Skip to main content
Log in

Influence of Schottky metal-semiconductor contact on the responsivity of UV photodetectors with internal gain

  • Regular Article
  • Published:
The European Physical Journal D Aims and scope Submit manuscript

Abstract

Metal-semiconductor-metal (MSM) ultraviolet photodetector is fabricated on ZnO films, prepared by radio frequency magnetron sputtering technique on quartz substrates. The ZnO photodetector shows low dark current and external quantum efficiency (EQE) due to the gain effect. The device also exhibits a near linear responsivity dependence on voltage, which gradually rise to the peak first, then fall sharply, and then slightly rise again. A physical mechanism primarily focused on the relationship between carrier (electron-hole pairs) transport and barrier height at Schottky metal-semiconductor contact is given to explain the above phenomena. It is demonstrated as a straightforward and convenient way to enhance the internal gain of the simple ZnO-based Schottky photodetectors for application in the future.

Graphical abstract

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. K. Liu, M. Sakurai, M. Aono, Sensors 10, 8604 (2010)

    Google Scholar 

  2. F. Omnès, E. Monroy, J.L. Reverchon, Proc. SPIE-Int. Soc. Opt. Eng. 6473, 64730E (2007)

    Google Scholar 

  3. E. Monroy, F. Omnès, F. Calle, Semicond. Sci. Technol. 18, R33 (2003)

    ADS  Google Scholar 

  4. B.W. Lim, Q.C. Chen, J.Y. Yang, M.A. Khan, Appl. Phys. Lett. 68, 3761 (1996)

    ADS  Google Scholar 

  5. J.Q. Yao, H. Deng, M. Li, X.R. Deng, W.W. Qiu, M. Wei, Adv. Mater. Res. 685, 195 (2013)

    Google Scholar 

  6. S. Liang, H. Sheng, Y. Liu, Z. Huo, Y. Lu, H. Shen, J. Cryst. Growth 225, 110 (2001)

    ADS  Google Scholar 

  7. E.E. Hahn, J. Appl. Phys. 22, 855 (1951)

    ADS  Google Scholar 

  8. A.H. Adl, A. Ma, M. Gupta, ACS Appl. Mater. Interfaces 4, 1423 (2012)

    Google Scholar 

  9. Y.S. Kim, M.H. Kang, J.S. Oh, K.S. Jeong, Y.M. Kim, D.E. Yoo, J. Inf. Disp. 14, 89 (2013)

    Google Scholar 

  10. T. Oh, Mater. Res. Bull. 77, 1 (2016)

    Google Scholar 

  11. C. Jiang, H.W. Choi, X. Cheng, H. Ma, D. Hasko, A. Nathan, Science 363, 719 (2019)

    ADS  Google Scholar 

  12. E.H. Rhoderick, A. Rothwarf, Phys. Today 32, 1 (1979)

    Google Scholar 

  13. G. Harzallah, M. Remram, Int. J. Nanopart. 6, 153 (2013)

    Google Scholar 

  14. G.M. Ali, P. Chakrabarti, J. Phys. D: Appl. Phys. 43, 415103 (2010)

    Google Scholar 

  15. T.K. Lin, S.J. Chang, Y.K. Su, B.R. Huang, M. Fujita, Y. Horikoshi, J. Cryst. Growth 281, 513 (2005)

    ADS  Google Scholar 

  16. Y. Kang, Y. Xu, D. Zhao, J. Fang, Solid State Electron. 49, 1135 (2005)

    ADS  Google Scholar 

  17. K. Koike, K. Hama, I. Nakashima, J. Cryst. Growth 278, 288 (2005)

    ADS  Google Scholar 

  18. K. Wang, Y. Vygranenko, A. Nathan, Thin Solid Films 515, 6981 (2007)

    ADS  Google Scholar 

  19. M. Zhang, S. Ruan, H. Zhang, P. Qu, L. Chen, K. Liu, Gain mechanism in TiO2 MSM ultraviolet detector, in 2011 International Conference in Electrics, Communication and Automatic Control Proceedings (Springer, New York, NY, 2012), pp. 901–905.

  20. F. Xie, H. Lu, X.Q. Xiu, D. Chen, P. Han, R. Zhang, Y. Zheng, Solid State Electron. 57, 39 (2011)

    ADS  Google Scholar 

  21. S.K. Zhang, W.B. Wang, I. Shtau, F. Yun, L. He, H. Morkoc, Appl. Phys. Lett. 81, 4862 (2002)

    ADS  Google Scholar 

  22. G. Tabares, A. Hierro, J.M. Ulloa, A. Guzman, E. Munoz, A. Nakamura, J. Temmyo, Appl. Phys. Lett. 96, 2787 (2010)

    Google Scholar 

  23. L.A. Kosyachenko, G.V. Lashkarev, A.I. Ievtushenko, Acta Phys. Pol. 119, 681 (2011)

    Google Scholar 

  24. G.M. Ali, S. Singh, P. Chakrabarti, J. Electron. Sci. Technol. 8, 55 (2010)

    Google Scholar 

  25. H. Morkoç, Ü. Özgür, Processing Devices, and Heterostructures (Wiley-VCH, 2009)

  26. N. Youngblood, C. Chen, S.J. Koester, M. Li, Nat. Photonics 9, 331 (2015)

    Google Scholar 

  27. X. Zhou, D. Yang, D. Ma, A. Vadim, T. Ahamad, S.M. Alshehri, Adv. Funct. Mater. 26, 6619 (2016)

    Google Scholar 

  28. Z. Zhang, M.W. Lai, Z. Wu, IEEE Photonics Technol. Lett. 28, 837 (2016)

    ADS  Google Scholar 

  29. S. Chen, C. Teng, M. Zhang, Y. Li, D. Xie, G. Shi, Adv. Mater. 28, 5969 (2016)

    Google Scholar 

  30. J. Reemts, A. Kittel, J. Appl. Phys. 101, 013709 (2007)

    ADS  Google Scholar 

  31. W.Y. Weng, S.J. Chang, C.L. Hsu, T.J. Hsueh, ACS Appl. Mater. Interfaces 3, 162 (2011)

    Google Scholar 

  32. S.R. Raza, Y.T. Lee, S.H. Shokouh, R. Ha, H. Choi, S. Im, Nanoscale 5, 10829 (2013)

    Google Scholar 

  33. W. Zhang, J.K. Huang, C.H. Chen, Y.H. Chang, L.J. Li, Adv. Mater. 25, 3456 (2013)

    Google Scholar 

  34. J. Bao, I. Shalish, Z. Su, R. Gurwitz, Z. Ren, Nanoscale Res. Lett. 6, 404 (2011)

    ADS  Google Scholar 

  35. J.C. Moore, C.V. Thompson, Sensors 13, 9921 (2013)

    Google Scholar 

  36. Y. Miyamoto, D. Yoshikawa, K. Takei, T. Arie, S. Akita, Jpn. J. Appl. Phys. 57, 06HB01 (2018)

    Google Scholar 

  37. W. Tian, C. Zhang, T. Zhai, S. Li, X. Wang, J. Liu, X. Jie, D. Liu, M. Liao, K. Yasuo, G. Dmitri, Y. Bando, Adv. Mater. 26, 3088 (2014)

    Google Scholar 

  38. V. Adinolfi, O. Ouellette, M.I. Saidaminov, G. Walters, A.L. Abdelhady, O.M. Bakr, E.H. Sargent, Adv. Mater. 28, 7264 (2016)

    Google Scholar 

  39. J. Hwang, C. Yang, C. Chu, ACS Appl. Mater. Interfaces 9, 23904 (2017)

    Google Scholar 

  40. S.F. Soares, Jpn. J. Appl. Phys. 31, 210 (1992)

    ADS  Google Scholar 

  41. M. Klingenstein, J. Kuhl, J. Rosenzweig, Solid State Electron. 37, 333 (2016)

    ADS  Google Scholar 

  42. D.A. Neamen, Mater. Today 9, 57 (2006)

    Google Scholar 

  43. H. Zhu, C.X. Shan, L.K. Wang, J. Zheng, J.Y. Zhang, B. Yao, D.Z. Shen, J. Phys. Chem. C 114, 7169 (2010)

    Google Scholar 

  44. Y.N. Hou, Z.X. Mei, Z.L. Liu, T.C. Zhang, X.L. Du, Appl. Phys. Lett. 98, 103506 (2011)

    ADS  Google Scholar 

  45. H. Ando, M. Kumagai, H. Kanbe, IEEE Int. Electron Devices Meet. 31, 471 (1985)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Dayong Jiang.

Additional information

Publisher’s Note

The EPJ Publishers remain neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Zhou, X., Jiang, D., Zhao, M. et al. Influence of Schottky metal-semiconductor contact on the responsivity of UV photodetectors with internal gain. Eur. Phys. J. D 74, 119 (2020). https://doi.org/10.1140/epjd/e2020-100587-6

Download citation

  • Received:

  • Revised:

  • Published:

  • DOI: https://doi.org/10.1140/epjd/e2020-100587-6

Keywords

Navigation