Abstract
The aim of this paper is to illustrate the use of Multi-Wavelength Anomalous Diffraction (MAD) and Diffraction Anomalous Fine Structure (DAFS) spectroscopy for the study of structural properties of semiconductor nanostructures. We give a brief introduction on the basic principles of these techniques providing a detailed bibliography. Then we focus on the data reduction and analysis and we give specific examples of their application on three different kinds of semiconductor nanostructures: Ge/Si nanoislands, AlN capped GaN/AlN Quantum Dots and AlGaN/AlN Nanowires. We show that the combination of MAD and DAFS is a very powerful tool to solve the structural problem of these materials of high technological impact. In particular, the effects of composition and strain on diffraction are disentangled and composition can be determined in a reliable way, even at the interface between nanostructure and substrate. We show the great possibilities of this method and give the reader the basic tools to undertake its use.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
R. Kahn, R. Fourme, R. Bosshard, M. Chiadmi, J. Risler, O. Dideberg, J. Wery, FEBS Lett. 179, 133 (1985), ISSN: 0014-5793
W. Hendrickson, Science 254, 51 (1991)
J. Hodeau, V. Favre-Nicolin, S. Bos, H. Renevier, E. Lorenzo, J. Berar, Chem. Rev. 101, 1843 (2001)
H. Stragier, J. Cross, J. Rehr, L. Sorensen, C. Bouldin, J. Woicik, Phys. Rev. Lett. 69, 3064 (1992), ISSN: 0031-9007
H. Renevier, J. Hodeau, P. Wolfers, S. Andrieu, J. Weigelt, R. Frahm, Phys. Rev. Lett. 78, 2775 (1997), ISSN: 0031-9007
Y. Murakami, H. Kawada, H. Kawata, M. Tanaka, T. Arima, Y. Moritomo, Y. Tokura, Phys. Rev. Lett. 80, 1932 (1998)
J. García, G. Subías, M. Proietti, H. Renevier, Y. Joly, J. Hodeau, J. Blasco, M. Sánchez, J. Bérar, Phys. Rev. Lett. 85, 578 (2000), ISSN: 0031-9007
Y. Cauchois, C. Bonnelle, Comptes Rendus de l’Académie des Sciences 242, 1596 (1956)
Y. Cauchois, Comptes Rendus de l’Académie des Sciences 242, 100 (1956)
T. Fukamachi, S. Hosoya, T. Kawamura, J. Hastings, J. Appl. Crystallography 10, 321 (1977), ISSN: 0021-8898
U.W. Arndt, T.J. Greenhough, J.R. Helliwell, J.A.K. Howard, S.A. Rule, A.W. Thompson, Nature 298, 835 (1982), ISSN: 0028-0836
I. Arčon, A. Kodre, D. Glavič, M. Hribar, Le Journal de Physique Colloques 48, C9 (1987)
I.J. Pickering, M. Sansone, J. Marsch, G.N. George, Japanese J. Applied Physics 32 Suppl2, 206 (1993)
I.J. Pickering, M. Sansone, J. Marsch, G.N. George, J. American Chemical Society 115, 6302 (1993)
L. Sorensen, J. Cross, M. Newville, B. Ravel, J.J. Rehr, H. Stragier, C. Bouldin, J. Woicik, in ResonantAnomalous X-Ray Scattering: Theory and Applications, edited by G. Materlik, J. Sparks, K. Fischer (Elsevier Science edn., Amsterdam, 1994)
M. Proietti, H. Renevier, J. Hodeau, J. García, J. Bérar, P. Wolfers, Physical Review B 59, 5479 (1999), ISSN: 0163-1829
Y. Joly, Phys. Rev. B 63, 125120 (2001), ISSN: 1098-0121
D.C. Meyer, A. Kupsch, P. Paufler, J. Synchrotron Radiation 10, 144 (2003), ISSN: 09090495
H. Renevier, S. Grenier, S. Arnaud, J.F. Bérar, B. Caillot, J.L. Hodeau, A. Letoublon, M.G. Proietti, B. Ravel, J. Synchrotron Radiation 10, 435 (2003), ISSN: 0909-0495
J. Woicik, J. Cross, C. Bouldin, B. Ravel, J. Pellegrino, B. Steiner, S. Bompadre, L. Sorensen, K. Miyano, J. Kirkland, Phys. Rev. B 58, R4215 (1998), ISSN: 0163-1829
D. Meyer, K. Richter, P. Paufler, G. Wagner, Phys. Rev. B 59, 15253 (1999), ISSN: 0163-1829
T. Bigault, F. Bocquet, S. Labat, O. Thomas, H. Renevier, Phys. Rev. B 64 (2001), ISSN: 0163-1829
G. Luo, Z. Mai, T. Hase, B. Fulthorpe, B. Tanner, C. Marrows, B. Hickey, Phys. Rev. B 64, 245404 (2001), ISSN: 0163-1829
H.H. Lee, M.S. Yi, H.W. Jang, Y. Moon, S. Park, D.Y. Noh, M. Tang, K.S. Liang, Appl. Phys. Lett. 81, 5120 (2002), ISSN: 00036951
O. Ersen, V. Pierron-Bohnes, M. Tuilier, C. Pirri, L. Khouchaf, M. Gailhanou, Phys. Rev. B 67, 94116 (2003), ISSN: 0163-1829
S. Grenier, M.G. Proietti, H. Renevier, L. Gonzalez, J.M. García, J.M. Gérard, J. García, J. Synchrotron Radiation 8, 536 (2001), ISSN: 09090495
S. Grenier, M.G. Proietti, H. Renevier, L. González, J.M. García, J. García, Europhysics Letters (EPL) 57, 499 (2002), ISSN: 0295-5075
A. Letoublon, V. Favre-Nicolin, H. Renevier, M.G. Proietti, C. Monat, M. Gendry, O. Marty, C. Priester, Phys. Rev. lett. 92, 186101 (2004), ISSN: 1079-7114
J. Coraux, M.G. Proietti, V. Favre-Nicolin, H. Renevier, B. Daudin, Phys. Rev. B 73, 205343 (2006)
J. Coraux, V. Favre-Nicolin, M.G. Proietti, B. Daudin, H. Renevier, Phys. Rev. B 75, 235312 (2007)
U. Pietsch, V. Holý, T. Baumbach, High-Resolution X-Ray Scattering: From Thin Films to Lateral Nanostructures, 2nd edn. (Springer-Verlag, New York Inc., 2004), ISBN: 0387400923
J. Stangl, V. Holý, G. Bauer, Reviews of Modern Physics 76, 725 (2004)
I. Kegel, T.H. Metzger, A. Lorke, J. Peisl, J. Stangl, G. Bauer, J.M. García, P.M. Petroff, Phys. Rev. Lett. 85, 1694 (2000)
G. Williams, M. Pfeifer, I. Vartanyants, I. Robinson, Phys. Rev. B 73 (2006), ISSN: 1098-0121
S. Grenier, Ph.D. thesis, Université Joseph Fourier, Grenoble, France, 2001
J. Coraux, Ph.D. thesis, Université Joseph Fourier, 2006
D.H. Templeton, L.K. Templeton, J.C. Phillips, K.O. Hodgson, Acta Crystallographica Section A 36, 436 (1980), ISSN: 0567-7394
E.N. Ovchinnikova, V.E. Dmitrienko, Acta Crystallographica Section A Foundations of Crystallography 53, 388 (1997), ISSN: 0108-7673
E.N. Ovchinnikova, V.E. Dmitrienko, Acta Crystallographica Section A Foundations of Crystallography 56, 2 (2000), ISSN: 0108-7673
V.E. Dmitrienko K. Ishida, A. Kirfel, E.N. Ovchinnikova, Acta Crystallographica Section A Foundations of Crystallography 61, 481 (2005), ISSN: 0108-7673
R. Magalh aes-Paniago, G. Medeiros-Ribeiro, A. Malachias, S. Kycia, T.I. Kamins, R.S. Williams, Phys. Rev. B 66, 245312 (2002)
A. Malachias, S. Kycia, G. Medeiros-Ribeiro, R. Magalh aes-Paniago, T.I. Kamins, R.S. Williams, Phys. Rev. Lett. 91, 176101 (2003)
T.U. Schülli, J. Stangl, Z. Zhong, R.T. Lechner, M. Sztucki, T.H. Metzger, G. Bauer, Phys. Rev. Lett. 90, 066105 (2003)
V. Favre-Nicolin, NanoMAD (2011)
H. Dosch, Critical Phenomena at Surfaces and Interfaces (Springer Verlag, New York, 1992), ISBN: 0367-0325
L.N. Coelho R. Magalh aes-Paniago, A. Malachias, J.G. Zelcovit, M.A. Cotta, Appl. Phys. Lett. 92, 021903 (2008), ISSN: 00036951
N.A. Katcho, M. Richard, M.G. Proietti, H. Renevier, C. Leclere, V. Favre-Nicolin, J.J. Zhang, G. Bauer, Europhys. Lett. 93, 66004 (2011), ISSN: 0295-5075
J. Cross, M. Newville, J. Rehr, L. Sorensen, C. Bouldin, G. Watson, T. Gouder, G. Lander, M. Bell, Phys. Rev. B 58, 11215 (1998), ISSN: 0163-1829
H. Stragier, Ph.D. thesis, University of Washington, 1993
J. Coraux, H. Renevier, M.G. Proietti, V. Favre-Nicolin, B. Daudin, G. Renaud, Physica Status Solidi (b) 243, 1519 (2006)
K. Hestroffer, R. Mata, D. Camacho, C. Leclere, G. Tourbot, Y.M. Niquet, A. Cros, C. Bougerol, H. Renevier, B. Daudin, Nanotechnology 21, 415702 (2010), ISSN: 0957-4484
V.E. Dmitrienko, Acta Crystallographica Section A Foundations of Crystallography 39, 29 (1983), ISSN: 0108-7673
F. d’Acapito, F. Boscherini, S. Mobilio, A. Rizzi, R. Lantier, Phys. Rev. B 66, 205411 (2002), ISSN: 0163-1829
D.T. Cromer, D.A. Liberman, J. Chem. Phys. 53, 1891 (1970), ISSN: 00219606
J. Als-Nielsen, D. McMorrow, Elements of Modern X-ray Physics, 1st edn. (John Wiley & Sons, 2001), ISBN: 0471498572
J. Toll, Phys. Rev. 104, 1760 (1956), ISSN: 0031-899X
J.M. Bijvoet, A.F. Peerdeman, A.J. van Bommel, Nature 168, 271 (1951), ISSN: 0028-0836
K. Hestroffer, C. Leclere, C. Bougerol, H. Renevier, B. Daudin, Phys. Rev. B 84, 245302 (2011)
M. Richard, V. Favre-Nicolin, G. Renaud, T.U. Schulli, C. Priester, Z. Zhong, T. Metzger, Appl. Phys. Lett. 94, 013112 (2009)
A. Rastelli, M. Stoffel, J. Tersoff, G.S. Kar, O.G. Schmidt, Phys. Rev. Lett. 95, 026103 (2005)
M. Richard, Ph.D. thesis, Université Grenoble I, 2007
N. Gogneau, D. Jalabert, E. Monroy, T. Shibata, M. Tanaka, B. Daudin, J. Appl. Phys. 94, 2254 (2003), ISSN: 10897550
V. Chamard, T.H. Metzger, M. Sztucki, V. Holý, M. Tolan, E. Bellet-Amalric, C. Adelmann, B. Daudin, H. Mariette, Europhys. Lett. 63, 268 (2003), ISSN: 0295-5075, 1286-4854
O.G. Schmidt, K. Eberl, IEEE Transactions on Electron Devices 48, 1175 (2001), ISSN: 0018-9383
G.S. Kar, S. Kiravittaya, U. Denker, B. Nguyen, O.G. Schmidt, Appl. Phys. Lett. 88, 253108 (2006), ISSN: 00036951
L.A. Montoro, M.S. Leite, D. Biggemann, F.G. Peternella, K.J. Batenburg, G. Medeiros-Ribeiro, A.J. Ramirez, J. Phys. Chem. C 113, 9018 (2009)
X. Liao, J. Zou, D. Cockayne, J. Wan, Z. Jiang, G. Jin, K. Wang, Phys. Rev. B 65, 153306 (2002), ISSN: 0163-1829
F. Boscherini, G. Capellini, L. Di Gaspare, F. Rosei, N. Motta, S. Mobilio, Appl. Phys. Lett. 76, 682 (2000), ISSN: 00036951
T. Schülli, G. Vastola, M. Richard, A. Malachias, G. Renaud, F. Uhlík, F. Montalenti, G. Chen, L. Miglio, F. Schäffler, et al., Phys. Rev. Lett. 102, 25502 (2009), ISSN: 0031-9007
M. Leite, A. Malachias, S. Kycia, T. Kamins, R. Williams, G. Medeiros-Ribeiro, Phys. Rev. Lett. 100, 226101 (2008), ISSN: 0031-9007
A. Rastelli, M. Stoffel, A. Malachias, T. Merdzhanova, G. Katsaros, K. Kern, T.H. Metzger, O.G. Schmidt, Nano Letters 8, 1404 (2008), ISSN: 1530-6984
T. Schülli, M. Stoffel, A. Hesse, J. Stangl, R. Lechner, E. Wintersberger, M. Sztucki, T. Metzger, O. Schmidt, G. Bauer, Phys. Rev. B 71, 35326 (2005), ISSN: 1098-0121
G. Katsaros, G. Costantini, M. Stoffel, R. Esteban, A. Bittner, A. Rastelli, U. Denker, O. Schmidt, K. Kern, Phys. Rev. B 72, 195320 (2005), ISSN: 1098-0121
G. Biasiol, S. Heun, Physics Reports 500, 117 (2011), ISSN: 0370-1573
M.G. Proietti, J. Coraux, H. Renevier, in Characterization of Semiconductor Heterostructures and Nanostructures, edited by C. Lamberti (Elsevier Science edn., Amsterdam, 2008)
S.N. Santalla, C. Kanyinda-Malu, R.M.d.l. Cruz, Nanotechnology 18, 315705 (2007), ISSN: 0957-4484
J. Tersoff, Phys. Rev. B 39, 5566 (1989)
S. Plimpton, J. Computational Physics 117, 1 (1995), ISSN: 0021-9991
S. Plimpton, LAMMPS molecular dynamics simulator (1995)
I. Kegel, T.H. Metzger, A. Lorke, J. Peisl, J. Stangl, G. Bauer, K. Nordlund, W.V. Schoenfeld, P.M. Petroff, Phys. Rev. B 63, 035318 (2001)
T. Zhou, G. Renaud, C. Revenant, J. Issartel, T.U. Schülli, R. Felici, A. Malachias, Phys. Rev. B 83, 195426 (2011)
A.L. Ankudinov, J.J. Rehr, S.D. Conradson, Phys. Rev. B 58, 7565 (1998), ISSN: 1098-0121
B. Ravel, M. Newville, J. Synchrotron Radiation 12, 537 (2005), ISSN: 0909-0495
M. Newville, J. Synchrotron Radiation 8, 322 (2001), ISSN: 09090495
G. Katsaros, A. Rastelli, M. Stoffel, G. Isella, H.v. Känel, A. Bittner, J. Tersoff, U. Denker, O. Schmidt, G. Costantini, et al., Surface Science 600, 2608 (2006), ISSN: 0039-6028
E. Calleja, M. Sánchez-García, F. Sánchez, F. Calle, F. Naranjo, E.Mu noz, U.Jahn, K. Ploog, Phys. Rev. B62, 16826 (2000), ISSN: 0163-1829
L. Cerutti, J. Ristić, S. Fernández-Garrido, E. Calleja, A. Trampert, K.H. Ploog, S. Lazic, J.M. Calleja, Appl. Phys. Lett. 88, 213114 (2006), ISSN: 00036951
A. Kikuchi, M. Kawai, M. Tada, K. Kishino, J. Appl. Phys. 43, L1524 (2004), ISSN: 0021-4922
H. Kim, Y. Cho, H. Lee, S.I. Kim, S.R. Ryu, D.Y. Kim, T.W. Kang, K.S. Chung, Nano Letters 4, 1059 (2004)
H. Sekiguchi, K. Kishino, A. Kikuchi, Electronics Lett. 44, 151 (2008), ISSN: 0013-5194
R. Songmuang, O. Landré, B. Daudin, Appl. Phys. Lett. 91, 251902 (2007), ISSN: 00036951
R.K. Debnath, R. Meijers, T. Richter, T. Stoica, R. Calarco, H. Lüth, Appl. Phys. Lett. 90, 123117 (2007), ISSN: 00036951
K. Bertness, A. Roshko, L. Mansfield, T. Harvey, N. Sanford, J. Crystal Growth 310, 3154 (2008), ISSN: 0022-0248
O. Landré, R. Songmuang, J. Renard, E. Bellet-Amalric, H. Renevier, B. Daudin, Appl. Phys. Lett. 93, 183109 (2008), ISSN: 00036951
L. Largeau, D.L. Dheeraj, M. Tchernycheva, G.E. Cirlin, J.C. Harmand, Nanotechnology 19, 155704 (2008), ISSN: 0957-4484
L. Lymperakis, J. Neugebauer, Phys. Rev. B 79, 241308(R) (2009), ISSN: 1098-0121
T.U. Schulli, M. Richard, G. Renaud, V. Favre-Nicolin, E. Wintersberger, G. Bauer, Appl. Phys. Lett. 89(14), 143114 (2006)
M. Richard, T.U. Schulli, G. Renaud, E. Wintersberger, G. Chen, G. Bauer, V. Holy, Phys. Rev. B 80, 045313 (2009)
C. Meneghini, F. Boscherini, L. Pasquini, H. Renevier, J. Appl. Crystallogr. 42, 642 (2009), ISSN: 0021-8898
P. Kirkpatrick, A.V. Baez, J. Optic. Soc. Amer. 38, 766 (1948)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
Open Access This article is distributed under the terms of the Creative Commons Attribution 2.0 International License ( https://creativecommons.org/licenses/by/2.0 ), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
About this article
Cite this article
Favre-Nicolin, V., Proietti, M.G., Leclere, C. et al. Multiwavelength anomalous diffraction and diffraction anomalous fine structure to study composition and strain of semiconductor nanostructures. Eur. Phys. J. Spec. Top. 208, 189–216 (2012). https://doi.org/10.1140/epjst/e2012-01619-x
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1140/epjst/e2012-01619-x