Skip to main content

Advertisement

Log in

Surface treatment of metals in the plasma of a nanosecond diffuse discharge at atmospheric pressure

  • Regular Article
  • Published:
The European Physical Journal D Aims and scope Submit manuscript

Abstract

The paper presents experimental results on surface treatment of metals in the plasma of a runaway electron preionized diffuse discharge (REP DD) in atmospheric pressure nitrogen. The parameters under study are the elemental composition, the nanohardness, the surface free energy (SFE) and the surface roughness of metals before and after plasma treatment. The study shows that REP DD plasma treatment with 105 discharge pulses provides ultrafine surface cleaning of the treated metals from carbon and increases their surface free energy up to 3 times, whereas the surface nanohardness and roughness of the treated metals remain almost unchanged.

Graphical abstract

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. G. Harman, Wire bonding in microelectronics, 3rd edn. (McGrawl-Hill, 2010)

  2. H.Y. Peng, M. Devarajan, T.T. Lee, D. Lacey, IEEE T. Compon. Packag. Manuf. Technol. 5, 562 (2015)

    Article  Google Scholar 

  3. P.S. Chauhan, A. Choubey, Zh.W. Zhong, M.G. Petcht, Copper wire bonding (Springer, New York, 2014)

  4. S. Kaimori, T. Nonaka, A. Mizoguchi, IEEE T. Adv. Packaging 29, 227 (2006)

    Article  Google Scholar 

  5. Runaway Electrons Preionized Diffuse Discharge, edited by V.F. Tarasenko (Nova Science Publishers, New York, 2015)

  6. D.A. Sorokin, M.I. Lomaev, V.F. Tarasenko, in Proceedings of the 12th Int. Conf. on Atomic and Molecular Pulsed Lasers 9810 (Proceedings of SPIE, 2015), 98101M-2

  7. V.F. Tarasenko, M.A. Shulepov, M.V. Erofeev, Phys. Atom. Nucl. 78, 1670 (2015)

    Article  ADS  Google Scholar 

  8. C. Zhang, M.V. Erofeev, Z. Fang, M.A. Shulepov, Z. Zhou, V.F. Tarasenko, T. Shao, Laser Part. Beams 34, 202 (2016)

    Article  ADS  Google Scholar 

  9. M.V. Erofeev, E.Kh. Baksht, A.G. Burachenko, V.F. Tarasenko, Tech. Phys. 60, 1316 (2015)

    Article  Google Scholar 

  10. D.K. Owens, R.C. Wendt, J. Appl. Polym. Sci. 13, 1741 (1969)

    Article  Google Scholar 

  11. W.C. Oliver, G.M. Pharr, J. Mater. Res. 7, 1564 (1992)

    Article  ADS  Google Scholar 

  12. M.R. Baklanov, D.G. Shamiryan, Zs. Toekei, G.P. Beyer, T. Conard, S. Vanhaelemeersch, K. Maex, J. Vac. Sci. Technol. B 19 1201 (2001)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Mikhail Erofeev.

Additional information

Contribution to the Topical Issue “Physics of Ionized Gases (SPIG 2016)”, edited by Goran Poparic, Bratislav Obradovic, Dragana Maric and Aleksandar Milosavljevic.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Erofeev, M., Ripenko, V., Shulepov, M. et al. Surface treatment of metals in the plasma of a nanosecond diffuse discharge at atmospheric pressure. Eur. Phys. J. D 71, 117 (2017). https://doi.org/10.1140/epjd/e2017-70636-6

Download citation

  • Received:

  • Revised:

  • Published:

  • DOI: https://doi.org/10.1140/epjd/e2017-70636-6

Navigation