Abstract
A Monte Carlo calculation of the secondary electron emission from a SiO2 macro-capillary in the backward direction induced by electron irradiation is presented with the aim to understand transmission guiding of a scanning electron beam through a borosilicate glass macro-capillary. The theoretical modeling of electron transport in SiO2 capillary incorporates the elastic, inelastic and phonon scatterings, resulting, respectively, from the interactions with nucleus, electrons and phonons. The influence on electron inelastic scattering by the insulator bandgap is also considered. In this work a simplified approach has been employed to deal with the charging of the internal wall of the capillary and it is found that at a glancing incident angle, the secondary electrons are mostly originated from the top surface.
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N. Stolterfoht, J.H. Bremer, V. Hoffmann, R. Hellhammer, D. Fink, A. Petrov, B. Sulik, Phys. Rev. Lett. 88, 133201 (2002)
R.J. Bereczky, G. Kowarik, F. Aumayr, K. Tökési, Nucl. Instrum. Methods Phys. Res. B 267, 317 (2009)
G. Kowarik, R.J. Bereczky, F. Aumayr, K. Tökési, Nucl. Instrum. Methods Phys. Res. B 267, 2277 (2009)
T.M. Kojima, T. Ikeda, Y. Kanai, Y. Yamazaki, Nucl. Instrum. Methods Phys. Res. B 354, 16 (2015)
E. Gruber, G. Kowarik, F. Ladinig, J.P. Waclawek, D. Schrempf, F. Aumayr, R.J. Bereczky, K. Tökési, P. Gunacker, T. Schweigler, C. Lemell, J. Burgdörfer, Phys. Rev. A 86, 062901 (2012)
B.S. Dassanayake, S. Das, R.J. Bereczky, K. Tökési, J.A. Tanis, Phys. Rev. A 81, 020701(R) (2010)
A.R. Milosavljević, K. Schiessl, C. Lemell, K. Tökési, M. Mátéfi-Tempfli, S. Mátefi-Témpfli, B.P. Marinković, J. Burgdörfer, Nucl. Instrum. Methods Phys. Res. B 279, 190 (2012)
A.R. Milosavlević, J. Jureta, Gy. Vikor, Z.D. Pešić, D. Šević, M. Matefli-Tempfli, S. Matefli-Tempfli, B.P. Marinković, Europhys. Lett. 86, 23001 (2009)
K. Schiessl, K. Tokesi, B. Solleder, C. Lemell, J. Burgdorfer, Phys. Rev. Lett. 102, 163201 (2009)
R.J. Bereczky, L. Repetto, U. Valbusa, K. Tökési, Charging of borosilicate capillaries: hysteresis and border effects, in International Conference on Atomic Collisions in Solids, 2014, , Debrecen, Hungary, 2014.
Z.J. Ding, R. Shimizu, Scanning 18, 92 (1996)
S.F. Mao, Y.G. Li, R.G. Zeng, Z.J. Ding, J. Appl. Phys. 104, 114907 (2008)
Y.G. Li, Z.J. Ding, Z.M. Zhang, J. Appl. Phys. 106, 024316 (2009)
H. Xu, B. Da, J. Tóth, K. Tökési, Z.J. Ding, Phys. Rev. B 95, 195417 (2017)
C. Li, S.F. Mao, Y.B. Zou, Y.G. Li, P. Zhang, H.M. Li, Z.J. Ding, J. Phys. D: Appl. Phys. 51, 165301 (2018)
N.F. Mott, Proc. R. Soc. A 124, 425 (1929)
R.A. Bonham, T.G. Strand, J. Chem. Phys. 39, 2200 (1963)
Y. Yamazaki, Ph.D. thesis, Osaka University, 1977
J.C. Kuhr, H.-J. Fitting, J. Electron. Spectrosc. Relat. Phenom. 105, 257 (1999)
E.D. Palik, Handbook of Optical Constants of Solids (Academic, Orlando, 1985)
Y. Sun, H. Xu, B. Da, S.F. Mao, Z.J. Ding, Chin. J. Chem. Phys. 29, 663 (2016)
D. Tahir, H.L. Kwon, H.C. Shin, S.K. Oh, H.J. Kang, S. Heo, J.G. Chung, J.C. Lee, S. Tougaard, J. Phys. D: Appl. Phys. 43, 255301 (2010)
H.-J. Fitting, J.U. Friemann, Phys. Status Solidi A 69, 349 (1982)
H. Seiler, J. Appl. Phys. 54, R1 (1983)
C.G. Walker, M.M. El-Gomati, A.M. Assa’d, M. Zadrazil, Scanning 30, 365 (2008)
Y.G. Li, S.F. Mao, H.M. Li, S.M. Xiao, Z.J. Ding, J. Appl. Phys. 104, 064901 (2008)
Y.G. Li, P. Zhang, Z.J. Ding, Scanning 35, 127 (2013)
Y.B. Zou, M.S.S. Khan, H.M. Li, Y.G. Li, W. Li, S.T. Gao, L.S. Liu, Z.J. Ding, Measurement 123, 150 (2018)
L. Repetto et al. (2019) to be published
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Li, C., Tőkési, K., Repetto, L. et al. A Monte Carlo calculation of the secondary electron emission in the backward direction from a SiO2 macro-capillary. Eur. Phys. J. D 74, 37 (2020). https://doi.org/10.1140/epjd/e2020-100268-6
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DOI: https://doi.org/10.1140/epjd/e2020-100268-6