptical geometry character of the voxel, the authors present an idea to realize high-resolution structures with feature sizes less than 100 nm by controlling the laser focus position with respect to the glass substrate. This investigation covers structures fabricated respectively in the plane along and perpendicular to the major axis of voxel. The authors also provide a useful approach to manage the fabrication of proposed periodic structure with a periodic distance of 200 nm and a gap size of 65 nm.
KeywordsNanofabrication Two-photon polymerization Sub-100 nm Periodic structures
Full width half maximum
Interferometric Fourier transform scatterometry
Scanning electron microscope
The demand for the downscaling of devices grows rapidly with the continuous progress of nanotechnology in recent years. The miniaturized structures with feature sizes below the diffraction limit can be applied in various fields like plasmonics , micro- and nanooptics , nanophotonics [3, 4], and biomedicine [5, 6]. Moreover, structures with sub-wavelength dimensions are also able to facilitate the characterization performance at micro- and nanoscale [7, 8]. For example, tips  and nanoanttennas  can be used to improve the characterization performance of high-resolution structures by enhancing the light confinement in the near-field, and gratings  are able to transform optical information from the near field to the far field.
As to the realization of high-resolution structures, two-photon polymerization (2PP) is popularly utilized due to its capabilities of achieving high resolution and 3D fabrication . Two-photon polymerization is a manufacturing method based on two-photon absorption (2PA), which is a nonlinear process that theoretically enables the achievement of resolution below the diffraction limit. Various 2PP-based methods, such as adding photoinitiator with a high initiation efficiency , shaping the spatial phase of deactivation beam , using sub-10 fs  and 520-nm femtosecond laser pulses , combining with hybrid optics  and a developed sub-diffraction optical beam lithography , have been applied to realize feature sizes at sub-100 nm scale. However, these sizes are mostly achieved on suspended lines or a single line. It still remains challenging to experimentally realize feature sizes and gap sizes beyond the diffraction limit in periodic structures due to the radical diffusion exchanging effect in the gap region when center-to-center distance between adjacent features gets very close . Nevertheless, a few strategies were demonstrated for the purpose of achieving periodic structures with a nanoscale gap distance. Photonic crystals with a periodic distance of 400 nm were realized by adding a quencher molecule into the photoresist . With this approach, the gap size between adjacent lines of the photonic crystals is around 300 nm. Moreover, grating lines with a periodic distance of 175 nm and a gap size of 75 nm were achieved by a STED lithography technique . Recently, it was presented that a straight forward thermal post-treatment process of samples by calcination is able to realize feature sizes down to approximately 85 nm . The above approaches have afforded for the realization of periodic structures with gap sizes below the diffraction limit. However, they are quite special with higher cost, more complicated operations and procedures comparing to 2PP.
The performance of different photoresists in structure fabrication can be diverse due to their own unique chemical compositions and physical properties. In this work, photoresists called sol-gel organic-inorganic Zr-hybrid material  and E-shell 300 (Envisiontec) are applied respectively for the structuring. Zr-hybrid material is a high-viscosity zirconium-based sol-gel organic-inorganic hybrid polymer which is well known for its low shrinkage and high stability for 2PP fabrication. The preparation procedures and other optical properties of this photoresist can be found in ref . E-shell 300 is a dimethacrylate-based liquid photoresist with a viscosity of 339.8 MP a·s. It can be used for 3D printing and fabrication of hearing aid and medical devices, as well as structures with high resolution, strength, stiffness, and chemical resistance.
Results and Discussion
Influence of Different Materials on the Structure Formation by 2PP
Investigation of Structure Formation with Respect to the Laser Focus Position
To place the nanostructures on the surface of the glass substrate, the laser beam has to be focused at the substrate/photoresist interface during the 2PP process. Thus, only part of the voxel is able to initiate the polymerization of photoresist. The other part of the voxel is in glass substrate to ensure the adhesion of structures. Since the voxel geometry is elliptical, a variation of its cross-section size exists along the major axis. In high-resolution micro- and nanofabrication, the variation of voxel cross-section size at the interface of substrate and photoresist is of much concern in affecting the structure formation as well as its feature size.
Fabrication of Periodic Structures with the Feature Sizes and Gap Size Below the Diffraction Limit
In conclusion, we compared the influence of different photoresists and processing parameters on the structure formation and presented the way of improving the spatial resolution and reducing the gap size between adjacent features by controlling the laser focus position along z direction. E-shell 300 was experimentally proved to be a more suitable material for the fabrication of structures with a spatial resolution less than 200 nm. We also succeeded to achieve a periodic structure with the gap size of 65 nm and the feature size of 110 nm. The sizes are far below the Abbe diffraction limit. The further investigation on the optical performance (e.g., signal enhancement of optical images) of this high-resolution structure will be attractive.
The financial support from the Deutsche Forschungsgemeinschaft (DFG, RE3012/4-1 and RE3012/2-1) is greatly acknowledged.
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